• Title/Summary/Keyword: $TiO_2$박막

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Microstructure Analysis of Y-Ba-Cu-O thin Films Grown on STO Substrates with Controlled ZnO Nanorods (ZnO 나노막대가 형성된 STO기판에 증착한 Y-Ba-Cu-O 박막의 미세구조 분석)

  • Oh, S.K.;Jang, G.E.;Tran, H.D.;Kang, B.W.;Kim, K.W.;Lee, C.Y.;Hyun, O.B.
    • Progress in Superconductivity
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    • v.11 no.1
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    • pp.47-51
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    • 2009
  • For many large-scale applications of high-temperature superconducting materials, large critical current density ($J_c$) in high applied magnetic fields are required. A number of methods have been reported to introduce artificial pinning centers in $YBa_2Cu_3O_{7-{\delta}}$ films for enhancement of their $J_c$. We studied the microstructures and characteristic of $YBa_2Cu_3O_{7-{\delta}}$ films fabricated on $SrTiO_3$ (100) substrates with ZnO nanorods as pinning centers. Au catalyst nanoparticles were synthesized on STO substrates with self assembled monolayer to control the number of ZnO nanorods. The density of Au nanoparticles is approximately $240{\sim}260{\mu}m^{-2}$ with diameters of $41{\sim}49nm$. ZnO nanorods were grown on STO by hot-walled PLD with Au nanoparticles. Typical size of ZnO nanorod was around 179 nm in diameter and $2{\sim}6{\mu}m$ in length respectively. YBCO films deposited directly on STO substrates show the c-axis orientation, while YBCO films with ZnO nanorods exhibit any mixed phases without any typical crystal orientation.

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Electrical characteristic of PZT thin film deposit by Rf-magnetron sputtering as Pb excess ratio of target (Sputtering법으로 성장한 PZT 박막의 Target의 Pb Excess에 따른 전기적 특성에 관한 연구)

  • Lee, Kyu-Il;Kang, Hyun-Il;Park, Young;Park, Ki-Yeub;Song, Joon-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.570-573
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    • 2002
  • Pb(Zr0.52Ti0.48)O3 (PZT) thin films were deposited on the Pt/Ti bottom electrode by rf magnetron sputtering method from target containing 5%, 25% and 50% Pb excess for applying ferroelectric random access memory (FRAM). PZT films were deposited at $300^{\circ}C$ and then they were crystallized by rapid thermal annealing (RTA) at $700^{\circ}C$. After RTA treatment, our results showed that all PZT films indicated perovskite polycrystalline structure with preferred orientation (110) and no pyrochlore phase was observed by X-ray diffraction (XRD) and by Scanning electron microscopy (SEM). A well-fabricated PZT film of excess Pb 25% capacitor showed a leakage current density in the order of $2.63{\times}10^{-7}A/cm^2$ at 100kV/cm, a remanent polarization of $3.385{\mu}C/cm^2$ and a coercive field of 41.32 kV/cm. The results showed that Pb excess of target affects to electrical properties of PZT thin film.

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Pyroelectric Properties on the Orientation of SBN Thin Film (SBN 박막의 배향도에 따른 초전특성 변화)

  • Lee, Chae-Jong;Lee, Hee-Young;Kim, Jeong-Joo;Cho, Sang-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.366-367
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    • 2006
  • Different orientated SBN thin films were deposited by Ion Beam Sputtering, and electric properties were measured on each orientation. Ferroelectric $Sr_xBa_{1-x}Nb_2O_6$(SBN) has excellent electro-optic, photo-refractive, piezoelectric, pyroelectric properties. SBN thin film has been deposited by various method, of sol-gel, PLD, CVD, sputtering, etc.. To avoid lead pollution of Pb-system perovskite ferroelectric materials. SBN thin films were fabricated for pyroelectric IR sensor. Using the ceramic target of the same composition and Pt(100)/$TiO_2/SiO-2$/Si(100) substrate, crystallization and orientation behavior as well as electric properties of the films were examined. Seed layer and thin films thickness was controlled to observe the effect on preferred orientation. We measured I-V, C-V, P-E hysteresis to characterize electric-properties on each orientations.

