• 한국재료학회지
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• 제25권8호
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• pp.423-428
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• 2015

Impedancemetric $NO_x$ (NO and $NO_2$) gas sensors were designed with a stacked-layer structure and fabricated using $LaCr_xCo_{1-x}O_3$ (x = 0, 0.2, 0.5, 0.8 and 1) as the receptor material and $Li_{1.3}Al_{0.3}Ti_{1.7}(PO_4)_3$ plates as the solid-electrolyte transducer material. The $LaCr_xCo_{1-x}O_3$ layers were prepared with a polymeric precursor method that used ethylene glycol as the solvent, acetyl acetone as the chelating agent, and polyvinylpyrrolidone as the polymer additive. The effects of the Co concentration on the structural, morphological, and $NO_x$ sensing properties of the $LaCr_xCo_{1-x}O_3$ powders were investigated with powder X-ray diffraction, field emission scanning electron microscopy, and its response to 20~250 ppm of $NO_x$ at $400^{\circ}C$ (for 1 kHz and 0.5 V), respectively. When the as-prepared precursors were calcined at $700^{\circ}C$, only a single phase was detected, which corresponded to a perovskite-type structure. The XRD results showed that as the Co concentration of the $LaCr_xCo_{1-x}O_3$powders increased, the crystal structure was transformed from an orthorhombic phase to a rhombohedral phase. Moreover, the $LaCr_xCo_{1-x}O_3$ powders with $0{\leq}x<0.8$ had a rhombohedral symmetry. The size of the particles in the $LaCr_xCo_{1-x}O_3$powders increased from 0.1 to $0.5{\mu}m$ as the Co concentration increased. The sensing performance of the stack-structured $LaCr_xCo_{1-x}O_3/Li_{1.3}Al_{0.3}Ti_{1.7}(PO_4)_3$ sensors was found to divide the impedance component between the resistance and capacitance. The response of these sensors to NO gas was more sensitive than that to $NO_2$ gas. Compared to other impedancemetric sensors, the $LaCr_{0.8}Co_{0.2}O_3/Li_{1.3}Al_{0.3}Ti_{1.7}(PO_4)_3$ sensor exhibited good reversibility and reliable sensingresponse properties for $NO_x$ gases.

• 수산해양기술연구
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• 제29권4호
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• pp.272-278
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• 1993

The trimethylamine-sensing characteristics of ZnO based thin film semiconductors and the sensitivity enhancement by squttering conditions have been investigated to develop a new type sensor for detecting fish freshness. The sensor fabricated with a 300nm of ZnO thin film with 4 wt% Al sub(2) O sub(3) and 1 wt% TiO sub(2) exhibited the highest sensitivity of 155 at 30$0^{\circ}C$ of working temperature and to the 240 ppm TMA gas. Deposition of ZnO thin film using a RF magnetron sputter was carried out at a pressure of 10 super(-2) Torr in pure oxygen gas with an RF power of 100W. The sensor exhibited a large response to the actual gases produced by a mackerel at an early stage of decomposition.

• 한국세라믹학회지
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• 제47권1호
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• pp.92-96
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• 2010

Based on the differential electrode equilibria approach, potentiometric YSZ sensors with semiconducting oxide electrodes for CO detection are developed. To improve the selectivity, sensitivity and response-time of the sensor, our strategy includes (a) selection of an oxide with a semiconducting response to CO, (b) addition of other semiconducting materials, (c) addition of a catalyst (Pd), (d) utilization of combined p- and n-type electrodes in one sensor configuration, and (e) optimization of operating temperatures. Excellent sensing performance is obtained by a novel device structure incorporating $La_2CuO_4$ electrodes on one side and $TiO_2$-based electrodes on opposite substrate faces with Pt contacts. The resulting response produces additive effects for the individual $La_2CuO_4$ and $TiO_2$-based electrodes voltages, thereby realizing an even higher CO sensitivity. The device also is highly selective to CO versus NO with minor sensitivity for NO concentration, compared to a notably large CO sensitivity.

