• Title/Summary/Keyword: $SF_{6}$ molecular gas

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The Dependence on the Gas Pressure in SF6 Molecular Gas (SF6분자가스의 압력 의존도)

  • Jeon, Byung-Hoon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.9
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    • pp.816-820
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    • 2007
  • We measured the electron drift velocity, W, in 0.5% $SF_6-Ar$ mixture over the E/N range from 30 Td to 300 Td and gas pressure range from 0.1 to 0.5 Torr by the double shutter drift tube with a variable drift distance, and calculated over the same E/N and gas pressure range by using the two-term approximation of the Boltzmann equation. The measured and calculated values at different gas pressure at each E/N was appreciable dependence in the results on the gas pressure.

The analysis of dependence on the gas number density in $SF_{6}$-Ar mixtures ($SF_{6}$-Ar혼합가스에서의 압력 의존도 해석)

  • 전병훈;하성철
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.248-251
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    • 2002
  • We measured the electron drift velocity, W, in 0.5% $SF_{6}$-Ar mixture over the E/N range from 30 Td to 300 Td and gas pressure range from 0.1 to 8 Torr by the double shutter drift tube with a variable drift distance. This coefficient in the mixture was calculated over the same E/N and gas pressure range by using the two-term approximation of the Boltzmann equation. And the measured and calculated values at different gas number density at each E/N was appreciable dependence in the results on the gas number density,

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Study on the Gas Separation of Carbon Molecular Sieve (CMS) Membrane for Recovering the Perfluorocompound Gases from the Electronics Industry (전자산업 배출 불화가스 회수를 위한 탄소분자체 분리막의 기체분리 연구)

  • Jeong, Su Jung;Lim, Joo Hwan;Han, Sang Hoon;Koh, Hyung Chul;Ha, Seong Yong
    • Membrane Journal
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    • v.26 no.3
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    • pp.220-228
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    • 2016
  • Carbon molecular sieve (CMS) hollow fiber membranes were prepared by carbonizing a polyimide precursor manufactured by non-solvent induced phase separation process. Gas separation performance of CMS hollow fiber membrane was investigated on the effect of three carbonization conditions. CMS membrane with the highest gas separation performance was obtained at the pyrolysis temperature of $250-450^{\circ}C$: $N_2$, $SF_6$, and $CF_4$ permeance were 20, 0.32, 0.48 GPU, respectively, and $N_2/SF_6$ and $N_2/CF_4$ selectivities were 62 and 42, respectively. In the $SF_6/CF_4/N_2$ mixture gas test, when the stage cut was 0.2, the recovery ratio of $SF_6$ and $CF_4$ was over 99% and 98%. $SF_6$ concentration ratio was 4.5 times higher than the $SF_6$ concentration at the feed side. From the results, it was concluded that CMS membrane was one of the promising membranes for recovery Perfluorocompound gases process.

Molecular Behavior of $SF_6+H_2$ Structure II Hydrates (sII $SF_6+H_2$ 하이드레이트의 분자 거동)

  • Park, Da-Hye;Lee, Bo Ram;Sa, Jeong-Hoon;Sum, Amadeu K.;Lee, Kun-Hong
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.11a
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    • pp.122.2-122.2
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    • 2011
  • Sulfur hexafluoride ($SF_6$), one of the most potent greenhouse gases, is known as a hydrate former and has been studied at the high pressure up to 1.3 GPa with gas mixtures and with aqueous surfactant. Since we regard $SF_6$ as a potential promoter molecule that can stabilize hydrate structure more effectively compare to the other promoters, further investigation is required to verify the stabilizing ability of $SF_6$ in the hydrate structure. However, the insoluble nature of $SF_6$ in water or gases hinders fine scale analyses. This work discusses the data obtained by using molecular dynamics simulations of structure II (sII) clathrate hydrates containing $SF_6$ and $H_2$. The simulations were performed using the TIP4P/Ice model for water molecule and a previously reported $SF_6$ molecular model (optimized at the pure $SF_6$ single phase system (Olivet and Vega, 2007)), and a $H_2$ molecular model (adapted from the THF+$H_2$ hydrate system (Alavi et al., 2006)). The simulations are performed to observe the stability of $SF_6$ and $H_2$ in the sII clathrate hydrate system with varying temperature and pressure conditions and occupancies of $SF_6$ and $H_2$, which cannot be easily tuned experimentally. We observe that stability of H2 enclathrated in the hydrate structure more affected by the occupancy of $SF_6$ molecules and temperature than pressure, which ranges from 1 to 100 bar.

