• Title/Summary/Keyword: $SiN_X$

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Synthesis Characteristics of ZnO Powder from Precursors Composed of Nitrate-Citrate Compounds (Nitrate-Citrate 혼합 전구체로부터 ZnO 입자의 합성반응 특성)

  • Yang, Si Woo;Lee, Seung Ho;Lim, Dae Ho;Yoo, Dong Jun;Kang, Yong
    • Korean Chemical Engineering Research
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    • v.54 no.3
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    • pp.299-304
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    • 2016
  • Characteristics of self-propagating reaction for the preparation of ZnO powder from precursors composed of nitrate and citrate compounds were examined. The ratio of C/N was maintained in range of 0.7~0.8 to initiate the self-propagating reaction between the reducing citrate and oxidizing nitrate groups. The samples were decomposed thermally by using TGA. The sudden decomposition occurred in the range of X > 0.5 in a very short time with a very sharp decrease of mass, indicating that the self-propagating reaction would occur. Friedman, Ozawa-Flynn-Wall and Vyazovkin methods were employed to predict the activation energy, reaction order and frequency factor of the reaction rate in the rate determining step of X < 0.5 range. The activation energy increased with increasing fractional conversion in the range of 46~130 (kJ/min). The reaction order decreased in the range of 2.9~0.9, while the frequency factor increased in the range of 85~278 ($min^{-1}$), respectively, with increasing the rate of temperature increase.

The Study on Dielectric and RTA Property of Oxide Thin-films (산화물 박막 커패시터의 RTA 처리와 유전 특성에 관한 연구)

  • Kim, I.S.;Lee, D.Y.;Cho, Y.R.;Song, J.S.
    • Proceedings of the KIEE Conference
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    • 2001.11a
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    • pp.23-25
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    • 2001
  • In this work, the $Ta_2O_5$ thin films were deposited on Pt/n-Si substrate by reactive magnetron sputtering and the RTA treatment at temperatures range from 650 to $750^{\circ}C$ in $O_2$ and vacuum. X-ray diffraction analysis, FE SEM, dielectric properties and leakage current density have been used to study the structural and electrical properties of the $Ta_2O_5$ thin films. XRD result showed that as- deposited films were amorphous and the annealed films crystallized (<$700^{\circ}C$) into ${\beta}-Ta_2O_5$. The crystallinity increased with temperature in terms of an increase in the intensity of the diffracted peaks(${\beta}-Ta_2O_5$) and annealing in oxygen reduced defect dang1ing Ta-O bonds. As deposited $Ta_2O_5$ films show the leakage current density $10^{-7}$ to $10^{-8}$ (A/$cm^2)$ at low electric fields (<200 kV/cm) However, it was found leakage current density of $Ta_2O_5$ thin films decreased with $O_2$ ambient annealing. The dielectric constant of the as deposited $Ta_2O_5$ thin films was ${\varepsilon}_r$ $9{\sim}11$ but the dielectric constant was increased after RTA treatment in $O_2$ ambient more then in vacuum.

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Fabrication and Characteristics of Micro Platform for Micro Gas Sensor with Low Power Consumption (마이크로 가스센서의 저전력 구동을 위한 마이크로 플랫폼의 제작과 특성)

  • Jang, Woong-Jin;Park, Kwang-Bum;Kim, In-Ho;Park, Soon-Sup;Park, Hyo-Derk;Lee, In-Kyu;Park, Joon-Shik
    • Journal of Sensor Science and Technology
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    • v.20 no.5
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    • pp.317-321
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    • 2011
  • A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 ${\mu}m$ thick $SiN_x$ membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were $295^{\circ}C$, $297^{\circ}C$, and $296^{\circ}C$, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that $SnO_2$ nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of $NO_2$.

Stabilization of As in Soil Contaminated with Chromated Copper Arsenate (CCA) Using Calcinated Oyster Shells (목재방부제(CCA) 오염토양의 소성가공 굴껍질을 이용한 비소 안정화)

  • Moon, Deok-Hyun;Cheong, Kyung-Hoon;Kim, Tae-Sung;Khim, Jee-Hyeong;Choi, Su-Bin;Moon, Ok-Ran;Ok, Yong-Sik
    • Korean Journal of Environmental Agriculture
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    • v.28 no.4
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    • pp.378-385
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    • 2009
  • Arsenic (As) is known to be very toxic and carcinogenic to human beings. Arsenic contaminated soil was collected from a timber mill site at Busan Metropolitan City, Korea, where chromated copper arsenate (CCA) had been used to protect wood from rotting caused by insects and microbial agents. The soil was stabilized using both natural oyster shells (NOS) and calcinated oyster shells (POS). The calcination of natural oyster shells was accomplished at a high temperature in order to activate quicklime from calcite. Two different oyster shell particle sizes (-#10 mesh and -#20 mesh) and curing periods of up to 28 days were investigated. The stabilization effectiveness was evaluated based on the Korean Standard Test (KST) method (1N HCl extraction). The stabilization results showed that the POS treatment was more effective than the NOS treatment at immobilizing the As in the contaminated soils. A significant As reduction (96%) was attained upon a POS treatment at 20 wt% and passed the Korean warning standard of 20 mg/kg ('Na' area). However, an As reduction of only 47% (169 mg/kg) was achieved upon a NOS treatment at 20 wt%. The -#20 mesh oyster shells seem to perform better than the -#10 materials. The scanning electron microscopy (SEM)-energy dispersive X-ray spectroscopy (EDX) results showed that As immobilization was strongly associated with Ca and O in the presence of Al and Si.

