Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2001.11a
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- Pages.23-25
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- 2001
The Study on Dielectric and RTA Property of Oxide Thin-films
산화물 박막 커패시터의 RTA 처리와 유전 특성에 관한 연구
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Kim, I.S.
(KERI Electric & Magnetic Devices Research Group) ;
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Lee, D.Y.
(KERI Electric & Magnetic Devices Research Group) ;
- Cho, Y.R. (KERI Electric & Magnetic Devices Research Group) ;
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Song, J.S.
(KERI Electric & Magnetic Devices Research Group)
- Published : 2001.11.03
Abstract
In this work, the
Keywords