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http://dx.doi.org/10.4313/JKEM.2007.20.9.816

The Dependence on the Gas Pressure in SF6 Molecular Gas  

Jeon, Byung-Hoon (동국대학교 공과대학 전기공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.20, no.9, 2007 , pp. 816-820 More about this Journal
Abstract
We measured the electron drift velocity, W, in 0.5% $SF_6-Ar$ mixture over the E/N range from 30 Td to 300 Td and gas pressure range from 0.1 to 0.5 Torr by the double shutter drift tube with a variable drift distance, and calculated over the same E/N and gas pressure range by using the two-term approximation of the Boltzmann equation. The measured and calculated values at different gas pressure at each E/N was appreciable dependence in the results on the gas pressure.
Keywords
$SF_6$ molecular gas; 2-term approximation of Boltzmann equation analysis; Electron drift velocity; The dependence of the gas pressure; Electron collision cross sction;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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