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Characteristics of CuO doped WO3-SnO2 Thick Film Gas Sensors

CuO가 첨가된 WO3-SnO2 후막 가스센서 특성 연구

  • Lee, Don-Kyu (Electrical Engineering, Dong-eui University) ;
  • Shin, Deuck-Jin (Department of Physics, Dong-eui University and Convergence of IT Devices Institute) ;
  • Yu, Il (Department of Physics, Dong-eui University and Convergence of IT Devices Institute)
  • 이돈규 (동의대학교 전기공학과) ;
  • 신덕진 (동의대학교 물리학과, 부산 IT융합부품연구소) ;
  • 유일 (동의대학교 물리학과, 부산 IT융합부품연구소)
  • Published : 2010.12.01

Abstract

CuO doped $WO_3-SnO_2$ thick film gas sensors were fabricated by screen printing method on alumina substrates and heat-treated at $350^{\circ}C$ in air. The effects of mixing ratio of $WO_3$ with $SnO_2$ on the structural and morphological properties of $WO_3-SnO_2$ were investigated X-ray diffraction and Scanning Electron Microscope. The structural properties of the $WO_3-SnO_2$:CuO thick film by XRD showed that the monoclinic of $WO_3$ and the tetragonal of $SnO_2$ phase were mixed. Nano CuO was coated on the $WO_3-SnO_2$ surface and then the surface of $WO_3$ was coated with $SnO_2$ particles with $1\sim1.5{\mu}m$ in diameters, as confirmed form the SEM image. The sensitivity of the $WO_3-SnO_2$:CuO sensor to 2000 ppm $CO_2$ gas and 50 ppm $H_2S$ gas for the various ratio of $WO_3$ and $SnO_2$ was investigated. The 4 wt% CuO doped $WO_3-SnO_2$(75:25) tkick films showed the highest sensitivity to $CO_2$ gas and $H_2S$ gas.

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