Quantitative Analysis of Platycodin D from Platycodon grandiflorum by HPLC-ELSD (HPLC-ELSD법에 의한 길경의 platycodin D 정량분석)

  • Kim, Geum-Soog;Kim, Hyun-Tae;Seong, Jae-Duck;Park, Hee-Saeng;Kim, Soo-Dong
    • Korean Journal of Medicinal Crop Science
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    • v.10 no.3
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    • pp.200-205
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    • 2002
  • Platycodin D was isolated from n-butanol extract of Platycodi radix(Platycodon grandiflorum and identified by the spectroscopic analysis using $^1H$ and $^{13}C$ NMR techniques. A new method of analysis of platycodin D by high performance liquid chromatography(HPLC) was established using a reversed phase system with YMC-Pack ODS-AM( 250 X 4.6 mm) column and 30% acetonitrile as a mobile phase. Evaporative light scattering detector was used as detector. The kinds of extraction solvents and methods were examined to determine the efficient extraction condition and HPLC analysis was carried out to establish the optimum drying condition for the root of Platycodon grandiflorum. The contents of Platycodin D was highest as 0.083% when platycodon roots were dried at $60^{\circ}C$ using dry oven.

Measurement of Ballooning Gap Size of Irradiated Fuels Using Neutron Radiography Transfer Method and HV Image Filter

  • Sim, Cheul-Muu;Kim, TaeJoo;Oh, Hwa Suk;Kim, Joon Cheol
    • Journal of the Korean Society for Nondestructive Testing
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    • v.33 no.2
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    • pp.212-218
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    • 2013
  • A transfer method of neutron radiography was developed to measure the size of the end plug and a gap of an intact K102L-2, the irradiated fuel of a ballooned K174L-3, a ballooned and ruptured K98L-3. A typical irradiation time of 25 min. was determined to obtain a film density of between 2 and 3 of SR X-ray film with neutrons of $1.5{\times}10^{11}n{\cdot}cm^{-2}$. To validate and calibrate the results, a RISO fuel standard sample, Cd plate and ASTM-BPI/SI were used. An activated latent image formed in the $100{\mu}m$ Dy foil was subsequently transferred in a dark room for more than 8 hours to the SR film which is a maximum of three half-lives. Due to the L/D ratio an unsharpness of $9.82-14{\mu}m$ and a magnification of 1.0003 were given. After digitizing an image of SR film, the ballooning gap of the plug was discernible by an H/V filter of image processing. The gap size of the ballooned element, K174L-3, is equal to or greater than 1.2 mm. The development of a transfer method played a pivotal role in developing high burn-up of Wolsung and PWR nuclear fuel type.

Scanning Acoustic Microsope System Using 200MHZ ZnO Transducer (ZnO를 이용한 초음파 현미경의 제작과 평가)

  • Jang, Ji-Won;Do, Si-Hong;Lee, Jong-Gyu
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.25 no.4
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    • pp.200-208
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    • 1989
  • To the purpose of preparation for investigating aspect of material that not revealed by the light microscope and extending our knowledge in applicable field, a scanning acoustic microscope system of 200MHz was organized and appraised its performance with experiments. Professor N.CHUBACHI in Tohoku University in Sendai, Japan provided the ZnO transducer with lens. The system for transmitting and receiving ultrasonic pulses of 200nsec was organized with a rectangular audio wave generator for modulation of 200MHz carrier wave, gating system for transmitting and receiving, mixer for converting intermediate frequency, a directional coupler, ZnO transducer, radio frequency amplifiers. detecter and personal computer. The Scanning system was driven in micro steps with three stepping motors in the direction of x, y and z axes. The system was a reflecting type scanning acoustic microscope and the operation program processed graphics data from receiving echo intensities. Photograph of fish scale obtained by optical microscope was compared with its image by the scanning acoustic microscope organized here. The result was satisfiable.

