• 한국분말재료학회지
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• 제11권4호
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• pp.322-327
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• 2004

Ultrafine titanium carbide particles were synthesized by the reaction of liquid-magnesium and vaporized TiCl$_{4}$+C$_{x}$Cl$_{4}$(x = 1 and 2) solution. Fine titanium carbide particles with about 50 nm were successfully produced by combining Ti and C atoms released by chloride reduction of magnesium, and vacuum was then used to remove the residual phases of MgCl$_{2}$ and excess Mg. Small amounts of impurities such as O, Fe, Mg and Cl were detected in the product, but such problem can be solved by more precise process control. The lattice parameter of the product was 0.43267 nm, near the standard value. With respect to the reaction kinetics, the activation energy for the reactions of TiCl$_{4}$+C$_{2}$Cl$_{4}$and Mg was found to 69 kJ/mole, which was about half value against the use of TiCl$_{4}$+CCl$_{4}$, and such higher reactivity of the former contributed to increase the stoichiometry until the level of TiC$_{0.96}$ and decrease the free carbon content below 0.3 wt.%.

• 대한화학회지
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• 제18권6호
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• pp.408-414
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• 1974

사염화티탄과 피페리딘 및 디페닐아민의 반응을 반응생성물들을 분리하여 규명함으로써 설명하였다. 사염화티탄과 피페리딘은 부가반응과 치환반응이 다음과 같이 동시에 일어남을 알 수 있었다.$TiCl_4+C_5H_{10}NH{\to}TiCl_4{\cdot}C_5H_{10}NH$$TiCl_4+C_5H_{10}{\to}TiCl_3{\cdot}NC_5H_{10}+HCl$부가반응은 비교적 빨리 일어나며 수분내에 반응이 완결되는데 비하여 치환반응은 매우 느리게 일어난다. 위의 두 반응생성물을 모두 분리하여 화학분석결과와 핵자기공명 및 적외선 스펙트럼을 고찰 함으로써 완전히 규명하였다. 이들 반응생성물에는 모두 피페리딘의 염화수소염이 공침됨을 알 수 있었다. 그러나 디페닐아민의 경우, 위의 반응과 아주 비슷하게 일어나지만 부가반응 생성물은 순수하게 얻을 수 있었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2002년도 추계학술발표강연 및 논문개요집
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• pp.76-76
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• 2002

• 한국진공학회지
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• 제11권3호
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• pp.159-165
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• 2002

본 연구에서는 $TiCl_4$과 $NH_3$을 이용하여 atomic layer deposition(ALD)법으로 TiN막을 증착한 후, 그 막의 특성에 관하여 조사하였다. 최적 공정조건에서 TiN막의 성장률은 cycle당 두께가 약 0.6 $\AA$인 것으로 나타났고, 비저항은 반응온도 구간에서 200~350 $\mu\Omega$cm 수준으로 낮게 얻어졌다. XRD분석결과 TiN-ALD온도구간에서 TiN막이 결정화되었음을 알 수 있었다. AES 분석결과 Cl불순물의 함량이 거의 없는 상태(<1 at%)로 나타났고, TiN막에서의 Ti:N비가 1:1인 것으로 보아 거의 균일하게 형성되었음을 알 수 있었다. 또한 SEM관찰로 Aspect ratio 10:1의 trench 내에 형성된 TiN막의 스텝.커버리지는 극히 우수함을 알 수 있었다.

• 한국표면공학회지
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• 제42권4호
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• pp.169-172
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• 2009

We investigated the dry-etching mechanism of the TiN thin film using a $Cl_2$/Ar inductively coupled plasma system. To understand the effect of the $Cl_2$/Ar gas mixing ratio, we etched the TiN thin film by varying $Cl_2$/Ar gas mixing ratio. When the gas mixing ratio was 100% $Cl_2$, the highest etch rate was obtained. The chemical reaction on the surface was investigated with X-ray photoelectron spectroscopy (XPS). Scanning electron microscopy (SEM) was used to examine etched profiles of the TiN thin film.