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Raman Spectroscopy and Molecular Modeling Study on the CH4 and SF6 Mixture Gas Hydrate Growth Behavior (라만 분광학과 분자모델링을 이용한 메탄 및 육불화황 혼합 가스 하이드레이트 성장 거동 연구)

  • Lim, Jun-Heok;Lee, Ju Dong;Park, Sung Soo;Eom, Ki Heon;Won, Yong Sun
    • Clean Technology
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    • v.19 no.4
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    • pp.476-480
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    • 2013
  • The growth behavior of $CH_4$ and $SF_6$ mixture gas hydrate has been investigated by a combined approach of Raman spectroscopy and molecular modeling. Raman spectroscopy results presented that when $CH_4$ is used only, $CH_4$ guest molecule is inserted first into the large cavity of the host structure built by $H_2O$ molecules and then into the small cavity to stabilize the whole gas hydrate structure. In the other hand, when $SF_6$ is mixed together, $SF_6$ is favored over (or competing with) $CH_4$ in being inserted into the large cavity and the small cavity still prefers $CH_4$ insertion. The calculations of binding energies clearly supported this. While $SF_6$ has a binding energy of -26.9 kcal/mol a little lower than -24.2 kcal/mol of $CH_4$ in the large cavity, $SF_6$ and $CH_4$ has 1.2 kcal/mol and -22.0 kcal/mol, respectively, in the small cavity. It indicates that the sizable $SF_6$ is not preferred in the small cavity but has a relative energetic advantage over $CH_4$ in the large cavity.

The Character of Electron Ionization and Attachment Coefficients in Perfluoropropane(C3F8) Molecular Gas by the Boltzmann Equation (볼츠만 방정식에 의한 C3F8분자가스의 전리 및 부착 계수에 관한 연구)

  • Song, Byoung-Doo;Jeon, Byoung-Hoon;Ha, Sung-Chul
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.4
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    • pp.375-380
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    • 2005
  • CF₄ molecular gas is used in most of semiconductor manufacture processing and SF/sub 6/ molecular gas is widely used in industrial of insulation field. but both of gases have defect in global warming. C₃F/sub 8/ gas has large attachment cross-section more than these gases, moreover GWP, life-time and price of C₃F/sub 8/ gas is lower than them, therefor it is important to calculate transport coefficients of C₃F/sub 8/ gas like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient and critical E/N. The aim of this study is to get these transport coefficients for imformation of the insulation strength and efficiency of etching process. In this paper, we calculated the electron drift velocity (W) in pure C₃F/sub 8/ molecular gas over the range of E/N=0.1∼250 Td at the temperature was 300 K and gas pressure was 1 Torr by the Boltzmann equation method. The results of this paper can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas.

Cold Wall Condensation Retardation of Laser Excited Gaseous Molecules (레이저 여기된 기체분자들의 차가운 표면 응고저지 현상)

  • Kim Jae-U;Jeong Do-Yeong;Jeff W. Eerkens;William H. Miller
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.248-249
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    • 2002
  • The gaseous molecular condensation retardation by laser excitation has been known, but with limited success. Condensation inhibition between the gas phase molecules by laser excitation was clearly shown in many experiments.(1)-(2) However, surface condensation inhibition of the excited molecules has been controversial for the last several decades.(3)-(4) In 1994, S. J, Sibener and Y. T. Lee published an experimental evidence of the internal energy dependence of the surface condensation of gaseous $SF_{6}$ and $CCl_4$ molecules. (omitted)

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Synthesis of Ultrasound Contrast Agent: Characteristics and Size Distribution Analysis (초음파 조영제의 합성 및 합성된 초음파 조영제의 특성 분석)

  • Lee, Hak Jong;Yoon, Tae Jong;Yoon, Young Il
    • Ultrasonography
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    • v.32 no.1
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    • pp.59-65
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    • 2013
  • Purpose: The purpose of this study is to establish the methodology regarding synthesis of ultrasound contrast agent imaging, and to evaluate the characteristics of the synthesized ultrasound contrast agents, including size or degradation interval and image quality. Materials and Methods: The ultrasound contrast agent, composed of liposome and SF6, was synthesized from the mixture solution of $21{\mu}mol$ DPPC (1, 2-Dihexadecanoyl-sn-glycero-3-phosphocholine, $C_{40}H_{80}NO_8P$), $9{\mu}mol$ cholesterol, $1.9{\mu}mol$ of DCP (Dihexadecylphosphate, $[CH_3(CH_2)_{15}O]_2P(O)OH$), and chloroform. After evaporation in a warm water bath and drying during a period of 12-24 hours, the contrast agent was synthesized by the sonication process by addition of buffer and SF6 gas. The size of the contrast agent was controlled by use of either extruder or sonication methods. After synthesis of contrast agents, analysis of the size distribution of the bubbles was performed using dynamic light scattering measurement methods. The degradation curve was also evaluated by changes in the number of contrast agents via light microscopy immediate, 12 hours, 24 hours, 36 hours, 48 hours, 60 hours, 72 hours, and 84 hours after synthesis. For evaluation of the role as an US contrast agent, the echogenicity of the synthesized microbubble was compared with commercially available microbubbles (SonoVue, Bracco, Milan, Italy) using a clinical ultrasound machine and phantom. Results: The contrast agents were synthesized successfully using an evaporation-drying-sonication method. The majority of bubbles showed a mean size of 154.2 nanometers, and they showed marked degradation 24 hours after synthesis. ANOVA test revealed a significant difference among SonoVue, synthesized contrast agent, and saline (p < 0.001). Although no significant difference was observed between SonoVue and the synthesized contrast agent, difference in echogenicity was observed between synthesized contrast agent and saline (p < 0.01). Conclusion: We could synthesize ultrasound contrast agents using an evaporation-drying-sonication method. On the basis of these results, many prospective types of research, such as anticancer drug delivery, gene delivery, including siRNA or microRNA, targeted molecular imaging, and targeted therapy can be performed.