• Transactions on Electrical and Electronic Materials
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• v.13 no.1
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• Bulletin of the Korean Chemical Society
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• v.32 no.10
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• pp.3735-3737
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• 2011

We report a simple method for fabricating ZnO gas sensors via a sonochemical route and their $H_2$ gas sensing properties. Vertically aligned ZnO nanorod arrays as a sensing material were synthesized on a Pt-electrode patterned alumina substrate under ambient conditions. The advantage of the proposed method is a high speed of processing. The gas sensor based on ZnO nanorod arrays with large specific surface area showed a high response to $H_2$ and a detection limit of 70 ppm at $250^{\circ}C$. Also, their response and recovery time were relatively short and a complete regeneration was observed. A mechanism for sensing $H_2$ gas on the surface of ZnO nanorods is proposed.

• Korean Journal of Materials Research
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• v.21 no.4
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• pp.207-211
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• 2011

Ni 8 wt.%-doped tin oxide ($SnO_2$) thick films were fabricated into gas sensors by the method of screen printing onto alumina substrates. The particle size of $SnO_2$ was controlled by changing the ball-mill time between 0~120 h. The structural and morphological properties of these thick films were investigated using X-ray diffraction and scanning electron microscopy. The structural properties of $SnO_2$ powders showed a tetragonal phase with (110) dominant orientation. The particle size of the $SnO_2$:Ni powders after ball-mill of 120 h was about 0.05 ${\mu}m$. The gas sensitivity (S = Rg/Ra) to 5 ppm $CH_4$ gas and $CH_3CH_2CH_3$ gas was measured at room temperature by comparing the resistance in air (Ra) with that of the target gases (Rg). The sensitivity of the $SnO_2$ gas sensors was enhanced by increasing the ball-mill time. There was an association between the sensitivity of both the $CH_4$ gas and the $CH_3CH_2CH_3$ gas and the particle size of the $SnO_2$. $SnO_2$ gas sensors prepared by 72 h ball-mill showed a sensitivity of about 13 to 5 ppm $CH_4$ gas and $CH_3CH_2CH_3$ gas. The response time of the $SnO_2$:Ni gas sensors to the $CH_4$ gas was about 20 seconds.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.2
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• pp.91-95
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• 2012

ZnO thin films were deposited on p-type 4H-SiC substrate by pulsed laser deposition. ZnO nanowires were formed on p-type 4H-SiC substrate by furnace. Ti/Au electrodes were deposited on ZnO thin film/SiC and ZnO nanowire/SiC structures, respectively. Structural and crystallographical properties of the fabricated ZnO thin film/SiC and ZnO nanowire/SiC structures were investigated by field emission scanning electron microscope and X-ray diffraction. In this work, resistance and sensitivity of ZnO thin film/SiC gas sensor and ZnO nanowire/SiC gas sensor were measured at $300^{\circ}C$ with various CO gas concentrations (0%, 90%, 70%, and 50%). Resistance of gas sensor decreases at CO gas atmosphere. Sensitivity of ZnO nanowire/SiC gas sensor is twice as big as sensitivity of ZnO thin film/SiC gas sensor.

• Journal of Sensor Science and Technology
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• v.23 no.3
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• pp.207-210
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• 2014

$TiO_2$ oxide semiconductor is being widely studied in various applications such as photocatalyst and photosensor. Pd/$TiO_2$ gas sensor is mainly used to detect $H_2$, CO and ethanol. This study focus on increasing hydrogen detection ability of Pd/$TiO_2$ in room temperature through Al-doping. Pd/$TiO_2$ was fabricated by the hydrothermal method. Contacting to Aluminum (Al) foil led to Al doping effect in Pd/$TiO_2$ by thermal diffusion and enhanced hydrogen sensing response. $TiO_2$ nanoparticles were sized at ~30 nm of diameter from scanning electron microscope (SEM) and maintained anatase crystal structure after Al doping from X-ray diffraction analysis. Presence of Al in $TiO_2$ was confirmed by X-ray photoelectron spectroscopy at 73 eV. SEM-energy dispersive spectroscopy measurement also confirmed 2 wt% Al in Pd/$TiO_2$ bulk. The gas sensing test was performed with $O_2$, $N_2$ and $H_2$ gas ambient. Pd/Al-doped $TiO_2$ did not response $O_2$ and $N_2$ gas in vacuum except $H_2$. Finally, the normalized resistance ratio ($R_{H2on}/R_{H2off}$) of Pd/Al-doped $TiO_2$ increases about 80% compared to Pd/$TiO_2$.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.7 no.2
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• pp.276-283
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• 1997

