• Title/Summary/Keyword: $HfO_2/Al_2O_3$

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A Geochemical Study on Pyrophyllite Deposits and Andesitic Wall-Rocks in the Milyang Area, Kyeongnam Province (경남 밀양지역 납석광상과 안산암질 모암의 지구화학적 연구)

  • Oh, Dae-Gyun;Chon, Hyo-Taek;Min, Kyoung-Won
    • Economic and Environmental Geology
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    • v.25 no.1
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    • pp.27-39
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    • 1992
  • Several pyrophyllite deposits occur around the Milyang area where Cretaceous andesitic rocks and spatially related granitic rocks are widely distributed. Pyrophyllite ores consist mainly of pyrophyllite, and quartz with small amount of sericite, pyrite, dumortierite, and diaspore. The andesitic rocks and spatially related granitic rocks in this area suggest that they could be formed from the same series of a calc-alkaline magma series. The contents of $SiO_2$, $Al_2O_3$, LOI(loss on ignition) are enriched, and $K_2O$, $Na_2O$, CaO, MgO, $Fe_2O_3$ are depleted in altered andesitic rocks and ores. Enrichment of As, Cr, Sr, V, Sb and depletion of Ba, Cs, Ni, Rb, U, Y, Co, Sc, Zn are characteristic during mineralization. The pyrophyllite ores can be discriminated from the altered-and unaltered wall-rocks by an increasing of $(La/Lu)_{cn}$ from 4.18~22.13 to 8.98~55.05. In R-mode cluster analysis, Yb-Lu-Y, La-Ce-Hf-Th-U-Zr, $TiO_2-V-Al_2O_3$, Sm-Eu, $CaO-Na_2O-MnO$, Cu-Zn-Ag, $K_2O-Rb$ are closely correlated. In the discriminant analysis of multi-element data, $P_2O_5$, As, Cr and $Fe_2O_3$, Sr are helpful to identify the ores from the unaltered-and altered wall-rocks. In the factor analysis, the factors of alteration of andesitic rocks and ore mineralization were extracted. In the change of ions per unit volume, $SiO_2$, $Al^{3+}$ and LOI are enriched and $Na^+$, $K^+$, $Ca^{2+}$, $Mg^{2+}$, $Mn^{2+}$ and $Fe^{3+}$ are depleted during the alteration processes. The Milyang and the Sungjin pyrophyllite deposits could be mineralized by hydrothermal alteration in a geochemical condition of low activity ratio of alkaline ions to hydrogen ion with reference to spatially related granitic rocks.

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Improvement of the hysteresis characteristics in ZnO-based Transparent Thin Film Transistors (산화아연기반 투명 박막 트랜지스터의 히스테리시스 특성 향상)

  • Chang, Seong-Pil;Lee, Se-Han;Song, Yong-Won;Ju, Byeong-Kwon;Lee, Sang-Yeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.15-15
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    • 2008
  • 산화물 반도체가 실리콘 기반의 기술을 대체할 새로운 기술로써 주목을 받기 시작하면서, 산화아연을 이용한 박막트랜지스터가 많은 주목을 받고 있다. 여기에 기존의 $SiO_2$를 대체할 새로운 High-k Material에 대한 연구 또한 진행되고 있는데, 이들의 가장 큰 문제점중 하나는 Interface Charge Trap이며, 그에 따른 결과로 히스테리시스 특성이 나타나게 되고, 이는 소자의 신뢰성에 큰 걸림돌이 되고 있다. 이번 연구에서는, High-k Material들 중의 하나인, $HfO_2$를 게이트 절연막으로 사용함에 있어서 Interface Charge Trap이 발생하는 문제를 해결하고자 하며, Low-k Material중에서 비교적 높은 유전상수를 갖는 $Al_2O_3$를 Buffer Layer로써 사용하여, 히스테리시스 특성을 향상 시켰다.

