• Title/Summary/Keyword: $HfO_3$

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Characterization of a Solution-processed YHfZnO Gate Insulator for Thin-Film Transistors

  • Kim, Si-Joon;Kim, Dong-Lim;Kim, Doo-Na;Kim, Hyun-Jae
    • Journal of Information Display
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    • v.11 no.4
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    • pp.165-168
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    • 2010
  • A solution-processed multicomponent oxide, yttrium hafnium zinc oxide (YHZO), was synthesized and deposited as a gate insulator. The YHZO film annealed at $600^{\circ}C$ contained an amorphous phase based on the results of thermogravimetry, differential thermal analysis, and X-ray diffraction. The electrical characteristics of the YHZO film were analyzed by measuring the leakage current. The high dielectric constant (16.4) and high breakdown voltage (71.6 V) of the YHZO films resulted from the characteristics of $HfO_2$ and $Y_2O_3$, respectively. To examine if YHZO can be applied to thin-film transistors (TFTs), indium gallium zinc oxide TFTs with a YHZO gate insulator were also fabricated. The desirable characteristics of the YHZO films when used as a gate insulator show that the limitations of the general binary-oxide-based materials and of the conventional vacuum processes can be overcome.

Statistical Study For The prediction of pKa Values of Substituted Benzaldoxime Based on Quantum Chemicals Methods

  • Al-Hyali, Emad A.S.;Al-Azzawi, Nezar A.;Al-Abady, Faiz M.H.
    • Journal of the Korean Chemical Society
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    • v.55 no.5
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    • pp.733-740
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    • 2011
  • Multiple regression analysis was used for the calculation of pKa values of 15 substituted benzaldoximes by using various types of descriptors as parameters. These descriptors are based on quantum mechanical treatments. They were derived by employing semi-empirical calculation represented by the PM3 model and an Abinitio method expressed by Hartree-Fock(HF) model performed at the 6-311 G(d, p) level of theory. The parameters tested for their ability to represent the variations observed in the experimental pKa(s) are atomic and structural properties including Muliken charges on the atoms of hydroxyl group and C=N bond, the angle $C_6-C_1-C_7$, and length of O-H bond. Molecular properties are also used like energies of HOMO and LUMO, hardness(${\eta}$), chemical potential(${\mu}$), total energy(TE), dipole of molecule(DM), and electrophilicity index(W). The relation between pKa values and each of these parameters of the studied compounds is investigated. Depending on these relations, two sets of parameters were constructed for comparison between the PM3 and HF methods. The results obtained favor the Abinitio method for such applications although both models proved to have high predictive power and have sufficient reliability to describe the effect of substituents on pKa values of benzaldoxime compounds under consideration which is clear from the values of correlation coefficient $R^2$ obtained and the consistency between the experimental and the calculated values.

Production of uranium tetrafluoride from the effluent generated in the reconversion via ammonium uranyl carbonate

  • Neto, Joao Batista Silva;de Carvalho, Elita Fontenele Urano;Garcia, Rafael Henrique Lazzari;Saliba-Silva, Adonis Marcelo;Riella, Humberto Gracher;Durazzo, Michelangelo
    • Nuclear Engineering and Technology
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    • v.49 no.8
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    • pp.1711-1716
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    • 2017
  • Uranium tetrafluoride ($UF_4$) is the most used nuclear material for producing metallic uranium by reduction with Ca or Mg. Metallic uranium is a raw material for the manufacture of uranium silicide, $U_3Si_2$, which is the most suitable uranium compound for use as nuclear fuel for research reactors. By contrast, ammonium uranyl carbonate is a traditional uranium compound used for manufacturing uranium dioxide $UO_2$ fuel for nuclear power reactors or $U_3O_8-Al$ dispersion fuel for nuclear research reactors. This work describes a procedure for recovering uranium and ammonium fluoride ($NH_4F$) from a liquid residue generated during the production routine of ammonium uranyl carbonate, ending with $UF_4$ as a final product. The residue, consisting of a solution containing high concentrations of ammonium ($NH_4^+$), fluoride ($F^-$), and carbonate ($CO_3^{2-}$), has significant concentrations of uranium as $UO_2^{2+}$. From this residue, the proposed procedure consists of precipitating ammonium peroxide fluorouranate (APOFU) and $NH_4F$, while recovering the major part of uranium. Further, the remaining solution is concentrated by heating, and ammonium bifluoride ($NH_4HF_2$) is precipitated. As a final step, $NH_4HF_2$ is added to $UO_2$, inducing fluoridation and decomposition, resulting in $UF_4$ with adequate properties for metallic uranium manufacture.