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Fabrication and Characteristics of a White Emission Electroluminicent Device (백색 전계발광소자의 제작과 그 특성)

  • Kim, Woo-Hyun;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.10 no.6
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    • pp.295-303
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    • 2001
  • White emission thin film electroluminecent device was fabricated with ZnS for phosphor layers and BST ferroelectric thin film for insulating layers. The ZnS:Mn and $ZnS:SmF_3$ layers were used for emission of red color. Also the $ZnS:TbF_3$ and $ZnS:AgF_3$ layers were used to emission of green and blue color, respectively. And the fabrication conditions of the BST insulating layers were followings, that is, the composition ratio of target, substrate temperature, working pressure and operating gas ratio were $Ba_{0.5}Sr_{0.5}Ti_{0.3}$, $400^{\circ}C$, 30 mTorr and 9:1, respectively. The thickness of phosphor were 150 nm for each layers and the insulating layers of upper and bottom were 400 nm and 200 nm, respectively. The luminesence threshold voltage was $75\;V_{rms}$ and the maximum brightness of the thin film electroluminecent device was $3200\;cd/m^2$ at $100\;V_{rms}$.

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Microstructural and Electrical Properties of Bi0.9A0.1Fe0.975V0.025O3+α(A=Nd, Tb) Thin Films by Chemical Solution Deposition Method (화학용액 증착법으로 제조한 Bi0.9A0.1Fe0.975V0.025O3+α(A=Nd, Tb) 박막의 구조와 전기적 특성)

  • Chang, Sung-Keun;Kim, Youn-Jang
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.10
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    • pp.646-650
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    • 2017
  • We have evaluated the ferroelectric and electrical properties of pure $BiFeO_3$ (BFO) and $Bi_{0.9}A_{0.1}Fe_{0.975}V_{0.025}O_{3+{\alpha}}$ (A=Nd, Tb) thin films on $Pt(111)/Ti/SiO_2/Si(100)$ substrates by using a chemical solution deposition method. The remnant polarization ($2P_r$) of the $Bi_{0.9}Tb_{0.1}Fe_{0.975}V_{0.025}O_{3+{\alpha}}$ (BTFVO) thin film was approximately $65{\mu}C/cm^2$, with a maximum applied electric field of 950 kV/cm and a frequency of 10 kHz, where as that of the $Bi_{0.9}Nd_{0.1}Fe_{0.975}V_{0.025}O_{3+{\alpha}}$ (BNFVO) thin film was approximately $37{\mu}C/cm^2$ with a maximum applied electric field of 910 kV/cm. The leakage current density of the co-doped BNFVO thin film was four orders of magnitude lower than that of the pure BFO thin film, at $2.75{\times}10^{-7}A/cm^2$ with an applied electric field of 100 kV/cm. The grain size and uniformity of the co-doped BNFVO and BTFVO thin films were improved, in comparison to the pure BFO thin film, through structural modificationsdue to the co-doping with Nd and Tb.

Surface morphology of YBa$_{2}$Cu$_{3}$O$_{7}$ thin films prepared by the PLD method (PLD법으로 제작한 YBa$_{2}$Cu$_{3}$O$_{7}$ 반막의 표면상태 변화)

  • Han, Gi-Youl;Hwang, Tae-Jong;Yu, Seong-Cho;Lee, Kyu-Won;Ha, Dong-Han
    • 한국초전도학회:학술대회논문집
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    • v.10
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    • pp.66-69
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    • 2000
  • We have observed the morphology of YBCO thin films grown on the SrTiO$_3$(100) substrates by the Pulsed Laser Deposition method. AFM and SEM images show that the YBCO grains grow spirally from their own seeds whereas outgrowths are considered to remain unchained as the film thickness increases. The images of various stages of film growth suggest that the outgrowths of 1000${\sim}$2000 ${AA}$ size are mainly formed at the very early stage of film growth. The results of XRD measurement clearly show that even a film of about 10 ${AA}$ thickness already forms orthorhombic YBCO structure although common superconducting resistivity behavior is known to be observed for the films with thickness above 100 ${AA}$.