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Geochemical Study on Geological Groups of Stream Sediments in the Gwangju Area (광주지역 하상퇴적물에 대한 지질집단별 지구화학적 연구)

  • Kim, Jong-Kyun;Park, Yeung-Seog
    • Economic and Environmental Geology
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    • v.38 no.4 s.173
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    • pp.481-492
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    • 2005
  • The purpose of this study is to determine geochemical characteristics for stream sediments in the Gwangju area. We collect the stream sediments samples by wet sieving along the primary channels and dry these samples slowly in the laboratory and grind to under 200mesh using an alumina mortar fur chemical analysis. Major elements, trace and rare earth elements are determined by XRF, ICP-AES and NAA analysis methods. For geochemical characteristics on geological groups of stream sediments, we separate geologic groups which are derived from Precambrian granite gneiss area, Jurassic granite area and Cretaceous Hwasun andesite area. Contents range of major elements for stream sediments in the Gwangju area are $SiO_2\;51.89\~70.63\;wt.\%,\;Al_2O-3\;12.91\~21.95\;wt.\%,\;Fe_2O_3\;3.22\~9.89\;wt.\%,\;K_2O\;1.85\~4.49\;wt.\%,\;MgO\;0.68\~2.90\;wt.\%,\;Na_2O\;0.48\~2.34\;wt.\%,\;CaO\;0.42\~6.72\;wt.\%,\;TiO_2\;0.53\~l.32\;wt.\%,\;P_2O_5\;0.06\~0.51\;wt.\%\;and\;MnO\;0.05\~0.69\;wt.\%.$ According to the AMF diagram for stream sediments and rocks, the stream sediments are plotted on boundary of tholeiitic series and calk alkaline series, which shows that contents of $Fe_2O_3$ are higher in stream sediments than rocks. According to variation diagram of $SiO_2$ versus $(K_2O+Na_2O),$ stream sediments are plotted on subalkaline series. Contents range of trace and rare earth elements for stream sediments in the Gwangiu area are Ba$590\~2170$ppm, Be1\~2.4$ppm, Cu$13\~79$ppm, Nb$20\~34$ppm, Ni$10\~50$ppm, Pb$17\~30$ppm, Sr$70\~1025$ ppm, V$42\~135$ppm, Zr$45\~171$ppm, Li$19\~77$ppm, Co$4.3\~19.3$ppm, Cr$28\~131$ppm, Cs$3.1\~17.6$ppm, Hf$5\~27.6$ppm, Rb$388\~202$ppm, Sb$0.2\~l.2$ ppm, Sc$6.4\~17$ppm, Zn$47\~389$ppm, Pa$8.8\~68.8$ppm, Ce$62\~272$ppm, Eu$1\~2.7$ppm and Yb$0.9\~6$ppm.

Characterization of SWCNT Field Effect Transistor via Edison Simulation

  • Piao, Mingxing;Lee, Sang-Jin;Na, In-Yeob
    • Proceeding of EDISON Challenge
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    • 2013.04a
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    • pp.260-263
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    • 2013
  • A semiconducting single-walled carbon nanotube (SWCNT) field-effect transistor (FET) in a top-gate model was constructed. The effect of different high-${\kappa}$ dielectric materials ($Al_2O_3$, $HfO_2$ and HfSiON) and various temperatures with a wide range from 50K to 500K on the performance of such nominal device were investigated. Several key device parameters including the on/off ratio of the current, transconductance ($g_m$), subthreshold swing, and carrier mobility were used to evaluate the device performance. The simulated results fit well with the experiment results previously published.

