Synthesis of Sludge Waste-derived Semiconductor Grade Uniform Colloidal Silica Nanoparticles and Their CMP Application |
Kim, Dong Hyun
(Department of Chemical and Biological Engineering, Hanbat National University)
Kim, Jiwon (Department of Chemical and Biological Engineering, Hanbat National University) Jekal, Suk (Department of Chemical and Biological Engineering, Hanbat National University) Kim, Min Jeong (Department of Chemical and Biological Engineering, Hanbat National University) Kim, Ha-Yeong (Department of Chemical and Biological Engineering, Hanbat National University) Kim, Min Sang (Department of Chemical and Biological Engineering, Hanbat National University) Kim, Sang-Chun (Xentech Company) Park, Seon-Young (Xentech Company) Yoon, Chang-Min (Department of Chemical and Biological Engineering, Hanbat National University) |
1 | Joni, I. M., Nulhakim, L., Vanitha, M. and Panatarani, C., "Characteristics of crystalline silica (SiO2) particles prepared by simple solution method using sodium silicate (Na2SiO3) precursor", Journal of Physics: Conference Series, 1080(1), p. 012006. (2018). DOI |
2 | Kim, M. and Jeong, H., "A Study on CMP characteristies According to Shape of Colloidal Silica Particles", Transactions of the Korean Society of Mechanical EngineersA, 38(9), pp. 1037-1041. (2014). DOI |
3 | Badley, R. D., Ford, W. T., McEnroe, F. J. and Assink, R. A., "Surface Modification of Colloidal Silica", Langmuir, 6(4), pp. 792-801. (1990). DOI |
4 | Stober, W., Fink, A. and Bohn, E., "Controlled growth of monodisperse silica spheres in the micron size range", Journal of Colloid and Interface Science, 26(1), pp. 62-69. (1968). DOI |
5 | Yoon, C.-M., Jang, Y., Noh, J., Kim, J. and Jang, J., "Smart Fluid System Dually Responsive to Light and Electric Fields: An Electrophotorheological Fluid", ACS Nano, 11(10), pp. 9789-9801. (2017). DOI |
6 | Lee, S., Yoon, C.-M., Hong, J.-Y. and Jang, J., "Enhanced electrotheological performance of a graphene oxide- wrapped silica rod with a high aspect ratio", Journal of Materials Chemistry C, 2(30), pp. 6010-6016. (2014). DOI |
7 | Vrancken, K. C., Coster, L. D., Voort, P. V. D., Grobet, P. J. and Vansant, E. F., "The Role of Silanols in the Modification of Silica Gel with Aminosilanes", Journal of Colloid and Interface Science, 170(1), pp. 71-77. (1995). DOI |
8 | Yoon, C.-M., Jang, Y., Noh, H., Kim, J., Lee, K. and Jang, J., "Enhanced Electroheological Performance of Mixed Silica Nanomaterial Geometry", ACS Applied Materials & Interfaces, 9(41), pp. 36358-36367. (2017). DOI |
9 | Lee, T.-C., "Recycling of municipal incinerator fly-ash slag and semiconductor waste sludge as admixtures in cement mortar", Construction and Building Materials, 23(11), pp. 3305-3311. (2009). DOI |
10 | Schulz, R. and Romheld, V., "Recycling of municipal and industrial organic wastes in agriculture: Benefits, limitations, and means of improvement", Soil Science and Plant Nutrition, 43, pp. 1051-1056. (1997). DOI |
11 | Kim, J., Jekal, S., Kim, D. H. and Yoon, C.-M., "Synthesis of energy storage material derived from heated tobacco biomass and its electrochemical application", Journal of Korea Organic Resource Recycling Association, 30(2), pp. 5-15. (2022). |
12 | Awaleh, M. O. and Soubaneh, Y. D., "Waste Water Treatment in Chemical Industries: The Concept and Current Technologies", Hydrology Current Research, 5(1), p. 1000164. (2014). |
