• Journal of Powder Materials
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• v.18 no.6
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• pp.568-574
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• 2011

As operating temperatures of engines or turbines continually increase for higher efficiency, significant amounts of researches have been focused on finding new materials, which would be alternatives to conventional yttria-stabilized zirconia (YSZ) for thermal barrier coatings (TBCs). In this study, phase evolution and thermo-physical properties of $La_2(Zr_{1-x}Hf_x)_2O_7$ pyrochlore systems are investigated for TBC applications. $La_2(Zr_{1-x}Hf_x)_2O_7$ systems are comprised by selecting $La^{3+}$ as A-site ions and $Zr^{4+}/Hf^{4+}$ as B-site ions in $A_2B_2O_7$ pyrochlore structures. For the developed phases in $La_2(Zr_{1-x}Hf_x)_2O_7$ compositions, thermo-physical properties such as thermal conductivity, thermal expansion coefficient are examined. The potential of these $La_2(Zr_{1-x}Hf_x)_2O_7$ compositions for TBC application is also discussed.

• Journal of IKEEE
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• v.25 no.1
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• pp.1-9
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• 2021

In this paper, a 4H-SiC UMOSFET was studied which is suitable for high voltage and high current applications. In general, SiO2 is a material most commonly used as a gate dielectric material in SiC MOSFETs. However, since the dielectric constant value is 2.5 times lower than 4H-SiC, it suffers a high electric field and has poor characteristics in the SiO2/SiC junction. Therefore, the static characteristics of a device with high-k material as a gate dielectric and a device with SiO2 were compared using TCAD simulation. The results show BV decreased, VTH decreased, gm increased, and Ron decreased. Especially when the temperature is 300K, the Ron of Al2O3 and HfO2 decreases by 66.29% and 69.49%. and at 600K, Ron decreases by 39.71% and 49.88%, respectively. Thus, Al2O3 and HfO2 are suitable as gate dielectric materials for high voltage SiC MOSFET.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.318.1-318.1
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• 2016

Hafnium Oxide (HfOx) has been attracted as a promising gate dielectric for replacing SiO2 in gate stack applications. In this paper, Metal-Oxide-Semiconductor (MOS) capacitor with solution processed HfO2 high-k material as a dielectric were fabricated. The solvent using $HfOCl2{\cdot}8H2O$ dissolve in 2-Methoxy ethanol was prepared at 0.3M. The HfOx layers were deposited on p-type silicon substrate by spin-coating at $250^{\circ}C$ for 5 minutes on a hot plate and repeated the same cycle for 5 times, followed by annealing process at 350, 450 and $550^{\circ}C$ for 2 hours. When the annealing temperature was increased from 350 to $550^{\circ}C$, capacitance value was increased from 337 to 367 pF. That was resulted from the higher temperature of HfOx which have more crystallization phase, therefore dielectric constant (k) was increased from 11 to 12. It leads to the formation of dense HfOx film and improve the ability of the insulator layer. We confirm that HfOx layer have a good performance for dielectric layer in MOS capacitors.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.331-331
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• 2009

Hafnium oxide ($HfO_2$) attracted by one of the potential candidates for the replacement of si-based oxides. For applications of the high-k gate dielectric material, high thermodynamic stability and low interface-trap density are required. Furthermore, the amorphous film structure would be more effective to reduce the leakage current. To search the gate oxide materials, metal-insulator-metal (MIM) capacitors was fabricated by pulsed laser deposition (PLD) on indium tin oxide (ITO) coated glass with different oxygen pressures (30 and 50 mTorr) at room temperature, and they were deposited by Au/Ti metal as the top electrode patterned by conventional photolithography with an area of $3.14\times10^{-4}\;cm^2$. The results of XRD patterns indicate that all films have amorphous phase. Field emission scanning electron microscopy (FE-SEM) images show that the thickness of the $HfO_2$ films is typical 50 nm, and the grain size of the $HfO_2$ films increases as the oxygen pressure increases. The capacitance and leakage current of films were measured by a Agilent 4284A LCR meter and Keithley 4200 semiconductor parameter analyzer, respectively. Capacitance-voltage characteristics show that the capacitance at 1 MHz are 150 and 58 nF, and leakage current density of films indicate $7.8\times10^{-4}$ and $1.6\times10^{-3}\;A/cm^2$ grown at 30 and 50 mTorr, respectively. The optical properties of the $HfO_2$ films were demonstrated by UV-VIS spectrophotometer (Scinco, S-3100) having the wavelength from 190 to 900 nm. Because films show high transmittance (around 85 %), they are suitable as transparent devices.