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Fabrication and Characteristics of Electrochromic TNT Thin Films (전기변색 TNT 박막의 절조 및 특성 평가)

  • Oh, Hyo-Jin;Lee, Nam-Hee;Yon, Yeong-Ung;Lee, Dae-Girl;Hwang, Jong-Sun;Kim, Sun-Jae
    • Proceedings of the KIEE Conference
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    • 2009.04a
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    • pp.27-29
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    • 2009
  • 본 연구에서는 Titanate Nanotube (TNT)를 LBL-SA (layer-by-layer self-assembling) method을 이용하여 전기변색 (electrochromism device, ECD) 소자에 적용하고자 하였다. TNT 분말은 10M NaOH와 $TiO_2$를 혼합한 후 autoclave에서 130$^{\circ}C$, 48시간 동안 수열합성하여 제조하였다. 주사전자현미경 (SEM)으로 TNT 분말의 형상을 관찰한 결과, 직경 20$\sim$30nm, 길이 500$\sim$600nm의 튜브 형상을 나타내었으며, X-선 회절시험 (XRD) 결과 층상구조로 확인되었다. 코팅 물질의 표면 전하를 이용한 LBL-SA method에 적용시키기 위해 수용액 중에서 TNT 입자 표면 전하를 TBAOH (tetrabutylammonium hydroxide)를 적정하여 제타 전위 값이 -40mV로 최대가 되도록 하였으며, 이때 pH 값은 9로 나타났다. 2전극 시스템을 이용하여 cycle voltammetry를 측정한 결과, -0.5$\sim$-1.5V 영역에서 산화환원전위 피크가 뚜렷하게 나타났으며, 짙은 갈색으로 변색되는 것을 확인하였다. 본 연구 결과로서 TNT 박막은 전기를 인가하였을 때 n-type 반도체 성질을 갖는 것으로 나타났으며, 앞으로 display 연구 분야에 적용할 수 있을 것으로 주목된다.

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The Fabrication of Ferroelectric PZT thin films by Sol-Gel Processing (졸-겔법에 의한 강유전성 PZT 박막의 제작)

  • Lee, B.S.;Chung, M.Y.;You, D.H.;Kim, Y.U.;Lee, S.H.;Lee, N.H.;Ji, S.H.;Park, S.H.;Lee, D.C.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05c
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    • pp.93-96
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    • 2002
  • In this study, PZT thin films were fabricated using sol-gel processing onto Si/$SiO_2$/Ti/Pt substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C$, $650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

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A study on the Improvement of Ferroeletric Characteristics of PZT thin film for FRAM Device (FRAM 소자용 PZT박막의 강유전특성에 관한 연구)

  • Lee, B.S;Chung, M.Y.;Shin, P.K.;Lee, D.C.;Lee, S.H.;Kim, J.S.
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.1881-1883
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    • 2005
  • In this study, PZT thin films were fabricated using sol-gel Processing onto $Si/SiO_2/Ti/Pt$ substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C$, $650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}\;A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

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A study on the PZT thin films for Non-volatile Memory (비휘발성 메모리용 강유전체 박막에 관한 연구)

  • Lee, B.S.;Park, J.K.;Kim, Y.W.;Park, K.S.;Kim, S.H.;Lee, D.C.
    • Proceedings of the KIEE Conference
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    • 2003.07c
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    • pp.1562-1564
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    • 2003
  • In this study, PZT thin films were fabricated using sol-gel processing onto Si/$SiO_2$/Ti/Pt substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C,\;650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

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