• 한국전기전자재료학회논문지
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• 제13권10호
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• pp.865-870
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• 2000

In this paper, catalytic combustible gas sensor was fabricated and tested under flammable gases such as CH$_4$and $C_4$H$_{10}$by using Pt coil as a heater and/or temperature sensing element. Fine $Al_2$O$_3$powder was used for a bead and Pt, Pd noble metal powder for a catalyst. Resistance variation of Pt wire was traced by the changes of the gas concentrations in a chamber. Output voltage was then monitored to obtain the gas concentration from the resistance variation. In this experiment, MgO was used to protect cracks in the based and TiO$_2$to increase the sensitivity of the sensors. Water glass was also added to enhance the selectivity to the combustible gases.s.

• 센서학회지
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• 제6권6호
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• pp.476-482
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• 1997

주성분 분석 및 역전달 인공 신경망의 패턴 인식 기법과 산화물 반도체 가스센서 어레이를 사용한 소형 전자코 시스템을 제작하여 그 특성을 평가하였다. 센서 어레이로서 Pd가 첨가된 $WO_{3}$, Pt가 첨가된 $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$가 첨가된 $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$가 첨가된 후 Pd 코팅층이 형성된 $SnO_{2}$, $Al_{2}O_{3}$가 첨가된 ZnO 및 $PdCl_{2}$가 첨가된 $SnO_{2}$ 등의 6가지 조성의 감지재료가 사용되었다. 전자코 시스템 하드웨어는 CPU로서 16bit의 Intel 80c196kc, 시스템 동작 프로그램의 저장을 위한 EPROM, 인공 신경망의 최적화된 가중치의 다운로딩을 위한 EEPROM, 가스농도의 결과 표시를 위한 LCD 등으로 구성하였다. 시스템의 성능 평가를 위해 자동차에서 배출되는 환경오염 물질인 CO/HC 가스(CO 0%/HC 0 ppm 에서 CO 7.6%/HC 400 ppm 까지 범위의 26가지 CO/HC 혼합가스 패턴)에 대한 인식 실험 결과 우수한 특성을 얻을 수 있었다.

• 한국군사과학기술학회지
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• 제7권2호
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• pp.81-87
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• 2004

Semiconductor thick film gas sensors based on tin oxide are fabricated and their gas response characteristics are examined for four simulant gases of chemical warfare agent (CWA)s. The sensing materials are prepared in three different sets. 1) The Pt or Pd $(1,\;2,\;3\;wt.\%)$ as catalyst is impregnated in the base material of $SnO_2$ by impregnation method.2) $Al_2O_3\;(0,\;4,\;12,\;20\;wt.\%),\;In_2O_3\;(1,\;2,\;3\;wt.\%),\;WO_3\;(1,\;2,\;3\;wt.\%),\;TiO_2\;(3,\;5,\;10\;wt.\%)$ or $SiO_2\;(3,\;5,\;10\;wt.\%)$ is added to $SnO_2$ by physical ball milling process. 3) ZnO $(1,\;2,\;3,\;4,\;5\;wt.\%)$ or $ZrO_2\;(1,\;3,\;5\;wt.\%)$ is added to $SnO_2$ by co-precipitation method. Surface morphology, particle size, and specific surface area of fabricated sensing films are performed by the SEM, XRD and BET respectively. Response characteristics are examined for simulant gases with temperature in the range 200 to $400^{\circ}C$, with different gas concentrations. These sensors have high sensitivities more than $50\%$ at 500ppb concentration for test gases and also have shown good repetition tests. Four sensing materials are selected with good sensitivity and stability and are fabricated as a sensor array A sensor array Identities among the four simulant gases through the principal component analysis (PCA). High sensitivity is acquired by using the semiconductor thick film gas sensors and four CWA gases are classified by using a sensor array through PCA.

