• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2009년도 제38회 동계학술대회 초록집
• /
• pp.284-284
• /
• 2010

Currently, hydrogen has been produced by Steam Reforming or partial oxidation reforming processes mainly from oil, coal, and natural gas and results in the production of $CO_2$. However, these are influenced greatly on the green house effect of the earth. so it is important to find the new way to produce hydrogen utilizing water without producing any environmentally harmful by-products. In our research, we use microwave water plasma and photocatalyst to improve dissociation rate of water. At low pressure plasma, electron have high energy but density is low, so temperature of reactor is low. This may cause of recombination in the generated hydrogen and oxygen from splitting water. If it want to high dissociation rate of water, it is necessary to control of recombination of the hydrogen and oxygen using photocatalyst. We utilize the photocatalytic material($TiO_2$, ZnO) coated plasma reactor to use UV in the plasma. The quantity of hydrogen generated was measured by a Residual Gas Analyzer.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
• /
• pp.543-543
• /
• 2013

Thin-film transistors (TFTs) based on oxide semiconductors have been regarded as promising alternatives for conventional amorphous and polycrystalline silicon TFTs. Oxide TFTs have several advantages, such as low temperature processing, transparency and high field-effect mobility. Lots of oxide semiconductors for example ZnO, SnO2, In2O3, InZnO, ZnSnO, and InGaZnO etc. have been researched. Particularly, zinc-tin oxide (ZTO) is suitable for channel layer of oxide TFTs having a high mobility that Sn in ZTO can improve the carrier transport by overlapping orbital. However, some issues related to the ZTO TFT electrical performance still remain to be resolved, such as obtaining good electrical contact between source/drain (S/D) electrodes and active channel layer. In this study, the bottom-gate type ZTO TFTs with staggered structure were prepared. Thin films of ZTO (40 nm thick) were deposited by DC magnetron sputtering and performed at room temperature in an Ar atmosphere with an oxygen partial pressure of 10%. After annealing the thin films of ZTO at $400^{\circ}C$ or an hour, Cu, Mo, ITO and Ti electrodes were used for the S/D electrodes. Cu, Mo, ITO and Ti (200 nm thick) were also deposited by DC magnetron sputtering at room temperature. The channel layer and S/D electrodes were defined using a lift-off process which resulted in a fixed width W of 100 ${\mu}m$ and channel length L varied from 10 to 50 ${\mu}m$. The TFT source/drain series resistance, the intrinsic mobility (${\mu}i$), and intrinsic threshold voltage (Vi) were extracted by transmission line method (TLM) using a series of TFTs with different channel lengths. And the performances of ZTO TFTs were measured by using HP 4145B semiconductor analyzer. The results showed that the Cu S/D electrodes had a high intrinsic field effect mobility and a low effective contact resistance compared to other electrodes such as Mo, ITO and Ti.

• 광물과 암석
• /
• 제33권1호
• /
• pp.1-10
• /
• 2020

고압 환경에서 규산염 용융체의 원자 구조에 대한 정보는 지구 내부 마그마의 열전도율이나 주변 암석과의 원소 분배계수와 같은 이동 물성을 이해하는 단서를 제공한다. 규소의 전자 구조는 규산염 다면체 주변의 산소 원자 분포와 연관성을 가질 것으로 예상되나, 이 사이의 상관관계가 명확하게 밝혀져 있지 않다. 본 연구는 SiO₂의 고밀도화에 따른 규소의 전자 구조 변화의 미시적인 기원을 규명하기 위해 SiO₂ 동질이상의 규소 부분 상태 밀도와 L₃-edge X-선 흡수분광분석(X-ray absorption spectroscopy; XAS) 스펙트럼을 계산하였다. 규소의 전도 띠 영역에서 전자 구조는 결정 구조에 따라서 변화하였다. 특히 d-오비탈은 108, 130 eV 영역에서 배위 환경에 따른 뚜렷한 차이를 보였다. 계산된 XAS 스펙트럼은 규소 전도 띠의 s,d-오비탈에서 기인하는 피크를 보였으며, 결정 구조에 따라 s,d-오비탈과 유사한 양상으로 변화했다. 계산된 석영의 XAS 스펙트럼은 SiO₂ 유리의 XR S 실험 결과와 유사하였으며 규소 주변 원자 환경이 비슷하기 때문으로 생각된다. XAS 스펙트럼을 수치화한 무게 중심 값은 Si-O 결합 거리와 밀접한 상관관계를 가지며 이로 인하여 고밀도화 과정에서 체계적으로 변화한다. 본 연구의 결과는 Si-O 결합 거리에 민감한 규소 L_2,3-edge XRS가 규산염 유리 및 용융체의 고밀도화 기작을 규명하는 과정에서 유용하게 적용될 수 있음을 지시한다.

• 한국수소및신에너지학회논문집
• /
• 제27권1호
• /
• pp.13-21
• /
• 2016

The Sulfur-Iodine thermochemical hydrogen production process (SI process) consists of the Bunsen reaction section, the $H_2SO_4$ decomposition section, and the HI decomposition section. The $HI_x$ solution ($I_2-HI-H_2O$) could be recycled to Bunsen reaction section from the HI decomposition section in the operation of the integrated SI process. The phase separation characteristic of the Bunsen reaction using the $HI_x$ solution was similar to that of $I_2-H_2O-SO_2$ system. On the other hands, the amount of produced $H_2SO_4$ phase was small. To investigate the effects of $SO_2$ solubility on Bunsen reaction, the continuous Bunsen reaction was performed at variation of the amounts of $SO_2$ gas. Also, it was carried out to make sure of the effects of partial pressure of $SO_2$ in the condition of 3bar of $SO_2-O_2$ atmosphere. As the results, the characteristic of Bunsen reaction was improved with increasing the amounts and solubility of $SO_2$ gas. The concentration of Bunsen products was changed by reverse Bunsen reaction and evaporation of HI after 12 h.