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Application of Surfactant added DHF to Post Oxide CMP Cleaning Process (계면활성제가 첨가된 DHF의 Post-Oxide CMP 세정 공정에의 적용 연구)

  • Ryu, Chung;Kim, You-Hyuk
    • Journal of the Korean Chemical Society
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    • v.47 no.6
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    • pp.608-613
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    • 2003
  • In order to remove particles on surface of post-oxide CMP wafer, new cleaning solution was prepared by mixing with DHF (Diluted HF), nonionic surfactant PAAE (Polyoxyethylene Alkyl Aryl Ether), DMSO (Dimethylsulfoxide) and D.I.W.. Silicone wafers were intentionally contaminated by silica, alumina and PSL (polystylene latex) which had different zeta potentials in cleaning solution. This cleaning solution under megasonic irradiation could remove particles and metals simultaneously at room temperature in contrast to traditional AMP (mixture of $NH_4OH,\;H_2O_2$ and D.I.W) without any side effects such as increasing of microroughness, metal line corrosion and deposition of organic contaminants. This suggests that this cleaning solution would be useful future application with copper CMP in brush cleaning process as well as traditional post CMP cleaning process.

Occurrence and Chemical Composition of W-Bearing Rutile from the Unsan Au Deposit (운산 금 광상에서 산출되는 함 텅스텐 금홍석의 산상과 화학조성)

  • Yoo, Bong Chul
    • Korean Journal of Mineralogy and Petrology
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    • v.33 no.2
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    • pp.115-127
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    • 2020
  • The Unsang gold deposit has been one of the three largest deposits (Daeyudong and Kwangyang) in Korea. The deposit consists of Au-bearing quartz veins filling fractures along fault zones in Precambrian metasedimentary rock and Jurassic Porphyritic granite, which suggests that it might be an orogenic-type. Based on its mineral assemblages and quartz textures, quartz veins are classified into 1)galena-quartz, 2)pyrrhotite-quartz, 3)pyrite-quartz, 4)pegmatic quartz, 5)muscovite-quartz, and 6)simple quartz vein types. The pyrite-quartz vein type we studied shows the following alteration features: sericitization, chloritization, and silicification. The quartz vein contains minerals including white quartz, white mica, chlorite, pyrite, rutile, calcite, monazite, zircon, and apatite. Rutile with euhedral or medium aggregate occur at mafic part from laminated quartz vein. Two types of rutile are distinguishable in BSE image, light rutile is texturally later than dark rutile. Chemical composition of rutile has 89.69~98.71 wt.% (TiO2), 0.25~7.04 wt.% (WO3), 0.30~2.56 wt.% (FeO), 0.00~1.71 wt.% (Nb2O5), 0.17~0.35 wt.% (HfO2), 0.00~0.30 wt.% (V2O3), 0.00~0.35 wt.% (Cr2O3) and 0.04~0.25 wt.% (Al2O3), and light rutile are higher WO3, Nb2O5 and FeO compared to the dark rutile. It indicates that dark rutile and light rutile were formed at different stage. The substitution mechanisms of dark rutile and light rutile are suggested as followed : dark rutile [(V3+, Cr3+) + (Nb5+, Sb5+) ↔ 2Ti4+, 4Cr3+ (or 2W6+) ↔ 3Ti4+ (W6+ ↔ 2Cr3+), V4+ ↔ Ti4+], light rutile [2Fe3+ + W6+ ↔ 3Ti4+, 3Fe2+ + W6+ ↔ Ti4+ + (V3+, Al3+, Cr3+) +Nb5+], respectively. While the dark rutile was formed by cations including V3+, V4+, Cr3+, Nb5+, Sb5+ and W6+ by regional metamorphism of hostrock, the postdating light rutile was formed by redistribution of cations from predating dark rutile and addition of Fe2+ and W6+ from Au-bearing hydrothermal fluid during ductile shear.