• 센서학회지
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• 제17권4호
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• pp.295-302
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• 2008

$TiO_2,\;ZrO_2$, and $SiO_2$ were added in the concentration of 1 - 3 wt.% to improve long-term stability for the $SnO2$ thick film gas sensor. Short-term sensor resistances up to 90 h were measured to investigate the stabilization time of initial resistance in air. Long-term resistance drifts in air and in gas to 5000 ppm methane for the sensors annealed at $750^{\circ}C$ for 1 h and continuously heated at an operating temperature of $400^{\circ}C$ were also measured up to 90 days at an interval of 1 day. The long-term drifts in methane sensitivity for the three metal oxide-doped $SnO2$ sensors are closely related to methane sensitivity level, catalytic activity, and long-term drift in sensor resistance in air. Those stabilities are mainly discussed in terms of oxidation state and catalytic activity.

• 마이크로전자및패키징학회지
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• 제14권2호
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• pp.59-63
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• 2007

간단한 PCB 공정을 기반으로 하여 저가형의 후막 가스 센서 모듈을 제안하고자 한다. 제안된 센서 모듈은 $NO_2/H_2$ 가스 센서와 습도센서, 그리고 히터를 포함한다. $NO_2/H_2$ 가스와 상대 습도 센서들은 각각 $SnO_2$와 $BaTiO_3$ 나노 입자들을 PCB 기판에서의 IDT(interdigital Transducer)에 프린팅 함으로써 제작되었다. 처음에 1% $H_2$ 가스를 센서 쳄버에 공급하고 4분 후 $H_2$가스 공급을 멈추고 공기를 주입시켰으며, 이러한 동작을 반복적으로 수행하였다. 마찬가지로 $NO_2$로 감지하도록 같은 동작을 실행하였다. $H_2$ 가스에 대한 결과는 도전성의 증가로 인하여 0.8V에서 3.5V로 증가함을 볼 수 있었으며, $H_2$ 가스를 주입한후의 반응 시간은 65초였다. $NO_2$ 가스의 경우는 도전성이 감소함으로써 2.7 V의 전압강하가 일어 났으며, 반응시간은 3초였다.

• The Korean Journal of Ceramics
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• 제4권2호
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• pp.103-113
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• 1998

By using a gas-tight electrochemical cell, we can perform high-temperature coulometric titration and measure electronic transport properties to determine the elecronic defect structure of metal oxides. This technique reduces the time and expense required for conventional thermogravimetric measurements. The components of the gas-tight coulometric titration cell are an oxygen sensor, Pt/yttria stabilitized zirconia(YSZ)/Pt, and an encapsulated metal oxide sample. Based on cell design, both transport and thermodynamic measurements can be performed over a wide range of oxygen partial pressure ($pO_2=10^{-35}$ to 1 atm). This paper describes the high-temperature gas-tight electrochemical cells used to determine electronic defect structures and transport properties for pure and doped-oxide systems, such as YSZ, doped and pure ceria $(Ca-CeO_2 \;and\; CeO_2)$, copper oxides and copper-oxide-based ceramic superconductors, transition metal oxides, $SrFeCo_{0.5}O_x,\; and \;BaTiO_2$.

• 센서학회지
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• 제23권5호
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• pp.337-341
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• 2014

For various additives doped-$VO_2$ critical temperature sensors using the nature of semiconductor to metal transition, the crystallinity, microstructure, and temperature vs. resistance characteristics were systematically investigated. As a starting material of $VO_2$ sensor, vanadium pentoxide ($V_2O_5$) powders were used, and CaO, SrO, $Bi_2O_3$, $TiO_2$, and PbO dopants were used, respectively. The $V_2O_5$ powders with dopants were mixed with a vehicle to form paste. This paste was silk screen-printed on $Al_2O_3$ substrates and then $V_2O_5$-based thick films were heat-treated at $500^{\circ}C$ for 2 hours in $N_2$ gas atmosphere for the reduction to $VO_2$. From X-ray diffraction analysis, $VO_2$ phases for pure $VO_2$, and CaO and SrO-doped $VO_2$ thick films were confirmed and their grain sizes were 0.57 to $0.59{\mu}m$. The on/off resistance ratio of the $VO_2$ sensor in phase transition temperature range was $5.3{\times}10^3$ and that of the 0.5 wt.% CaO-doped $VO_2$ sensor was $5.46{\times}10^3$. The presented critical temperature sensors could be commercialized for fire-protection and control systems.