• Journal of the Microelectronics and Packaging Society
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• v.15 no.3
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• pp.41-46
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• 2008

Etching kinetics of $EAGLE^{2000TM}$ LCD glass was investigated using 2.5MHF-xMHCl$(x:0\sim8)$ acid mixtures. It was concluded that the reaction of HF-containing solutions with the glass was the rate-determining step for the dissolution process when considering following observations; the value of the activation energy $35\sim45$ kJ/mol and insensitivity of the dissolution rate to the etching time and the moving velocity of the glass into the solution. The etching rate linearly increased with increasing the HCl concentration in the etchant. It was also observed that the etched surface was as smooth as the original surface by addition of HCl and increase in etching temperature. This is due to the catalytic role of the $H_{3}O^{+]$ ions in the dissolution process.

• Korean Journal of Materials Research
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• v.4 no.2
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• pp.166-176
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• 1994

Ni base superalloys are composed of solid sohltion hardening elements(Co, Cr. Mo. W and so on) and $\gamma '$ precipitation hardening elements(A1, Ti, Nb, Ta and so on). To Improve the mechanical properties and oxidation resistanre of superalloys, rare earth elements(%r, Hf, Y and so on) are added to the inner substrate, or are used as coating materials. Their pffects on the growth rate and adhes~on of oxide are changed according to the kinds of oxides such as $AI_2O_3$ and $Cr_2O_3$. The effect of yttrium on the oxidation rate, grain size of oxide, internal structure, and crack resistance was investigated for two kinds of Ni-base superalloys. One in AF'115 superalloy containing Hf and the other is MA6000 superalloy containing $Y_2O_3$. They werr owid~zed at high temperature after yttrium surface modification using ion coater. Yttrium coating on the AF115 and MA6000 superalloys results in a marked change in the growth of the inner oxide. For AF115 superalloy, the degree of gram boundary segregation of $Cr_2O_3$, and prefer en^ tial oxidation of Hf are decreased, and the shape of inner oxidation layer was changed from triangle to plate type. For MA6000 superalloy, $Cr_2O_3$ oxide scale was transformed as outer oxidation layer of CrZOI and inner oxidation layer of $Cr_2O_3$.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.4 no.2
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• pp.157-168
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• 1994

The surface morphology, electrical properties, and optical properties of textured $SnO_2(:F)$ films according to deposition parameters such as HF and $H_2O$ content was studies. The electron concentration, resistivity, and mobility was $3{\Times}10^{20}/cm^3$, $7{\Times}10^4~9{\Times}10^4{Omega}cm$ and $18~25cm^2/V.sec$, respectively, when HF bubbling rate over 0.9 slm. The surface morphology was sharp edged pyramid shape without bubbling $H_2O$ but changed to round edged hemispherical shape when $H_2O$ was added.

• Journal of the Ergonomics Society of Korea
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• v.31 no.6
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• pp.785-791
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• 2012

Objective: The aim of this study was to investigate the correlation between 3D visual fatigue and physiological measures by canonical correlation analysis enabling to categorical correlation. Background: Few studies have been conducted to investigate the physiological mechanism underlying the visual fatigue caused by processing 3D information which may make the cognitive mechanism overloaded. However, even the previous studies lack validation in terms of the correlation between physiological variables and the visual fatigue. Method: 9 Female and 6 male subjects with a mean age of $22.53{\pm}2.55$ voluntarily participated in this experiment. All participants were asked to report how they felt about their health sate at after viewing 3D. In addition, Low & Hybrid measurement test(Event Related Potential, Steady-state Visual Evoked Potential) and for evaluating cognitive fatigue before and after viewing 3D were performed. The physiological signal were measured with subjective fatigue evaluation before and after in watching the 3D content. For this study suggesting categorical correlation, all measures were categorized into three sets such as included Visual Fatigue set(response time, subjective evaluation), Autonomic Nervous System set(PPG frequency, PPG amplitude, HF/LF ratio), Central Nervous System set(ERP amplitude P4, O1, O2, ERP latency P4, O1, O2, SSVEP S/N ratio P4, O1, O2). Then the correlation of three variables sets, canonical correlation analysis was conducted. Results: The results showed a significant correlation between visual fatigue and physiological measures. However, different variables of visual fatigue were highly correlated to respective HF/LF ratio and to ERP latency(O2). Conclusion: Response time was highly correlated to ERP latency(O2) while the subjective evaluation was to HF/LF ratio. Application: This study may provide the most significant variables for the quantitative evaluation of visual fatigue using HF/LF ratio and ERP latency based human performance and subjective fatigue.

• Proceedings of the Korean Ceranic Society Conference
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• 2003.04a
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• pp.35.1-35
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• 2003

• Proceedings of the Korean Ceranic Society Conference
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• 2003.04a
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• pp.37.2-37
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• 2003