• 대한화학회지
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• 제22권6호
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• pp.423-430
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• 1978

트리옥산을 니트로벤젠 용매중에서 Ti$Cl_4$로서 중합시킬때 개시 반응기구를 연구하였다. 중합반응속도를 측정한결과 미량의 물이나 메탄올을 첨가하면 반응속도가 급격히 감소하였으며 중합을 개시하는 데는 조촉매로서 다른 물질이 필요 없음이 알려졌다. 유전상수 측정결과에 의하면 중합과정중 양성이온이 생기지 않으며 중합제나 개시제 용액의 전기전도도를 측정한 결과 개시 반응은 니트로벤젠 용매중에서 개시제가 동종간 주고 받기반응에 의하여 생긴 Ti$Cl_3^+$ 양이온에 의하여 일어난다는 것이 판명되었다.

• 한국세라믹학회지
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• 제23권6호
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• pp.45-51
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• 1986

$SrTiO_3$ reaction mechanism formed from $TiCl_4$ and $SrCl_2$ solution by direct-wet-process was studied. Through this study it is identified that crystalline $SrTiO_3$ is formed above pH 13.8 amorphous $SrTiO_3$ above pH7 and crystallization temperature of amorphous $SrTiO_3$ is at 37$0^{\circ}C$. the final products are composed of 60% crystalline $SrTiO_3$ and 40% amorphous $SrTiO_3$ The amorphous $SrTiO_3$ is identified with the IR absorption spectrum of Sr-Ti-O by FT-IR spectrometer. Under pH 7 gelationus metatitanate (H2TiO3) is formed from TiCl4 but above pH7 the activity by the formation of metatitnic acid ion $[TiO_3]^{2-}$ is so high that $SrTiO_3$is formed more easily through the reaction with $Sr^{2+}$.

• 한국분말재료학회지
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• 제18권4호
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• pp.359-364
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• 2011

Zr-Ti alloy powders were successfully synthesized by magnesium thermal reduction of metal chlorides. The evaporated and mixed gasses of $ZrCl_4+TiCl_4$ were injected to liquid magnesium and the chloride components were reduced by magnesium leading to the formation of $MgCl_2$. The released Zr and Ti atoms were then condensed to particle forms inside the mixture of liquid magnesium and magnesium chloride, which could be dissolved fully in post process by 1~5% HCl solution at room temperature. By the fraction-control of individually injected $ZrCl_4$ and $TiCl_4$ gasses, the final compositions of produced alloy powders were changed in the ranges of Zr-0 wt.%~20 wt.%Ti and their purity and particle size were about 99.4% and the level of several micrometers, respectively.

• 산업기술연구
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• 제17권
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• pp.241-247
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• 1997

A numerical model has been proposed for a diffusion flame reactor to manufacture ultrafine $TiO_2$ powders. The model equations such as mass balance equation, the 0th, 1st, and 2nd moment equations of aerosols were considered. The phenomena such as $TiCl_4$ reaction rate, $TiO_2$ nucleation rate and the coagulation of $TiO_2$ powders were included in the aerosol dynamic equation. It is found that the $TiO_2$ particle concentration becomes higher, as the inlet $TiCl_4$ concentration and the total gas flow rate increase, and also as the flame temperature decreases. The $TiO_2$ particle size increases, as the flame temperature and the inlet $TiCl_4$ concentration increase and the total gas flow rate decreases.

• Corrosion Science and Technology
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• 제18권3호
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• pp.110-116
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• 2019

Resistances to pitting corrosion of additive manufactured (AM) Ti-6Al-4V alloys in 0.6 M NaBr and 0.6 M NaCl aqueous solutions were compared using micro-droplet cell techniques. With respect to the pitting corrosion resistance, this study focused on two different types of halide anions in aqueous solutions, i.e. $Br^-$ and $Cl^-$. The differences between $Br^-$ and $Cl^-$ halide anions for breakdown on passive films of AM Ti-6Al-4V alloy were explained using Langmuir adsorption model with their equilibrium adsorption coefficients. The results of the analysis showed that the lower resistance to pitting potential of AM Ti-6Al-4V alloy in $Br^-$ aqueous solution was attributed to the higher equilibrium adsorption coefficient of Br-. In addition, micro-electrochemical test results showed that the pitting corrosion resistance of dark grains in additive manufactured Ti-6Al-4V alloy was lower as compared to that of bright grains due to the larger volume of ${\alpha}^{\prime}$ phase that caused the susceptibility to pit initiation.