• Title/Summary/Keyword: $SiO_2$ 콜로이달

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Effect of Colloidal Silica and Pre-Coating of Cathode on Copper Electrodeposited Film (구리 전착층에 미치는 콜로이달실리카 및 음극 Pre-Coating의 영향)

  • Lee, Sang-Baek;Yun, Jeong-Mo;Park, Hyeong-Ho;Bae, In-Seong;Kim, Byeong-Il
    • Korean Journal of Materials Research
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    • v.11 no.7
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    • pp.569-574
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    • 2001
  • The crystal structure, surface morphology and preferred orientation of the copper electrodeposit were investigated by the using sulfate bath with $SiO_2$suspensions and the cathode substrate Au sputtered. As by the addition of colloidal silica in copper electrolytic bath and Au pre-coating on substrate, the crystal particles of deposits was fined-down, made uniform and the account of particles were increased. Hardness of copper electrodeposits with colloidal silica increased about 15% in comparison with that of pure copper deposit film and (111), (200) and (311) plane of X-ray diffraction patterns were almost swept away, so preferred orientation of the copper deposits changed from (111) to (110) plane by codeposit $SiO_2$ and precoating the substrate.

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Room Temperature Strength and Crack Healing Morphology of Si3N4 Composite Ceramics with SiO2 Colloidal (SiO2 콜로이달에 의한 Si3N4 복합 세라믹스의 상온굽힘강도 및 균열치유 현상)

  • Nam, K.W.;Kim, J.S.;Lee, H.B.
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.7
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    • pp.652-657
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    • 2009
  • Strength characteristics of $Si_3N_4$ composite ceramics has been studied as functions of heat-treatment temperature and additive $SiO_2$. $SiO_2$ colloidal could significantly increase the bending strength. Crack healing temperature decreased 300 K by additive $TiO_2$. Bending strength of specimen added $SiO_2$ is higher than that of non-added $SiO_2$. Moreover, bending strength of specimen with $SiO_2$ colloidal coating is much higher that of non-coated specimen. In in-situ observation, crack-healed specimen at 1,573 K shows phenomenon like a fog on the surface. By SPM, both crack-healed specimen, non-coating and coating of $SiO_2$ colloidal, at 1,273 K were healed completely but both of 1,573 K exist crack. This was made by evaporation of $SiO_2$ at high temperature. Crack-healing materials of $Si_3N_4$ composite ceramics is crystallized $Y_2Si_2O_7$, $Y_2Ti_2O_7$ and $SiO_2$. A large amount of Si and O, and little C were detected by EPMA. Si and O increase but C decreases according to heat treatment temperature. Specimens with additive $SiO_2$ were more detected Si and O than that of non-additive $SiO_2$. Specimen with $SiO_2$ colloidal coatings were much more detected O.

Characterization of High Temperature Strength of Si3N4 Composite Ceramics According to the Amount of SiO2 Nano Colloidal Added (SiO2 나노 콜로이달 첨가량에 따른 Si3N4의 고온강도 특성)

  • Nam, Ki-Woo;Lee, Kun-Chan
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.11
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    • pp.1233-1238
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    • 2009
  • This study analyzed the characterization of high temperature strength of $Si_3N_4$ composite ceramics additive based on variations in the amount of nano colloidal $SiO_2$ added. Semi-elliptical cracks about 100 ${\mu}m$ length were obtained from a Vickers indenter using a load of 24.5 N. The results showed that the heat-treated smooth specimens with $SiO_2$ nano colloidal coating exhibited the highest bending strength at 0.0 wt% $SiO_2$ nano colloidal added, which is amounted to a 187 % increase over that of smooth specimen. Limiting temperature for bending strength of crack-healed zone for bending strength was about 1273 K. However, the bending strength of SSTS-3 and SSTS-4 was considerably increased while that of SSTS-1 and SSTS-2 was decreased at a temperature of 1,573K.

Effect of Colloidal Silica on Electredeposited Film from Copper sulfate Bath (황산구리 전해욕의 전착피막에 미치는 콜로이달실리카의 영향)

  • Lee, Sang-Baek;Kim, Byeong-Il;Yun, Jeong-Mo;Park, Jeong-Hyeon
    • Korean Journal of Materials Research
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    • v.11 no.5
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    • pp.413-418
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    • 2001
  • We investigated change of crystal structure, surface morphology and crystal orientation of the electrodeposited film from dispersed $SiO_2$ suspensions (colloidal silica) copper sulfate bath and arse corrosion potentials and physical specific properties. As addition of colloidal silica in copper electrolytic hath, the crystal Particles on filial was fined-down, made uniform and account of particles were increased. Hardness of copper electrodeposited film ascended about 15% and (111), (200) and (311) plane of X-ray diffraction patterns were almost swept away, so preferred orientation chanced from (111) to (110) plane. Also, corrosion potential of electrodeposited copper film was noble with colloidal silica addition.

