• 센서학회지
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• 제18권1호
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• pp.54-62
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• 2009

${Co_3}{O_4}$ and ${Co_3}{O_4}$-based thick films with additives such as ${Co_3}{O_4}-{Fe_2}{O_3}$(5 wt.%), ${Co_3}{O_4}-{SnO_2}$ (5 wt.%), ${Co_3}{O_4}-{WO_3}$(5 wt.%) and ${Co_3}{O_4}$-ZnO(5 wt.%) were fabricated by screen printing method on alumina substrates. Their structural properties were examined by XRD and SEM. The sensitivities to iso-${C_4}H_{10}$, $CH_4$, CO, $NH_3$ and NO gases were investigated with the thick films heat treated at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. From the gas sensing properties of the films, the films showed p-type semiconductor behaviors. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed higher sensitivity to i-${C_4}H_{10}$ and CO gases than other thick-films. ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film heat treated at $600^{\circ}C$ showed the sensitivity of 170 % to 3000 ppm iso-${C_4}H_{10}$ gas and 100 % to 100 ppm CO gas at the working temperature of $250^{\circ}C$. The response time to i-${C_4}H_{10}$ and CO gases showed rise time of about 10 seconds and fall time of about $3{\sim}4$ minutes. The selectivity to i-${C_4}H_{10}$ and CO gases was enhanced in the ${Co_3}{O_4}-{SnO_2}$(5 wt.%) thick film.

• 센서학회지
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• 제18권4호
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• pp.263-268
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• 2009

With the increasing number of automobiles, the problem of air pollution from the exhaust gases of automobiles has become a critical issue. The principal gases that cause air pollution are nitrogen oxide or NO$_x$(NO and NO$_2$), and CO. Because NO$_x$ gases cause acid rain and global warming and produce ozone(O$_3$) that leads to serious metropolitan smog from photochemical reaction, they must be detected and reduced. Mixtures of WO$_3$ and $In_2O_3$(WO$_3$:$In_2O_3$=10:0, 7:3, 5:5, 3:7, and 0:10 in wt.%), which are NO$_x$ gas-sensing materials, were prepared, and thick-film gas sensors that included a heater and a temperature sensor were fabricated. Their sensitivity to NO$_x$ was measured at 250$\sim$400$^{\circ}C$ for NO$_x$ concentrations of 1$\sim$5 ppm. The $In_2O_3$ thick-film sensor showed excellent sensitivity($R_{gas}/R_{air}$=10.22) at 300$^{\circ}C$ to 5-ppm NO. The response time for 70 % saturated sensitivity was about 3 seconds, and the sensors exhibited very fast reactivity to NO$_x$.

• 전자공학회논문지 IE
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• 제43권3호
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• pp.1-5
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• 2006

고상반응법을 이용하여 $CaZrO_3$ 습도센서를 제작하였으며 그의 감습특성에 대하여 연구하였다. 습도센서의 임피던스는 상대습도가 증가함에 따라 감소하며 감습도는 주파수에 의존하였다. 센서의 감습도는 열처리에 안정되고 흡습 탈습에 따른 히스테리시스 현상이 거의 나타나지 않았으며 전기전도 활성화에너지는 흡습에 따라 감소하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.1769-1771
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• 2000

The structural, electrical and gas sensing properties of $LaFeO_3$ thick films with different heat treatments were examined. As the heat treatment temperature increases, the intensity of dominant(121) phase increases in XRD measurements. Activation energy changes with the heat treatment and sensitivity is high for the samples with high activation energy, $LaFeO_3$ films showed high sensitivity to NO, $NH_3$ and $C_{4}H_{10}$ gases.

• 한국전기전자재료학회논문지
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• 제23권12호
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• pp.956-960
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• 2010

CuO doped $WO_3-SnO_2$ thick film gas sensors were fabricated by screen printing method on alumina substrates and heat-treated at $350^{\circ}C$ in air. The effects of mixing ratio of $WO_3$ with $SnO_2$ on the structural and morphological properties of $WO_3-SnO_2$ were investigated X-ray diffraction and Scanning Electron Microscope. The structural properties of the $WO_3-SnO_2$:CuO thick film by XRD showed that the monoclinic of $WO_3$ and the tetragonal of $SnO_2$ phase were mixed. Nano CuO was coated on the $WO_3-SnO_2$ surface and then the surface of $WO_3$ was coated with $SnO_2$ particles with $1\sim1.5{\mu}m$ in diameters, as confirmed form the SEM image. The sensitivity of the $WO_3-SnO_2$:CuO sensor to 2000 ppm $CO_2$ gas and 50 ppm $H_2S$ gas for the various ratio of $WO_3$ and $SnO_2$ was investigated. The 4 wt% CuO doped $WO_3-SnO_2$(75:25) tkick films showed the highest sensitivity to $CO_2$ gas and $H_2S$ gas.