A dry impregnation method was used for preparing pellet type Pt/$SnO_2$ gas sensor. The crystal structure, direction of the crystal, crystal size and microstructure between the catalyst and the support ($SnO_2$) were characterized with electron diffraction analysis, transmission electron microscopy, scanning electron microscopy. The characterization indicates that when Pt/$SnO_2$ sample is calcined at $400^{\circ}C$, the Cl content associated with the Pt phase diminishes and the part of Pt is moved into $SnO_2$ support. This results in the enhancement of gas sensitivity. After the reactor with a Pt/$SnO_2$ sample was run with a flow rate of 30 sccm (a mixture of 0.5% $H_2$ in $_N2$) for a while, the resistance of $SnO_2$ was saturated, but the $SnO_2$ kept absorbing $H_2$ gas. This indicates that the surface state was saturated. For the 14 ppm $H_2$ gas, the sensitivity of Pt/$SnO_2$ devices was about 81% at an operating temperature of $300^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.37 no.1
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• pp.1-5
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• 2000

Cathodoluminescence(CL) properties of ZnO:Zn green phosphor were investigated. ZnO:Zn phosphor was synthesized by varying reducing agents and firing temperatures. ZnS, charcoal and 5% H2 gas mixed with 95% N2 gas(5H2-95N2) were used as the reducing agent and atmosphere. The highest CL intensity of ZnO:Zn phosphor was observed under the condition of 5H2-95N2 atmosphere and firing temperature of 90$0^{\circ}C$ for 1h. Charocal and ZnO as reducing agents in the syntehsis of ZnO:Zn phosphor exhibited about 60% and 40%, respectively, of the CL intensity obtained with 5H2-95N2 atmosphere.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1304-1307
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• 1997

A hydrogen gas sensor utilizing Pt/$SnO_2$ system was fabricated by the pressed pellet method. The crystal structure, direction of the crystal, crystal size and microstructure between the catalyst and the support ($SnO_2$) were characterized with Electron Diffraction Analysis, Transmission Electron Microscopy, Scanning Electron Microscopy. After the reactor with a Pt/$SnO_2$ sample was run with a flow rate of 30sccm (a mixture of $0.5%H_2$ in $N_2$) for a while, the resistance of $SnO_2$ was saturated, but the $SnO_2$ kept absorbing $H_2$ gas. $H_2$ gas sensing properties of Pt/$SnO_2$ were investigated at several temperatures. As a result, it was observed that Pt/$SnO_2$ has high sensitivity at $300^{\circ}C$ and $400^{\circ}C$.

• Journal of the Korean institute of surface engineering
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• v.50 no.4
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• pp.296-300
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• 2017

NiO nanofibers with Au nanoparticles were synthesized by sol-gel and electrospinning techniques, in which the reduction process by ultraviolet exposure is included for the growth of Au nanoparticles in the electrospinning solution. FE-SEM(Field Emission Scanning Electron Microscopy), TEM(Transmission Electron Microscopy) revealed that the synthesized nanofibers had the diameter of approximately 200 nm. X-ray diffraction showed the successful formation of Au-decorated NiO nanofibers. Gas sensing tests of Au-decorated NiO nanofibers were performed using reducing gases of CO, and $C_6H_6$, $C_7H_8$, $C_2H_5OH$. Compared to as-synthesized NiO nanofibers, the response of Au-loaded NiO nanofibers to CO gas was found to be about 3.4 times increased. On the other hand, the response increases were only 1.1-1.3 times for $C_6H_6$, $C_7H_8$, and $C_2H_5OH$.

• Journal of Sensor Science and Technology
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• v.30 no.6
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• pp.376-380
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• 2021

The accurate detection of hydrogen gas molecules is considered to be important for industrial safety. However, the selective detection of the gas using semiconductive metal oxides (SMOs)-based sensors is challenging. Here, we describe the fabrication of H₂ sensors in which a nanocellulose/graphene oxide (GO) hybrid membrane is attached to SnO₂ nanosheets (NSs). One-dimensional (1D) nanocellulose fibrils are attached to the surface of GO NSs (GONC membrane) by mixing GO and nanocellulose in a solution. The as-prepared GONC membrane is employed as a sacrificial template for SnO₂ NSs as well as a molecular sieving membrane for selective H₂ filtration. The combination of GONC membrane and SnO₂ NSs showed substantial selectivity to hydrogen gas (R_air / R_gas > 10 @ 0.8 % H₂, 100 ℃) with noise level responses to interfering gases (H₂S, CO, CH₃COCH₃, C₂H₅OH, and NO₂). These remarkable sensing results are attributed mainly to the molecular sieving effect of the GONC membrane. These results can facilitate the development of a highly selective H₂ detector using SMO sensors.