Evaluation of the Giggenbach Bottle Method with Artificial Fumarolic Gases (인공 분기공 가스를 이용한 Giggenbach bottle 법의 평가)

  • Lee, Sangchul;Kang, Jungchun;Yun, Sung Hyo;Jeong, Hoon Young
    • Journal of the Korean earth science society
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    • v.34 no.7
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    • pp.681-692
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    • 2013
  • We aimed to evaluate the effectiveness of the Giggenbach bottle method and develop the related pretreatment and analytical methods using artificial fumarolic gases. The artificial fumarolic gases were generated by mixing $CO_2$, CO, $H_2S$, $SO_2$, $H_2$, and $CH_4$ gas streams with a $N_2$ stream sparged through an acidic medium containing HCl and HF, with their compositions varied by adjusting the gas flow rates. The resultant fumarolic gases were collected into an evacuated bottle partially filled with a NaOH absorption solution. While non-condensible gases such as CO, $H_2S$, and $CH_4$ accumulated in the headspace of the bottle, acidic components including $CO_2$, $SO_2$, HCl, and HF that were dissolved into the alkaline solution. Like other acidic components, $H_2S$ also dissolved into the solution, but it reacted with dissolved $Cd^{2+}$ to precipitate as CdS when $Cd(CH_3COO)_2$ was added. The non-condensible gases were analyzed on a gas chromatography. Then, CdS precipitates were separated from the alkaline solution by filtration, and they were pretreated with $H_2O_2$ to oxidize CdS-bound sulfide into sulfate. In addition, a portion of the solution was also pretreated with $H_2O_2$ to oxidize sulfite to sulfate. Following the pretreatment, the resultant samples were analyzed for $SO_4^{2-}$, $Cl^-$ and $F^-$ on an ion chromatography. In the meanwhile, dissolved $CO_2$ was analyzed on a total organic carbon-inorganic carbon analyzer without such pretreatment. According to our experimental results, the measured concentrations of the fumarolic gases were shown to be proportional to the gas flow rates, indicating that the Giggenbach bottle method is adequate for monitoring volcanic gas. The pretreatment and analytical methods employed in this study may also enhance the accuracy and reproducibility of the Giggenbach bottle method.

Geochemical Characteristics of Soils and Sediments at the Narim Mine Drainage, Korea: Dispersion, Enrichment and Origin of Heavy Metals (나림광산 수계의 토양과 퇴적물에 관한 지구화학적 특성: 중금속 원소의 분산, 부화 및 기원)

  • Lee, Chan Hee;Lee, Hyun Koo;Lee, Jong Chang
    • Economic and Environmental Geology
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    • v.31 no.4
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    • pp.297-310
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    • 1998
  • Geochemical characteristics of environmental toxic elements at the Narim mine area were investigated on the basis of major, minor, rare earth element geochemistry and mineralogy. Ratios of $Al_2O_3/Na_2O$ and $K_2O/Na_2O$ in soils and sediments range from 11.57 to 22.21 and from 1.86 to 3.93, and are partly negative and positive correlation against $SiO_2/Al_2O_3$ (3.41 to 4.78), respectively. These suggested that sediment source of host granitic gneiss could be due to rocks of high grade metamorphism originated by sedimentary rocks. Characteristics of some trace and rare earth elements of V/Ni (0.33 to 1.95), Ni/Co (2.00 to 6.50), Zr/Hf (11.27 to 53.10), La/Ce (0.44 to 0.55), Th/Yb (4.07 to 7.14), La/Th (2.35 to 3.93), $La_N/Yb_N$ (6.58 to 13.67), Co/Th (0.63 to 2.68), La/Sc (3.29 to 5.94) and Sc/Th (0.49 to 1.00) are revealed a narrow range and homogeneous compositions may be explained by simple source lithology. Major elements in all samples are enriched $Al_2O_3$, MgO, $TiO_2$ and LOI, especially $Fe_2O_3$ (mean=7.36 wt.%) in sediments than the composition of host granitic gneiss. The average enrichment indices of major and rare earth elements from the mining drainage are 2.05 and 2.91 of the sediments and are 2.02 and 2.60 of the soils, normalizing by composition of host granitic gneiss, respectively. Average composition (ppm) of minor and/or environmental toxic elements in sediments and soils are Ag=14 and 1, As=199 and 14, Cd=22 and 1, Cu=215 and 42, Pb=1770 and 65, Sb=18 and 3, Zn=3333 and 170, respectively, and extremely high concentrations are found in the subsurface sediments near the ore dump. Environmental toxic elements were strongly enriched in all samples, especially As, Cd, Cu, Pb, Sb and Zn. The level of enrichment was very severe in mining drainage sediments, while it was not so great in the soils. Based on the EPA value, enrichment index of toxic elements is 8.63 of mining drainage sediments and 0.54 of soils on the mining drainage. Mineral composition of soils and sediments near the mining area were partly variable being composed of quartz, mica, feldspar, amphibole, chlorite and clay minerals. From the gravity separated mineralogy, soils and sediments are composed of some pyrite, arsenopyrite, chalcopyrite, sphalerite, galena, goethite and various hydroxide minerals.

