• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.66-66
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• 2011

Anodic titanium dioxide (TiO2) nanotubes are very attractive materials for gas sensors due to its large surface to volume ratios. The most widely known method for fabrication of TiO2 nanotubes is anodic oxidation of metallic Ti foil. Since the remaining Ti substrate is a metallic conductor, TiO2 nanotube arrays on Ti are not appropriate for gas sensor applications. Detachment of the TiO2 nanotube arrays from the Ti Substrate or the formation of electrodes onto the TiO2 nanotube arrays have been used to demonstrate gas sensors based on TiO2 nanotubes. But the sensitivity was much lower than those of TiO2 gas sensors based on conventional TiO2 nanoparticle films. In this study, Ti thin films were deposited onto a SiO2/Si substrate by electron beam evaporation. Samples were anodized in ethylene glycol solution and ammonium fluoride (NH4F) with 0.1wt%, 0.2wt%, 0.3wt% and potentials ranging from 30 to 60V respectively. After anodization, the samples were annealed at $600^{\circ}C$ in air for 1 hours, leading to porous TiO2 films with TiO2 nanotubes. With changing temperature and CO concentration, gas sensor performance of the TiO2 nanotube gas sensors were measured, demonstrating the potential advantages of the porous TiO2 films for gas sensor applications. The details on the fabrication and gas sensing performance of TiO2 nanotube sensors will be presented.

• 한국표면공학회지
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• 제48권6호
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• pp.309-314
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• 2015

Multiwall carbon nanotubes are synthesized by using VLS mechanism for the application to $H_2$ gas sensor. MWCNT is not suitable for hydrogen gas sensor due to its low response to the gas. To enhance the gas sensing performance, multiwall carbon nanotubes are coated with $TiO_2$ nanoparticles. Scanning electron microscopy and Transmission electron microscopy showed that the synthesized MWCNT were well dispersed with the diameter and wall thickness of approximately 10-30nm and 5nm, respectively. The MWCNT sensor showed the sensitivities of 1.33-9.5% for the $H_2$ concentration of 100-5000ppm at room temperature. These sensitivities are significantly improved to 6.64-46.65% by coating $TiO_2$ nanoparticles to the MWCNT sensor. The mechanisms of $H_2$ gas sensing improvement of the MWCNT sensor coated with $TiO_2$ nanoparticles are discussed.

• 한국결정성장학회지
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• 제20권5호
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• pp.221-226
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• 2010

메칠멜캅탄($CH_3SH$) 가스를 검출하는 수정진동자(QCM) 가스센서를 QCM의 전극에 $TiO_2$ 나노입자와 전해질 폴리머를 증착하여 제조하였다. LBL-SA법에 의해 제조된 $TiO_2$/PSS 박막은 높은 비표면적을 나타내었고, 가스센서의 감도를 증가시켰다. 1.0 ppm의 농도를 갖는 메칠멜캅탄에 노출된 TEA 혹은 $TiO_2$/PSS 막이 증착된 QCM의 주파수 변이는 각각 약 9 Hz, 2 Hz 였다. ($TiO_2$/PSS) 박막의 증착수가 늘어남에 따라 제조된 박막의 비표면적이 증가하게 되어 QCM 센서의 주파수 변이도 점차적으로 증가하였다. 추가적으로 메칠멜캅탄 가스의 농도가 0.5 ppm에서 2.0 ppm으로 높아짐에 따라 QCM 센서의 주파수 변화도 증가되었다. 본 연구에서는, ($TiO_2$/PSS) 박막이 증착된 QCM 센서의 표면구조의 변화와 센서 특성을 측정하였다.

• 한국표면공학회지
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• 제48권5호
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• pp.238-244
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• 2015

$TiO_2$ nanowires were synthesized by hydrothermal method for the application to ethanol gas sensor. $TiO_2$ nanowires were decorated with Au nanoparticles to improve the sensitivity to ethanol gas. Scanning electron microscopy and Transmission electron microscopy revealed that the synthesized nanowires had diameters and lengths of approximately 100 - 200 nm and a few micrometers, respectively. Size of the Au nanoparticles decorated on the $TiO_2$ nanowires was observed to be in the range of 10 - 20 nm. X-ray diffraction confirmed that the decorated nanowires were composed of anatase-, rutile-$TiO_2$, and Au. The sensitivities of $TiO_2$ nanowires sensors decorated with Au were approximately 1.1 - 3.65 times as high as those of as-synthesized $TiO_2$ sensors for the ethanol concentration of 5 - 100 ppm at $200^{\circ}C$. The mechanism of the improved ethanol gas sensing of the $TiO_2$ nanowires decorated with Au nanoparticles is discussed.

• 한국재료학회지
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• 제17권8호
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• pp.437-441
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• 2007

Preparation and morphology control of $TiO_2$ nano powders for gas sensor applications are investigated. $TiO_2$ nanopowders with rutile and anatase structures were prepared by controlling the pH value of a precursor solution without any heat treatment. The mean particle size of $TiO_2$ powders were below 10nm. The prepared $TiO_2$ nano powders were hydrothermal treated by NaOH solution. The sample was washed in HCl solution. As a result and $TiO_2$ nanotubes were formed. The lengths of $TiO_2$ nanotube were $1{\mu}m$ and the diameters were 10nm. Crystal structure and microstructure of $TiO_2$ nanotube were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscope (TEM). As-prepared $TiO_2$ nanotube powders have several advantages of nano particle size and high surface area and could be a prominent candidate for nano-sensors. The sensitivity of $TiO_2$ nanotube sensor was measured for toluene and NO in this study.