13 | Jadhav, U. U. and Hocheng, H., "A review of recovery of metals from industrial waste", Journal of Achievements in Materials and Manufacturing Engineering, 54(2), pp. 159-167. (2012). |
14 | Lee, T.-C. and Liu, F.-J., "Recovery of hazardous semiconductor-industry sludge as a useful resource", Journal of Hazardous Materials, 165(1-3), pp. 359-365. (2009). DOI |
15 | Piao, C., Kim, S. H., Lee, J. K., Choi, W. G. and Kim, Y. Y., "Non-invasive ultrasonic inspection of sludge accumulation in a pipe", Ultrasonics, 119, p. 106602. (2022). DOI |
16 | Park, S.-H., Shin, J.-A. and Park, H.-D., "Exposure Possibility to By-products during the Processes of Semiconductor Manufacture", Journal of Korean Society of Occupational and Environmental Hygiene, 22(1), pp. 52-59. (2012). DOI |
17 | Kim, O. Y. and Choe, H., "Polymerization Behavior of Polymeric Dental Restorative Composite Through the Surface Treatment of Silica Nanofiller", Journal of the Korean Industrial and Engineering Chemistry, 14(3), pp. 313-319. (2003). |
18 | Sobotka, A. and Sagan, J., "Cost-Saving Environmental Activities On Construction Site - Cost Efficiency of Waste Management: Case Study", Procedia Engineering, 161(2016), pp. 388-393. (2016). DOI |
19 | Rahman, I. A. and Padavettan, V., "Synthesis of Silica Nanoparticles by sol-gel: Size-dependent properties, surface modification, and applications in Silica-Polymer nanocomposites-a review", Journal of Nanomaterials, 2012(8), p. 132424. (2012). |
20 | Choi, K.-M., Yeo, J.-H., Jung, M.-K., Kim, K.-S. and Cho, S.-H., "Size, Shape, and Crystal Structure of Silica Particles Generated as By-products in the Semiconductor Workplace", Journal of Korean Society of Occupational and Environmental Hygiene, 25(1), pp. 36-44. (2015). DOI |
21 | De Luna, M. D., Warmadewanthi and Liu, J. C., "Combined treatment of polishing wastewater and fluoride-containing watewater from a semiconductor manufacturer", Colloids and Surfaces A: Physicochemical and Engineering Aspects, 347(1-3), pp. 64-68. (2009). DOI |
22 | Lei, H. and Zhang, P., "Preparation of alumina/silica core-shell abrasives and their CMP behavior", Applied Surface Science, 253(21), pp. 8754-8761. (2007). DOI |
23 | Huang, Y., "Modeling and analysis of SiO2 deposition during high-purity fused silica glass synthesis by SiCl4 chemical vapor deposition", Ceramics International, 45(8), pp. 10740-10745. (2019). DOI |
24 | Huang, Y., Li, P., Zhao, R., Zhao, L., Liu, J., Peng, S., Fu, X., Wang, X., Luo, R., Wang, R. and Zhang, Z., "Silica nanoparticles: Biomedical applications and toxicity", Biomedicine & Pharmacotherapy, 151, p. 113053. (2022). DOI |
25 | Lee, H. C., Kim, J. H. and Chang, Y. H., "Preparation and Interface Properties of Colloidal Silica", Applied Chemistry for Engineering, 17(4), pp. 386-390. (2006). |
26 | Rabinovich, E. M., Johnson JR, D. W., MacChesney, J. B. and Vogel, E. M., "Preparation of High-Silica Glasses from Colloidal Gels: I, Preparation for Sintering and Properties of Sintered Glasses", Journal of the American Ceramic Society, 66(10), pp. 683-688. (1983). DOI |
27 | Hyde, E. D. E. R., Seyfaee, A., Neville, F. and Moreno-Atanasio, R., "Colloidal Silica Particle Synthesis and Future Industrial Manufacturing Pathway: A Review", Industrial & Engineering Chemistry Research, 55(33), pp. 8891-8913. (2016). DOI |