• The Korean Journal of Ceramics
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• v.5 no.2
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• pp.110-114
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• 1999

NOx sensing properties of $Ba_2WO_5$ were investigated by varying the sintering temperature in an effort to study the effects of the neck-width on gas sensitivity. $Ba_2WO_5$ sintered at $800^{\circ}C$, which exhibits neck-controlled conduction provides highest sensitivity of 47 and 29 at $500^{\circ}C$ to NO and $NO_2$, respectively. The samples sintered beyond $800^{\circ}C$ show sintering temperature-independent gas sensitivity. This may be because the grain boundary control is dominant at lower sintering temperatures and open neck control is dominant at higher sintering temperatures than $800{\circ}C$. The NOx sensing mechanism of $Ba_2WO_5$ was briefly discussed.

• Journal of the Korean institute of surface engineering
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• v.56 no.4
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• pp.219-226
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• 2023

Utilizing low-dimensional structures of oxide semiconductors is a promising approach to fabricate relevant gas sensors by means of potential enhancement in surface-to-volume ratios of their sensing materials. In this work, vertically aligned cupric oxide (CuO) nanorods are successfully synthesized on a transparent glass substrate via seed-mediated hydrothermal synthesis method with the use of a CuO nanoparticle seed layer, which is formed by thermally oxidizing a sputtered Cu metal film. Structural and optical characterization by x-ray diffraction (XRD), scanning electron microscopy (SEM), and Raman spectroscopy reveals the successful preparation of the CuO nanorods array of the single monoclinic tenorite crystalline phase. From gas sensing measurements for the nitrogen monoxide (NO) gas, the vertically aligned CuO nanorod array is observed to have a highly responsive sensitivity to NO gas at relatively low concentrations and operating temperatures, especially showing a high maximum sensitivity to NO at 200 ℃ and a low NO detection limit of 2 ppm in dry air. These results along with a facile fabrication process demonstrate that the CuO nanorods synthesized on a transparent glass substrate are very promising for low-cost and high-performance NO gas sensors.

• Korean Journal of Materials Research
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• v.24 no.1
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• pp.19-24
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• 2014

We report the nitrogen monoxide (NO) gas sensing properties of p-type CuO-nanorod-based gas sensors. We synthesized the p-type CuO nanorods with breadth of about 30 nm and length of about 330 nm by a hydrothermal method using an as-deposited CuO seed layer prepared on a $Si/SiO_2$ substrate by the sputtering method. We fabricated polycrystalline CuO nanorod arrays at $80^{\circ}C$ under the hydrothermal condition of 1:1 morality ratio between copper nitrate trihydrate [$Cu(NO_2)_2{\cdot}3H_2O$] and hexamethylenetetramine ($C_6H_{12}N_4$). Structural characterizations revealed that we prepared the pure CuO nanorod array of a monoclinic crystalline structure without any obvious formation of secondary phase. It was found from the gas sensing measurements that the p-type CuO nanorod gas sensors exhibited a maximum sensitivity to NO gas in dry air at an operating temperature as low as $200^{\circ}C$. We also found that these CuO nanorod gas sensors showed reversible and reliable electrical response to NO gas at a range of operating temperatures. These results would indicate some potential applications of the p-type semiconductor CuO nanorods as promising sensing materials for gas sensors, including various types of p-n junction gas sensors.

• Korean Journal of Materials Research
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• v.25 no.8
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• pp.423-428
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• 2015

Impedancemetric $NO_x$ (NO and $NO_2$) gas sensors were designed with a stacked-layer structure and fabricated using $LaCr_xCo_{1-x}O_3$ (x = 0, 0.2, 0.5, 0.8 and 1) as the receptor material and $Li_{1.3}Al_{0.3}Ti_{1.7}(PO_4)_3$ plates as the solid-electrolyte transducer material. The $LaCr_xCo_{1-x}O_3$ layers were prepared with a polymeric precursor method that used ethylene glycol as the solvent, acetyl acetone as the chelating agent, and polyvinylpyrrolidone as the polymer additive. The effects of the Co concentration on the structural, morphological, and $NO_x$ sensing properties of the $LaCr_xCo_{1-x}O_3$ powders were investigated with powder X-ray diffraction, field emission scanning electron microscopy, and its response to 20~250 ppm of $NO_x$ at $400^{\circ}C$ (for 1 kHz and 0.5 V), respectively. When the as-prepared precursors were calcined at $700^{\circ}C$, only a single phase was detected, which corresponded to a perovskite-type structure. The XRD results showed that as the Co concentration of the $LaCr_xCo_{1-x}O_3$powders increased, the crystal structure was transformed from an orthorhombic phase to a rhombohedral phase. Moreover, the $LaCr_xCo_{1-x}O_3$ powders with $0{\leq}x<0.8$ had a rhombohedral symmetry. The size of the particles in the $LaCr_xCo_{1-x}O_3$powders increased from 0.1 to $0.5{\mu}m$ as the Co concentration increased. The sensing performance of the stack-structured $LaCr_xCo_{1-x}O_3/Li_{1.3}Al_{0.3}Ti_{1.7}(PO_4)_3$ sensors was found to divide the impedance component between the resistance and capacitance. The response of these sensors to NO gas was more sensitive than that to $NO_2$ gas. Compared to other impedancemetric sensors, the $LaCr_{0.8}Co_{0.2}O_3/Li_{1.3}Al_{0.3}Ti_{1.7}(PO_4)_3$ sensor exhibited good reversibility and reliable sensingresponse properties for $NO_x$ gases.