• 한국전기전자재료학회논문지
• /
• 제16권12S호
• /
• pp.1278-1285
• /
• 2003

This study investigated the phase transformation of the REBa$_2$Cu$_3$$O_{7-x}$ (RE=Nd, Gd, Dy) superconductor, and CCT (Continuous-Cooling-Transformation) along with the TTT (Time-Temperature-Transformation) diagrams are suggested according to the isothermal and continuous cooling heat-treatments. The peritectic temperature of the 123 phases decreased approximately 3$0^{\circ}C$ when the ionic radius of the rare-earth elements was reduced. The optimum cooling rate where BC and Cu-free phases do not exist was 0.001$^{\circ}C$/s. At this cooling late, the 123 phase grew with a c-axis Perpendicular to the surface and had a well-distributed 211 phase. When the oxygen partial pressure was reduced Outing isothermal heat-treatment, the formation temperature of the 211 phase decreased. In addition, the formation temperature of the 123 phases decreased from 100$0^{\circ}C$ (Nd-123) to 9$25^{\circ}C$ (Gd-123), and finally 875$^{\circ}C$ (Dy-123) according to the decrease in the ionic radius of the tare-earth elements. Compared to Nd-123, Gd- and Dy-123 had a better texture with a well-distributed 211 phase.e.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 초전도 자성체 연구회
• /
• pp.30-33
• /
• 2003

YBCO coated conductor, also called the 2nd generation high temperature superconducting wire, consists of oxide multi-layer hetero-epitaxial thin films. Pulsed laser deposition (PLD) is one of many film deposition methods used to make coated conductor, and is the one known to be the best to make superconducting layer so far. As a part of the effort to make long length coated conductor, the optimum deposition condition of YBCO film on single crystal substrate (SrTiO3) was investigated using PLD. Substrate temperature, oxygen partial pressure, and laser fluence were varied to find the best combination to grow high quality YBCO film.

• 한국신재생에너지학회:학술대회논문집
• /
• 한국신재생에너지학회 2007년도 춘계학술대회
• /
• pp.129-132
• /
• 2007

Advanced structure of metal-supported solid oxide fuel cells was devised to overcome sealing problem and mechanical instability in ceramic-supported solid oxide fuel cells. STS430 whose dimensions were 26mm diameter, 1mm thickness and 0.4mm channel width was used as metal support. Thin ceramic layer composed of anode(Ni/YSZ) and electrolyte(YSZ) was joined with STS430 metal support by using a cermet adhesive. $La_{0.8}Sr_{0.2}Co_{0.4}Mn_{0.6}O_{3}$ perovskite oxide was used as cathode material. It was noted that oxygen reduction reaction of cathode governed the overall cell performance from oxygen partial pressure dependance.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
• /
• pp.1539-1540
• /
• 2008

The field degradation of carbon nanotube field emitters in diode emission at constant current was demonstrated to be highly dependent upon the presence of residual gases at partial pressures. Upon exposure to a higher pressure of oxygen containing gases, for example, $O_2$ and CO increased the voltage. Those gases give rise to chemical etching to CNTs emitters. On the contrary, $CH_4$ affected the emission properties in the opposite direction as decreasing the voltage which was probably attributed to the introduction of adsorbate tunneling states. The mixed gas may cause a combined effect of both adsorbate tunneling states and CNT etching.

• 한국전기전자재료학회논문지
• /
• 제15권7호
• /
• pp.591-596
• /
• 2002

In this work, epitaxial GaN is grown on sapphire substrate in AlGaN/GaN heterostructures. Deliberate oxygen doping of GaN grown by MOVPE has been studied. The electron concentration increased as a function of the square root of the oxygen partial Pressure. Oxygen is a shallow donor with a thermal ionization energy of $27\pm2 meV$ measured by temperature dependent Hall effects. A compensation ratio of $\theta$=0.3~0.4 was determined from Hall effect measurements. The formation energy of $O_N$ of $E^F$ =1.3eV determined from the experimental data, is lower than the theoretically predicted vague.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.288-288
• /
• 2012

In this study, we investigated that the resistance switching characteristics of W-doped NbOx films with increasing W doping concentration. The W-doped NbOx based ReRAM devices with a TiN/W-doped NbOx/Pt/Ti/SiO2 were fabricated on Si substrates. The 50 nm thick W-doped NbOx films were deposited by reactive dc magnetron co-sputtering at $400^{\circ}C$ and oxygen partial pressure of 35%. Micro-structure of W-doped NbOx films and atomic concentration were investigated by XRD, TEM and XPS, respectively. The W-doped NbOx films showed set/reset resistance switching behavior at various W doping concentrations. The process voltage of set/reset is decreased and whereas the initial current level is increased with increasing W doping concentration in NbOx films. The change of resistance switching behavior depending on doping concentration was discussed in terms of concentration of metallic tungsten of oxygen of W-doped NbOx.