Geochemical Characteristics of Soils and Sediments at the Narim Mine Drainage, Korea: Dispersion, Enrichment and Origin of Heavy Metals (나림광산 수계의 토양과 퇴적물에 관한 지구화학적 특성: 중금속 원소의 분산, 부화 및 기원)

  • Lee, Chan Hee;Lee, Hyun Koo;Lee, Jong Chang
    • Economic and Environmental Geology
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    • v.31 no.4
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    • pp.297-310
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    • 1998
  • Geochemical characteristics of environmental toxic elements at the Narim mine area were investigated on the basis of major, minor, rare earth element geochemistry and mineralogy. Ratios of $Al_2O_3/Na_2O$ and $K_2O/Na_2O$ in soils and sediments range from 11.57 to 22.21 and from 1.86 to 3.93, and are partly negative and positive correlation against $SiO_2/Al_2O_3$ (3.41 to 4.78), respectively. These suggested that sediment source of host granitic gneiss could be due to rocks of high grade metamorphism originated by sedimentary rocks. Characteristics of some trace and rare earth elements of V/Ni (0.33 to 1.95), Ni/Co (2.00 to 6.50), Zr/Hf (11.27 to 53.10), La/Ce (0.44 to 0.55), Th/Yb (4.07 to 7.14), La/Th (2.35 to 3.93), $La_N/Yb_N$ (6.58 to 13.67), Co/Th (0.63 to 2.68), La/Sc (3.29 to 5.94) and Sc/Th (0.49 to 1.00) are revealed a narrow range and homogeneous compositions may be explained by simple source lithology. Major elements in all samples are enriched $Al_2O_3$, MgO, $TiO_2$ and LOI, especially $Fe_2O_3$ (mean=7.36 wt.%) in sediments than the composition of host granitic gneiss. The average enrichment indices of major and rare earth elements from the mining drainage are 2.05 and 2.91 of the sediments and are 2.02 and 2.60 of the soils, normalizing by composition of host granitic gneiss, respectively. Average composition (ppm) of minor and/or environmental toxic elements in sediments and soils are Ag=14 and 1, As=199 and 14, Cd=22 and 1, Cu=215 and 42, Pb=1770 and 65, Sb=18 and 3, Zn=3333 and 170, respectively, and extremely high concentrations are found in the subsurface sediments near the ore dump. Environmental toxic elements were strongly enriched in all samples, especially As, Cd, Cu, Pb, Sb and Zn. The level of enrichment was very severe in mining drainage sediments, while it was not so great in the soils. Based on the EPA value, enrichment index of toxic elements is 8.63 of mining drainage sediments and 0.54 of soils on the mining drainage. Mineral composition of soils and sediments near the mining area were partly variable being composed of quartz, mica, feldspar, amphibole, chlorite and clay minerals. From the gravity separated mineralogy, soils and sediments are composed of some pyrite, arsenopyrite, chalcopyrite, sphalerite, galena, goethite and various hydroxide minerals.

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나노 스케일 Oxides박막의 전처리방법에 따른 XRR 특성 변화

  • Bin, Seok-Min;Yu, Byeong-Yun;Park, Jae-Hwan;Kim, Chang-Su;O, Byeong-Seong;Choe, Yong-Dae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.199-199
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    • 2010
  • XRR(X-ray reflectometry)은 나노 스케일 박막의 두께를 측정하는 유망한 도구로 인식되고 있고, XRR측정 결과의 신뢰성을 향상시키기 위하여 많은 연구가 이루어지고 있다. 본 연구에서는 나노 스케일 박막 두께의 정확한 측정을 위해 Si기판 위에 성장시킨 $HfO_2$, $Al_2O_3$, $Ta_2O_5$의 산화물 박막에 대하여 여러 가지 전처리 조건을 변화시켜 조건에 따른 반사율 곡선의 변화와 분석 결과를 살펴보았다. 샘플의 전처리에는 acetone, sulfuric acid, methanol, 초음파세척기를 이용하였고, 전처리가 끝난 후 샘플에 남아있는 수분기를 제거하기 위하여 약 $150^{\circ}C$의 온도로 가열 후 측정비교 분석하였다. 전처리 시 solution과 시간 등의 전처리 조건이 변화함에 따라 X-선 반사율 곡선의 변화가 있음을 알 수 있었고, 이에 따라 XRR 측정 분석 시 두께에 영향을 받았으며, TEM과 XPS를 이용하여 전처리 영향에 대하여 비교 분석 하였다. 이번 연구를 통하여 전처리 방법에 따라 XRR 측정에 정확성을 향상 시킬 수 있는 있는 것으로 보여진다.