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Petrology of the Bokyeongsa Volcanics in the northeast Gyeongsang Basin (경상분지 동북부 보경사화산암체의 암석학적 연구)

  • Yun, Sung-Hyo;Lee, Moon-Won;Koh, Jeong-Seon;Kim, Young-La;Han, Mi-Kyeong
    • Journal of the Korean earth science society
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    • v.21 no.5
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    • pp.595-610
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    • 2000
  • This study has been designed to elucidate the petrography and geochemical characteristics of the volcanic rocks and focused on petrogenesis and tectonic environment of the Bokyeongsa volcanics in the northeast Gyeongsang Basin. The Bokyeongsa volcanics consist of the Naeyeonsan tuff which include rock fragment plagioclase, quartz and hornblende and pumice showing welded structures, and felsite. According to the petrochemical data, the Naeyeonsan tuff and felsite are in the range of 68${\sim}$71wt% and 77wt% SiO$_2$ content respectively. The Naeyeonsan tuff belongs to dacite/rhyodacite, and felsite to rhyolite. These volcanics rocks belong to the calc-alkaline rock series on the TAS diagram and the AFM diagram. The variations of major elements of the volcanic rocks show that contene of TiO$_2$, Al$_2$ O$_3$, FeO$^T$, MnO, MgO, CaO are inversely proportional to those of SiO$_2$, but contents of K$_2$O are positively. They represent differentiation trend of calc-alkaline rocks series. In spider disgram of MORB-normalized trace element partterns, contents of K, Rb, Th and Ta are relatively high, but those of Nb, Zr, Hf, Ti, Y and Yb are nearly similar to MORB. In the chondrite-normalized REE patterns, light REEs are more enriched than heavy REEs. The trace element composition and REE patterns suggest that they are typical island-arc calc-akaline volcanic rocks formed in the tectonomagmatic environment of subduction zone under continental margin.

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Selective Chemical Wet Etching of Si0.8Ge0.2/Si Multilayer

  • Kil, Yeon-Ho;Yang, Jong-Han;Kang, Sukil;Jeong, Tae Soo;Kim, Taek Sung;Shim, Kyu-Hwan
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.13 no.6
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    • pp.668-675
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    • 2013
  • We investigate the effect of the ageing time and etching time on the etching rate of SiGe mixed etching solution, namely 1 vp HF (6%), 2 vp $H_2O_2$ (30%) and 3 vp $CH_3COOH$ (99.8%). For this etching solution, we found that the etch rate of SiGe layer is saturated after the ageing time of 72 hours, and the selectivity of $Si_{0.8}Ge_{0.2}$ layer and Si layer is 20:1 at ageing time of 72 hours. The collapse was appeared at the etching time of 9min with etching solution of after saturation ageing time.