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Synthesis of Sludge Waste-derived Semiconductor Grade Uniform Colloidal Silica Nanoparticles and Their CMP Application (슬러지 폐기물을 활용한 반도체급 균일한 콜로이달 실리카 나노입자의 제조 및 CMP 응용)

  • Kim, Dong Hyun;Kim, Jiwon;Jekal, Suk;Kim, Min Jeong;Kim, Ha-Yeong;Kim, Min Sang;Kim, Sang-Chun;Park, Seon-Young;Yoon, Chang-Min
    • Journal of the Korea Organic Resources Recycling Association
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    • v.30 no.3
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    • pp.5-12
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    • 2022
  • This study suggests the effective recycling method of sludge waste from various industrial fields to synthesize uniform colloidal silica nanoparticles. In detail, polymers are removed from the sludge waste to attain sludge-extracted silica (s-SiO2) micron-sized particles, and ammonia assisted sonication is applied to s-SiO2, which has effectively extracted the silanol precursor. The nano-sized silica (n-SiO2) particles are successfully synthesized by a typical sol-gel method using silanol precursor. Also, the yield amounts of n-SiO2 are determined by the function of s-SiO2 etching time. Finally, n-SiO2-based slurry is synthesized for the practical CMP application. As a result, rough-surfaced semiconductor chip is successfully polished by the n-SiO2-based slurry to exhibit the mirror-like clean surface. In this regard, sludge wastes are successfully prepared as valuable semicondutor grade materials.

Characteristics of Crack Healing and High Temperature Strength of High Strength Sialon (고강도 사이알론의 균열치유와 고온강도 특성)

  • Nam, Ki-Woo;Park, Sang-Hyun;Park, Seung-Won;Moon, Suk-Jae
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.33 no.9
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    • pp.957-962
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    • 2009
  • Sialon was produced by hot-pressing the mixtures of $Si_3N_4$, AlN and $Y_2O_3$ powders. All fracture tests were performed on a three-point loading system with a 30 mm bending span. Fracture toughness and Vickers hardness of smooth specimen were average 7.05 $MPa{\cdot}m^{0.5}$ and Hv = 1580, respectively. Density of three kinds of specimens, smooth specimen, smooth and healed specimen, smooth with $SiO_2$ colloidal coating and healed specimen, had beyond 99 % of theoretical density. Bending strength of smooth healed specimens had high strength more than 1 GPa. Crack healed specimens recovered as strength as smooth specimen. That is, cracked specimen with $SiO_2$ colloidal coating on cracked part recovered strength by heat treatment, completely. Crack healing of $Si_3N_4$ composite ceramics had contributed glassy $SiO_2$ to strength recovery. Limiting high temperature for bending strength of heat treated smooth specimen for bending strength was about 1273 K.

Cracked-Healing and Bending Strength of Si3N4 Ceramics (Si3N4 세라믹스의 균열 치유와 굽힘 강도 특성)

  • Nam, Ki-Woo;Park, Seung-Won;Do, Jae-Youn;Ahn, Seok-Hwan
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.11
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    • pp.957-962
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    • 2008
  • Crack-healing behavior of $Si_3N_4$ composite ceramics has been studied as functions of heat-treatment temperature and amount of additive $SiO_2$ colloidal. Results showed that optimum amount of additive $SiO_2$ colloidal and coating of $SiO_2$ colloidal on crack could significantly increase the bending strength. The heat-treatment temperature has a profound influence on the extent of crack healing and the degree of strength recovery. The optimum heat-treatment temperature depends on the amount of additive $SiO_2$ colloidal. Crack healing strength was far the better cracked specimen with $SiO_2$ colloidal coating on crack surface. After heat treatment at the temperature 1,273 K in air, the crack morphology almost entirely disappeared by scanning prob microscope. At optimum healing temperature 1,273 K, the bending strength with additive $SiO_2$ colloidal 0.0 wt.% without $SiO_2$ colloidal coating recovered to the value of the smooth specimens at room temperature for the investigated crack sizes $100\;{\mu}m$. But that with $SiO_2$ colloidal coating increase up to 140 %. The amount of optimum additive $SiO_2$ colloidal was 1.3 wt.% and crack healed bending strength with $SiO_2$ colloidal coating increase up to 160 % to smooth specimen of additive $SiO_2$ colloidal 0.0 wt.%. Crack closure and rebonding of the crack due to oxidation of cracked surfaces were suggested as a dominant healing mechanism operating in $Si_3N_4$ composite ceramics.