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Difluoromethane Synthesis over Fluorinated Metal Oxide (불화된 금속산화물 촉매상에서 이불화메탄의 합성)

  • Lee, Youn-Woo;Lee, Kyong-Hwan;Lim, Jong Sung;Kim, Jae-Duck;Lee, Youn Yong
    • Applied Chemistry for Engineering
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    • v.9 no.5
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    • pp.619-623
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    • 1998
  • The influences of reaction temperature, HF/DCM mole ratio, contact time and catalyst type on activity and selectivity of difluoromethane synthesis via hydrofluoriation of dichloromethane over fluorinated catalyst have been studied. It has been found that fluorinated $Cr/Al_2O_3$ catalysts, show better performance compared to pure fluorinated $Al_2O_3$ catalyst and then, non-treated catalysts demonstrate better than catalysts pretreated with hydrogen and air. The results show that the optimum reaction conditions are found as follows : reaction temperature at $340^{\circ}C$, mole ratio of HF/DCM 5 or above and contact time 20 sec. or above. With these conditions the maximum attainable yield of difluoromethane has been found to be greater than 80%. In particular, the activity and the selectivity of difluoromethane do not change with the reaction time on stream up to 8 hours.

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용액 공정을 이용한 High-k 게이트 절연막을 갖는 고성능 InGaZnO Thin Film Transistors의 전기적 특성 평가

  • So, Jun-Hwan;Park, Seong-Pyo;Lee, In-Gyu;Lee, Gi-Hun;Sin, Geon-Jo;Lee, Se-Won;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.339-339
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    • 2012
  • 지난 몇 년 동안, 투명 비정질 산화물 반도체는 유기 발광 다이오드, 플렉서블 전자 소자, 솔라 셀, 바이오 센서 등 많은 응용분야에 연구되고 있다. 투명 비정질 산화물 반도체 그룹들 중, 특히 비정질 IGZO 박막 트랜지스터는 비정질 상태임에도 불구하고 높은 이동도와 낮은 동작 전압으로 훌륭한 소자 특성을 보인다. 이러한 고성능의 IGZO 박막 트랜지스터는 RF 마그네트론 스퍼터링이나 pulsed laser deposition과 같은 고진공 장비를 이용하여 이미 여러 그룹에서 제작되고 발표되었다. 하지만 진공 증착 시스템은 제조 비용의 절감이나 디스플레이 패널의 대면적화에 큰 걸림돌이 되고 있고, 이러한 문제점을 극복하기 위해서 용액 공정은 하나의 해결책이 될 수 있다. 용액 공정의 가장 큰 장점으로는 저온 공정이 가능하기 때문에 글라스나 플라스틱 기판에서 대면적으로 제작할 수 있고 진공 장비가 필요없기 때문에 제조 비용을 획기적으로 절감시킬 수 있다. 본 연구에서는 high-k 게이트 절연막과 IGZO 채널 층을 용액 공정을 이용하여 박막 트랜지스터를 제작하고 그에 따른 전기적 특성을 분석하였다. IGZO의 몰 비율은 In, Ga, Zn 순으로 각각 0.2 mol, 0.1 mol, 0.1 mol로 제작하였고, high-k 게이트 절연막으로는 Al2O3, HfO2, ZrO2을 제작하였다. 또한, 용액 공정 IGZO TFT를 제작하기 전, 용액 공정 high-k 게이트 절연막 캐패시터를 제작하여 그 특성을 분석하였다. 다양한 용액 공정 high-k 게이트 절연막 중, 용액공정 HfO2를 이용한 IGZO TFT는 228.3 [mV/dec]의 subthreshold swing, 18.5 [$cm^2/V{\cdot}s$]의 유효 전계 이동도, $4.73{\times}106$의 온/오프 비율을 보여 매우 뛰어난 전기적 특성을 확인하였다.

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