• Journal of Sensor Science and Technology
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• v.23 no.1
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• pp.15-18
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• 2014

We present gas sensing performance based on $2{\times}2$ sensor array with four different elements ($TiO_2$, $SnO_2$, $WO_3$ and $In_2O_3$ thin films) fabricated by rf sputter. Each thin film was deposited onto the selected $SiO_2$/Si substrate with Pt interdigitated electrodes (IDEs) of $5{\mu}m$ spacing which were fabricated on a $SiO_2$/Si substrate using photolithography and dry etching. For 5 ppm $NO_2$ and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, $2{\times}2$ sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring.

• Journal of the Korean Ceramic Society
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• v.47 no.1
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• pp.92-96
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• 2010

Based on the differential electrode equilibria approach, potentiometric YSZ sensors with semiconducting oxide electrodes for CO detection are developed. To improve the selectivity, sensitivity and response-time of the sensor, our strategy includes (a) selection of an oxide with a semiconducting response to CO, (b) addition of other semiconducting materials, (c) addition of a catalyst (Pd), (d) utilization of combined p- and n-type electrodes in one sensor configuration, and (e) optimization of operating temperatures. Excellent sensing performance is obtained by a novel device structure incorporating $La_2CuO_4$ electrodes on one side and $TiO_2$-based electrodes on opposite substrate faces with Pt contacts. The resulting response produces additive effects for the individual $La_2CuO_4$ and $TiO_2$-based electrodes voltages, thereby realizing an even higher CO sensitivity. The device also is highly selective to CO versus NO with minor sensitivity for NO concentration, compared to a notably large CO sensitivity.

• Bulletin of the Korean Chemical Society
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• v.34 no.6
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• pp.1632-1636
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• 2013

$Ga_2O_3$ one-dimensional (1D) nanostructures were synthesized by using a thermal evaporation technique. The morphology, crystal structure, and sensing properties of the $Ga_2O_3$ nanostructures functionalized with Pt to $NO_2$ gas at room temperature under UV irradiation were examined. The diameters of the 1D nanostructures ranged from a few tens to a few hundreds of nanometers and the lengths ranged up to a few hundreds of micrometers. Pt nanoparticles with diameters of a few tens of nanometers were distributed around a $Ga_2O_3$ nanorod. The responses of the nanorods gas sensors fabricated from multiple networked $Ga_2O_3$ nanorods were improved 3-4 fold at $NO_2$ concentrations ranging from 1 to 5 ppm by Pt functionalization. The Pt-functionalized $Ga_2O_3$ nanorod gas sensors showed a remarkably enhanced response at room temperature under ultraviolet (UV) light illumination. In addition, the mechanisms via which the gas sensing properties of $Ga_2O_3$ nanorods are enhanced by Pt functionalization and UV irradiation are discussed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.471-474
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• 2000

A flat type microgas sensor was fabricated on the p-type silicon wafer with low stress S $i_3$ $N_4$, whose thickness is 2${\mu}{\textrm}{m}$ using MEMS technology and its characteristics were investigated. W $O_3$thin film as a sensing material for detection of N $O_2$gas was deposited using a tungsten target by sputtering method, followed by thermal oxidation at several temperatures (40$0^{\circ}C$~$600^{\circ}C$) for one hour. N $O_2$gas sensitivities were investigated for the W $O_3$thin films with different annealing temperatures. The highest sensitivity when operating at 20$0^{\circ}C$ was obtained for the samples annealed at $600^{\circ}C$. As the results of XRD analysis, the annealed samples had polycrystalline phase mixed with triclinic and orthorhombic structures. The sample exhibit higher sensitivity when the system has less triclinic structure. The sensitivities, $R_{gas}$ $R_{air}$ operating at 20$0^{\circ}C$ to 5 ppm N $O_2$of the sample annealed at $600^{\circ}C$ were approximately 90. 90.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.32A no.7
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• pp.85-93
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• 1995

In this study, phthalocyanine thin films were prepared by vacuum sublimation method and investigated sensing characteristics of the films. The phthalocyannies used for the prepaation of the NO$_{x}$ sensors were metal-free Pc(H$_{2}$Pc) and metal Pc(CuPc, CoPc, PbPc). And the substrate temperatures maintained during the fomation of Pc films were varied between R.T. and 200$^{\circ]C$, and the base pressure was 5${\times}10^{6}$ torr. The relationships between NO$_{2}$ sensing properties and SEM analyses as a function of substrate temperatures during the formation of the films were investigated. Among the Pc films, PbPc film showed the best sensing characteristics. Particularlly, the PbPc films prepared at 70$^{\circ]C$ of the substrage temperature showen good sensitivity of 85% to 1ppm NO$_{2}$ gas at operating temperature 190$^{\circ]C$ and response time was about 24 seconds.

• Bulletin of the Korean Chemical Society
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• v.33 no.6
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• pp.1851-1855
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• 2012

The $NO_2$ gas sensing properties of multiple-networked, Pt-loaded $TeO_2$ nanorod sensors were examined. Scanning electron microscopy revealed nanowires with diameters of 50-100 nm and lengths of a few micrometers. Transmission electron microscopy and X-ray diffraction showed that the nanrods were tetragonal-structured, single crystal $TeO_2$. The Pt-loaded $TeO_2$ nanorod sensors exhibited sensitivities of 11.00, 10.26, 11.23 and 11.97% at $NO_2$ concentrations of 10, 50, 100 and 200 ppm, respectively, at $300^{\circ}C$. These sensitivities were more than 10 times higher than those of bare-$TeO_2$ nanorod sensors. The response times of the sensors were 310, 260, 270 and 230 sec at $NO_2$ concentrations of 10, 50, 100 and 200 ppm, respectively. The recovery times of the Pt-loaded $TeO_2$ nanorods were 390, 330, 335, and 330 sec at $NO_2$ concentrations of 10, 50, 100 and 200 ppm, respectively. The origin of the enhanced sensing properties of the $TeO_2$ nanorods by Pt loading is discussed.