Characteristics of Sialon ceramics by Kinds of Additive $Al_2O_3\;and\;Y_2O_3$ (소결보조재 $Al_2O_3$$Y_2O_3$종류에 따른 사이알론 세라믹스의 특성)

  • Park, S.W.;Moon, S.J.;Ahn, S.H.;Kim, J.S.;Nam, K.W.
    • Journal of Power System Engineering
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    • v.12 no.3
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    • pp.50-54
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    • 2008
  • Various Sialon ceramics were fabricated by hot-pressing mixtures of $Si_3N_4$ with additive $Y_2O_3$ and $Al_2O_3$. The polished specimen of SiAlON $I{\sim}III$ went on increasing in strength by heat treatment, heat treated non-polished specimen were similar or up to polished specimen in strength. The polished specimen of both SiAlON IV and V showed a very high strength, but were not Increasing of strength by heat treatment. All specimens were fractured on the surface and at the inner flaws. Surface fractures were initiated from the polished surface flaw and corner flaw. Inner fractures were initiated from an internal defect.

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Polishing of Oxide film by colloidal silica coated with nano ceria (나노 세리아 입자가 표면 코팅된 콜로이달 실리카 슬러리의 Oxide film 연마특성)

  • Kim, Hwan-Chul;Lee, Seung-Ho;Kim, Dae-Sung;Lim, Hyung-Mi
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.35-37
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    • 2005
  • 100, 200nm 크기의 colloidal silica 각각에 나노 ceria 입자를 수열합성법으로 코팅하였다. Colloidal silica 입자에 ceria를 코팅 시 slurry의 pH조절과 수열처리에 이용하여 silica에 ceria가 코팅됨을 TEM과 zeta-potential을 이용하여 확인하였다. 연마 슬러리의 분산 안정성과 연마효율을 높이기 위하여 슬러리의 pH 는 9로 하였으며, 이때의 zeta-potential 값은 -25 mV이었다. 1 wt%로 제조된 연마슬러리를 이용하여, 4 inch $SiO_2$, $Si_3N_4$ wafer를 압력변화에 따른 연마특성을 관찰 하였다. Ceria coated colloidal silica 100 nm, 200 nm와 commercial한 $CeO_2$입자를 연마압력 6 psi로 oxide film을 연마한 결과 연마율이 각각 2490 ${\AA}/min$, 4200 ${\AA}/min$, 4300 ${\AA}/min$으로 측정되었다. 또한 $SiO_2$, $Si_3N_4$ film의 6 psi압력에서 ceria coated colloidal silica 100 nm, 200 nm와 commercial 한 $CeO_2$입자의 선택비는 3, 3.8, 6.7 이었다. 입자크기가 클수록 연마율이 높으며, Preston equation을 따라 연마 압력과 연마율이 비례하였다.

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Preparation and Gas Permeation Properties of Silica Membranes on Porous Stainless Steel-Tube Supports (다공성 금속 지지체에 제조된 실리카 분리막의 기체 투과 특성)

  • Lee, Hye Ryeon;Seo, Bongkuk
    • Membrane Journal
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    • v.24 no.3
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    • pp.177-184
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    • 2014
  • Silica membranes with high permeability were prepared using colloidal and polymeric silica sols on a porous stainless steel-tube support by a DRFF and SRFF method. Silica sols were derived with tetraethylorthosilicate (TEOS) by sol-gel method and analyzed with DLS, FE-SEM, and $N_2$ adsorption. The coating of the intermediate layer with colloidal silica sol on the stainless steel-tube support led to a denser surface morphology of the membrane along with a considerable reduction in the number of surface defect. As the polymeric silica sol enclosed the colloidal silica sol with spherical particles during the SRFF method, the separation-layer-coated silica membrane showed a denser surface than the intermediate layer. Moreover, the silica membranes showed high hydrogen gas permeability of $(6.63-9.21){\times}10^{-5}mol{\cdot}m^{-2}{\cdot}s^{-1}{\cdot}Pa^{-1}$ with low $H_2/N_2$ perm-selectivity (2.9-3.1) at room temperatures.