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http://dx.doi.org/10.17137/korrae.2022.30.3.5

Synthesis of Sludge Waste-derived Semiconductor Grade Uniform Colloidal Silica Nanoparticles and Their CMP Application  

Kim, Dong Hyun (Department of Chemical and Biological Engineering, Hanbat National University)
Kim, Jiwon (Department of Chemical and Biological Engineering, Hanbat National University)
Jekal, Suk (Department of Chemical and Biological Engineering, Hanbat National University)
Kim, Min Jeong (Department of Chemical and Biological Engineering, Hanbat National University)
Kim, Ha-Yeong (Department of Chemical and Biological Engineering, Hanbat National University)
Kim, Min Sang (Department of Chemical and Biological Engineering, Hanbat National University)
Kim, Sang-Chun (Xentech Company)
Park, Seon-Young (Xentech Company)
Yoon, Chang-Min (Department of Chemical and Biological Engineering, Hanbat National University)
Publication Information
Journal of the Korea Organic Resources Recycling Association / v.30, no.3, 2022 , pp. 5-12 More about this Journal
Abstract
This study suggests the effective recycling method of sludge waste from various industrial fields to synthesize uniform colloidal silica nanoparticles. In detail, polymers are removed from the sludge waste to attain sludge-extracted silica (s-SiO2) micron-sized particles, and ammonia assisted sonication is applied to s-SiO2, which has effectively extracted the silanol precursor. The nano-sized silica (n-SiO2) particles are successfully synthesized by a typical sol-gel method using silanol precursor. Also, the yield amounts of n-SiO2 are determined by the function of s-SiO2 etching time. Finally, n-SiO2-based slurry is synthesized for the practical CMP application. As a result, rough-surfaced semiconductor chip is successfully polished by the n-SiO2-based slurry to exhibit the mirror-like clean surface. In this regard, sludge wastes are successfully prepared as valuable semicondutor grade materials.
Keywords
Sludge; Silica; CMP slurry; Semiconductor; Colloid;
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Times Cited By KSCI : 1  (Citation Analysis)
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