• 센서학회지
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• 제9권1호
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• pp.36-43
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• 2000

휘발성염기질소가스 중에서 TMA 가스의 선택성을 향상시키고 동작온도가 낮고 저농도에서 감도가 높은 반도체가스센서를 제작하기 위해 ZnO에 촉매불순물 $Al_2O_3$, $TiO_2$, $In_2O_3$ 및 $V_2O_5$등의 다양한 무게비가 함유된 ZnO계 타겟을 제작한 후 RF 마그네트론 스펏터링법으로 산소분위기에서 박막을 증착시켰다. 센서의 전기적 안정성을 위해 $700^{\circ}C$에서 1시간동안 산소분위기에서 열처리한 ZnO계 박막으로 센서를 제작한 후 DMA(dimethylamine), 암모니아($NH_3$) 및 TMA(trimethylamine) 가스의 감도를 조사하였다. TMA 가스선택성은 DMA 및 암모니아가스에 대한 TMA 가스의 감도비($S_{TMA}/S_{DMA}$, $S_{TMA}/S_{NH3}$)로 정의하였다. $ZnO+Al_2O_3(4\;wt.%)+TiO_2(1\;wt.%)+In_2O_3(1\;wt.%)$ 센서는 160 ppm의 가스농도와 동작온도 $300^{\circ}C$에서 DMA와 암모니아가스에 대한 TMA 가스의 최대 감도비가 각각 5.9와 26을 나타내어 선택성이 향상되었음을 알 수 있었다.

• 센서학회지
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• 제13권6호
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• pp.424-429
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• 2004

$Cr_{2}O_{3}$ thick films were fabricated by screen printing method on alumina substrates and annealed at $700^{\circ}C$, $800^{\circ}C$, and $900^{\circ}C$ in air, respectively. Structural properties examined by XRD and SEM showed (116) dominant $Cr_{2}O_{3}$ peak and increased grain sizes with the annealing. The resistance of the films decreased with increasing the annealing temperature. Gas sensing characteristics to $NH_{3}$, CO, $C_{4}H_{10}$, and NO gases showed sensitivity only to $NH_{3}$ gas. $Cr_{2}O_{3}$ thick films annealed at $700^{\circ}C$ had the sensitivity of about 15 % for 100 ppm $NH_{3}$ gas at the working temperature of $300^{\circ}C$. The thick films had good selectivity to the $NH_{3}$ gas. The response time to $NH_{3}$ gas was about 10 seconds.

• 전자공학회논문지T
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• 제35T권2호
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• pp.1-5
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• 1998

$CaSnO_3$ 시편을 고상반응법에 의해 제작하고, 그의 감습특성에 대해 조사하였다. 커패시턴스는 상대습도가 증가함에 따라 증가하며, 저주파 영역에서 우수한 감습도를 나타냈다. 감습도는 온도변화에 안정되며, 흡습, 탈습에 따라 약간의 히스테리시스 현상이 나타났다. 대기중 노출에 의해 드리프트 현상이 나타나며, 가열클리닝에 의해 오염에 의한 감습도 저하를 방지할 수 있다.

• Journal of Radiation Protection and Research
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• 제23권1호
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• pp.59-63
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• 1998

$Mg_2SiO_4$:Tb(MSO-S) TLD의 사용에서 부정확한 선량평가의 원인이 될 수 있는 광감수성과 방향 의존성을 조사하였다. 200 lux의 형광등과 백열등 하에서 8시간씩 노출한 경우 각각 약 11 mR과 3 mR의 조사선량에 해당하는 광감수성이 나타났다 그리고 수직입사($0^{\circ}$)에 대한 ${\pm}80^{\circ}$ 의 각도로 입사하는 경우의 열형광강도 비가 MSO-S는 약 0.8, badge형의 MSO-L은 약 0.15로서 방향의존성이 비교적 크게 나타났다.

• 대한전자공학회논문지
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• 제25권4호
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• pp.407-416
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• 1988

Thick film city gas sensors were fabricated using \ulcornerFe2O3 and \ulcorner-Fe2O3 as raw materials. Their electrical properties and sensitivity characteristics were investigated and the surface conditions for various firing temperatures were analyzed. The fabricated devices exhibited high sensitivity to butane gas(75~80% n 1, 000ppm butane ambient). Also they showed good selectivity and long-term stability. A city gas alarm system using fabricated sensors was made for the practical application.