The Investigation of CF4 Decomposition in Methane Premixed Flames on Oxygen Enrichment (산소부화된 메탄 예혼합 화염에서 CF4 분해에 대한 연구)

  • Lee, Ki Yong
    • Journal of the Korean Society of Combustion
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    • v.22 no.4
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    • pp.51-56
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    • 2017
  • The decomposition of tetrafluoromethane has been investigated with the reaction mechanism proposed for freely propagating $CH_4/CF_4/O_2/N_2$ premixed flames on the oxygen enrichment. The factors affecting on the removal efficiency of tetrafluoromethane were analyzed. The increase in flame temperature due to oxygen enrichment has a great influence on the removal efficiency of tetrafluoromethane. At the same oxygen enrichment condition, the removal efficiency in the rich flame is higher than one in the lean flame. The increase of the F/H ratio leads to decrease the flame temperature and the removal efficiency of tetrafluoromethan is decreased at the flame temperature of 2600 K or lower, The elementary reactions that dominate the consumption of tetrafluoromethane are (R1) $CF_4+M=CF_3+F+M$ and (R2) $CF_4+H=CF_3+HF$. (R1) has the greatest effect on the consumption of tetrafluoromethane under the oxygen enhanced flames.

A Study on Cleaning Processes for Ti/TiN Scales on Semiconductor Equipment Parts (반도체 장비 부품의 Ti/TiN 흡착물 세정 공정 연구)

  • 유정주;배규식
    • Journal of the Semiconductor & Display Technology
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    • v.3 no.2
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    • pp.11-15
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    • 2004
  • Scales, accumulated on some parts of semiconductor equipments such as sputters and CVD during the device fabrication processes, often lower the lifetime of the equipments and production yields. Thus, many equipment parts have be cleaned regularly. In this study, an attempt to establish an effective process to remove scales on the sidewall of collimators located inside the chamber of the sputter was made. The EDX analysis revealed that the scales were composed of Ti and TiN with the columnar structure. Through the trial-and-error experiments, it was found that the etching in the $HNO_3$:$H_2SO_4$:$H_2O$=4:2:4 solution for 5.5 hrs at $67^{\circ}C$, after the oxide removal in the HF solution, and the heat-treatment at $700^{\circ}C$ for 1 min., was the most effective process for the scale removal.

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Distributions of Hyperfine Parameters in Amorphous $Fe_{83}B_9Nb_7Cu_1$ Alloys (비정질 $Fe_{83}B_9Nb_7Cu_1$의 M$\)

  • 윤성현;김성백;김철성
    • Journal of the Korean Magnetics Society
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    • v.9 no.6
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    • pp.271-277
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    • 1999
  • Amorphous $Fe_{83}B_9Nb_7Cu_1$ alloy has been studied by M$\"{o}$ssbauer spectroscopy. Revised Vincze method was used and distributions of hyperfine field, isomer shift, and quadrupole line broadening of the sample at various temperatures have been evaluated and Curie temperature and $H_{hf}\;(0)$ were calculated to be 393 K and 231 kOe, respectively. Temperature variation of reduced average hyperfine field shows a flattered curvein comparison with the Brillouin curve for S=1. This behavior can be explained on the basis of Handrich molecular field model, in which the parameter Δ, which is a measure of fluctuation in exchange interactions, is assumed to have the temperature dependence ${Delta}=0.75-0.64{\tau}+0.47{\tau}^2$ where $\tau$ is $T/T_C$. At low temperature, the average hyperfine field can be fitted to $H_{hf}\;(T)=H_{hf}\;(0)\;[1-0.44\;(T/T_C)^{3/2}-0.28(T/T_C)^{5/2}-… ]$, which indicates the presence long wave length spin wave excitations. At temperature near TC, reduced average hyperfine field varies as $1.00\;[1-T/T_C]^{0.39}$. It is also found that half-width of the hyperfine field distribution was 102 kOe (3.29 mm/s) at 13 K and decreased monotonically as temperature increased. Above the Curie temperature, an average quadrupole splitting value of 0.43 mm/s was found. Average line broadening due to quadrupole splitting distribution was 0.31 mm/s at 13 K and decreases monotonically to 0.23 mm/s at 320 K, whereas that due to the isomer shift distribution is 0.1 mm/s at 13 K and 0.072 mm/s at 320 K, which is much smaller than that of both hyperfine field and quadrupole splitting. The temperature dependence of the isomer shift can be fitted within the harmonic approximation to a Deybe model with a Debye temperature ${Theta}_D=424{\pm}5K$.TEX>.

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