• 센서학회지
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• 제28권4호
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• pp.225-230
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• 2019

$Au@TiO_2$ core-shell decorated rGO nanocomposite (NC) was prepared using a simple solvothermal method followed by heat treatment for gas sensor application. The crystal structure and morphology of the composites were characterized by X-ray powder diffraction and transmission electron microscopy, respectively. The $NO_2$ sensing response of the $Au@TiO_2/rGO$ NC was tested at operating temperatures from $250^{\circ}C$ to $500^{\circ}C$, and was compared with those of the bare rGO and $Au@TiO_2$ core-shell NPs. The $Au@TiO_2/rGO$ NC-based sensor showed a far higher response than the rGO or $Au@TiO_2$ core-shell based sensors, with the maximum response detected when the operating temperature was $400^{\circ}C$. This improved response was due to the high rGO gas absorption capability for $NO_2$ gas and the catalytic effect of $Au@TiO_2$ core-shell NPs in oxidizing $NO_2$ to $NO_3$.

• 한국전기전자재료학회논문지
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• 제29권12호
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• pp.809-813
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• 2016

We investigated a SiC-based hydrogen gas sensor with MIS (metal-insulator-semiconductor) structure for high temperature applications. The sensor was fabricated by $Pd/TiO_2/SiC$ structure, and a thin titanium dioxide ($TiO_2$) layer was exploited for sensitivity improvement. In the experiment, dependences of I-V characteristics and capacitance response properties on hydrogen gas concentrations from 0 to 2,000 ppm were analyzed at room temperature to $400^{\circ}C$. As the result, our sensor using $TiO_2$ dielectric layer showed possibilities with regard to use in hydrogen gas sensors for high-temperature applications.

• 한국안전학회지
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• 제1권1호
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• pp.21-26
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• 1986

Gas sensing materials for detecting inflammable gas such as alcohol, propane, acetic acid, carbon monoxide, hydrogen were developed by utiliting $MgO-Cr_2O_3-TiO_2$ system. Between 30$0^{\circ}C$ and 50$0^{\circ}C$, reversible chemisorption becomes dominant and the electrical canduction of P-type semiconductive with the gas chemisorption. The ceramic sensor exhibits a high sensitivity to particular reducing gas such as alcohol, whereas propane and butane have little effect on the resistivity. The time response of adsorption is estimated to be about 20 sec. On the other hand, the desorption process, which corresponds to oxidation due to oxygen adsorption, take more than 60 sec. Thus the ceramic sensor can be used as a alcohol sensor in an ambient aunosphere. As the oxygen concentration is increased from 0.1 to 10 precent($10^3-10^6ppm$), the resistance decreases rapidly but stabilizes at higher concentration.

• 한국가스학회지
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• 제13권2호
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• pp.23-29
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• 2009

Pt, Pd, In 등의 촉매금속을 사용하여 아세토나이트릴 유독가스에 대한 감도를 향상시키는 SnO2 가스센스에 대하여 연구하였다. Metal-SnO2 후막은 백금전극이 내장된 알루미나 지지체의 스크린법으로 제작되었다. 본 센서의 특성은 검출가스의 농도의 함수로 반응기내 각센서의 전기적 저항을 측정하여 조사하였으며, 10-50ppm 범위의 유독가스 농도에 대하여 검지 측정하였다. 그 결과 촉매금속의 종류에 따라 센서에서 반응하는 감도가 각각 다르게 선택성을 갖고 있는 것으로 나타났다.

• 센서학회지
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• 제23권3호
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• pp.207-210
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• 2014

$TiO_2$ oxide semiconductor is being widely studied in various applications such as photocatalyst and photosensor. Pd/$TiO_2$ gas sensor is mainly used to detect $H_2$, CO and ethanol. This study focus on increasing hydrogen detection ability of Pd/$TiO_2$ in room temperature through Al-doping. Pd/$TiO_2$ was fabricated by the hydrothermal method. Contacting to Aluminum (Al) foil led to Al doping effect in Pd/$TiO_2$ by thermal diffusion and enhanced hydrogen sensing response. $TiO_2$ nanoparticles were sized at ~30 nm of diameter from scanning electron microscope (SEM) and maintained anatase crystal structure after Al doping from X-ray diffraction analysis. Presence of Al in $TiO_2$ was confirmed by X-ray photoelectron spectroscopy at 73 eV. SEM-energy dispersive spectroscopy measurement also confirmed 2 wt% Al in Pd/$TiO_2$ bulk. The gas sensing test was performed with $O_2$, $N_2$ and $H_2$ gas ambient. Pd/Al-doped $TiO_2$ did not response $O_2$ and $N_2$ gas in vacuum except $H_2$. Finally, the normalized resistance ratio ($R_{H2on}/R_{H2off}$) of Pd/Al-doped $TiO_2$ increases about 80% compared to Pd/$TiO_2$.