Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The Dependence on the Gas Pressure in SF6 Molecular Gas

SF6분자가스의 압력 의존도

  • 전병훈 (동국대학교 공과대학 전기공학과)
  • Published : 2007.09.01
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Abstract

We measured the electron drift velocity, W, in 0.5% $SF_6-Ar$ mixture over the E/N range from 30 Td to 300 Td and gas pressure range from 0.1 to 0.5 Torr by the double shutter drift tube with a variable drift distance, and calculated over the same E/N and gas pressure range by using the two-term approximation of the Boltzmann equation. The measured and calculated values at different gas pressure at each E/N was appreciable dependence in the results on the gas pressure.

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References

  1. B. H. Jeon, 'Determination of electron collision crosssections for the $C_{3}F_{8}$ molecule by using an electron swarm study', JKPS, Vol. 49, No. 6, p. 2321, 2006
  2. 황청호, 박신우, 김남렬, 허창수, '평등전계에서 $SF_{6}/CF_{4}$ 혼합가스의 AC절연내력 특성', 전기전자재료학회논문지, 20권, 4호, p. 381, 2007 https://doi.org/10.4313/JKEM.2007.20.4.381
  3. B. H. Jeon and Y. Nakamura, 'Measurement of drift velocity and longitudinal diffusion coefficient of electron in pure oxygen and in oxygen-argon mixtures', J. Phys. D, Vol. 31, p. 2145, 1998 https://doi.org/10.1088/0022-3727/31/17/011
  4. 하성철, 전병훈, '볼츠만 방정식과 몬테칼로법에 의한 $SiH_{4}-Ar$혼합가스의 전자수송계수에 관한 연구', 전기전자재료학회논문지, 14권, 2호, p. 169, 2001
  5. B. H. Jeon, 'Determination of electron collision cross-sections for the oxygen molecule by using an electron swarm study', JKPS, Vol. 43, No. 4, p. 513, 2003
  6. H. Itoh, Y. Miura, N. Ikuta, Y. Nakao, and H. Tagashira, 'Electron swarm development in $SF_{6}$ : I. Boltzmann equation analysis', J. Phys. D, Vol. 21, p. 922, 1988 https://doi.org/10.1088/0022-3727/21/6/010
  7. Y. Nakamura and M. Kurachi, 'Electron transport parameters in argon and its momentum transfer cross section', J. Phys. D, Vol. 21, p. 718, 1988 https://doi.org/10.1088/0022-3727/21/5/008