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The electronic structure of the ion-beam-mixed Pt-Cu alloys by XPS and XANES

  • Lim, K.Y.;Lee, Y.S.;Chung, Y.D.;Lee, K.M.;Jeon, Y.;Whang, C.N.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.133-133
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    • 1998
  • In the thin film alloy formation of the transition metals ion-beam-mixing technique forms a metastable structure which cannot be found in the arc-melted metal alloys. Sppecifically it is well known that the studies about the electronic structure of ion-beam-mixed alloys pprovide the useful information in understanding the metastable structures in the metal alloy. We studied the electronic change in the ion-beam-mixed ppt-Ct alloys by XppS and XANES. These analysis tools pprovide us information about the charge transfer in the valence band of intermetallic bonding. The multi-layered films were depposited on the SiO2 substrate by the sequential electron beam evapporation at a ppressure of less than 5$\times$10-7 Torr. These compprise of 4 ppairs of ppt and Cu layers where thicknesses of each layer were varied in order to change the alloy compposition. Ion-beam-mixing pprocess was carried out with 80 keV Ae+ ions with a dose of $1.5\times$ 1016 Ar+/cm2 at room tempperature. The core and valence level energy shift in these system were investigated by x-ray pphotoelectron sppectroscoppy(XppS) pphotoelectrons were excited by monochromatized Al K a(1486.6 eV) The ppass energy of the hemisppherical analyzer was 23.5 eV. Core-level binding energies were calibrated with the Fermi level edge. ppt L3-edge and Cu K-edge XANES sppectra were measured with the flourescence mode detector at the 3C1 beam line of the ppLS (ppohang light source). By using the change of White line(WL) area of the each metal sites and the core level shift we can obtain the information about the electrons pparticippating in the intermetallic bonding of the ion-beam-mixed alloys.

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Substrate tempperature dependence of crystalline Y2O3 films grown by Ionized Cluster Beam Deposition

  • Cho, M.H.;Whangbo, S.W.;Seo, J.G.;Choi, S.C.;Cho, S.J.;Whang, C.N.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.87-89
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    • 1998
  • The Y2O3 films on Si(111) was grown by ionized cluster beam depposition (ICBD) in ultrahigh-vacuum (UHV). The acceleration voltage and oxygen ppartial ppressure were fixed at 5 kV and 2$\times$10-5 Torr resppectively. The substrate tempperature was varied from 10$0^{\circ}C$ to $600^{\circ}C$ in order to find the deppendence of crystallinity of Y2O3 films on the substrate tempperature. The crystallinity of the films with the substrate tempperature studied using x-ray diffraction (XRD) and Rutherford backscattering sppectroscoppy (RES). Surface crystallinity and surface morpphology of the films were also investigated using the reflection high-energy electron diffraction (RHEED) and atomic force microscoppe (AFM) resppectively. The films grown at the substrate tempperature below 50$0^{\circ}C$showed the ppoly-crystalline structure of oxygen deficiency. On the contrary the single-crystalline structure was obtained at the substrate tempperature over 50$0^{\circ}C$ and the stochimetry was gradually matched as increasing the substrate tempperature. The surface morpphology showed the increase of the surface roughness as the substrate tempperature was increased upp to 50$0^{\circ}C$ The crystallinity of the film was not good and the minimum channeling yield $\chi$min was measured at 0.91 The stochiometric and high crystallinine film (surface $\chi$min=0.25) was obtained as the substrate tempperature increased upp to 60 $0^{\circ}C$ which indicate the tempperature was sufficient to migrate the depposited atom.

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Interaction between RuO2 and Carbon Nanotubes - Photoemission and X-ray Absorption Study

  • Lee, Seung-Youb;Kim, Yoo-Seok;Jeon, Chel-Ho;Ihm, Kyu-Wook;Kang, Tai-Hee;Park, Chong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.567-567
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    • 2012
  • Since the carbon nanotubes (CNTs) have extraordinary material properties, many researchers are trying to make a practical application in various fields [1]. In particular, the high surface area of CNTs was fascinated for nano-template on the catalytic system. $RuO_2$ coated CNTs are useful functional nano-composites in many applications, including super capacitors, fuel cells, biosensors, and field emitters. However, the research of interaction between CNTs and $RuO_2$ was not satisfied with various fields [2]. In this study, we will introduce the change of chemical and electrical state of $RuO_2$/CNTs at different temperatures by synchrotron radiation photoemission spectroscopy (SRPES). The t-MWCNTs used in this experiment were grown on the Ni/TiN/Si substrates by chemical vapor deposition. $RuO_2$ of 4-20 nm in thickness was deposited on the t-MWNTs by sputter. The SRPES measurements were carried out at the 4B1 beamline of the Pohang Accelerator Laboratory in Korea. The result of XPS measurement indicates that the deposited $RuO_2$ on the CNTs was reduced into pure Ru at above $300^{\circ}C$. And we confirmed that the effective work function of $RuO_2$/CNTs was decreased with increasing temperature.

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