• Title/Summary/Keyword: $H_2$ sensor

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Development of a MEMS-based H2S Sensor with a High Detection Performance and Fast Response Time

  • Dong Geon Jung;Junyeop Lee;Dong Hyuk Jung;Won Oh Lee;Byeong Seo Park;Daewoong Jung
    • Journal of Sensor Science and Technology
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    • v.32 no.4
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    • pp.207-212
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    • 2023
  • H2S is a toxic and harmful gas, even at concentrations as low as hundreds of parts per million; thus, developing an H2S sensor with excellent performance in terms of high response, good selectivity, and fast response time is important. In this study, an H2S sensor with a high response and fast response time, consisting of a sensing material (SnO2), an electrode, a temperature sensor, and a micro-heater, was developed using micro-electro-mechanical system technology. The developed H2S sensor with a micro-heater (circular type) has excellent H2S detection performance at low H2S concentrations (0-10 ppm), with quick response time (<16 s) and recovery time (<65 s). Therefore, we expect that the developed H2S sensor will be considered a promising candidate for protecting workers and the general population and for responding to tightened regulations.

A Fluorescent Sensor Film for Detecting pH of Acidic Solutions (산성 용액의 pH를 감지할 수 있는 형광 센서막)

  • Min, Jae Young;Kim, Hyung Jin
    • Journal of the Korean Chemical Society
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    • v.64 no.2
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    • pp.74-78
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    • 2020
  • A push-pull conjugated dye (DCMP) was covalently immobilized on a silanized glass surface to produce a high sensitivity pH sensor film for operating in the acidic region. A pH-sensitive sensor film was prepared by photo-initiating copolymerization of a modified DCMP (DCMA), 2-hydroxyethyl methacrylate (HEMA) and triethylene glycol dimethacrylate on the silanized glass surface. The absorbance of the sensor film increased with increasing pH between pH 2.0 and 5.0, and the fluorescence intensity of the film also increased about 50 times with increasing pH in the same pH range. The sensor film was reversible and reproducible under acidic conditions. The sensor film showed a relatively short response time between 20-50 seconds and high selectivity for proton in the presence of various metal ions.

H2S Micro Gas Sensor Based on a SnO2-CuO Multi-layer Thin Film

  • Kim, Sung-Eun;Choi, Woo-Chang
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.1
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    • pp.27-30
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    • 2012
  • This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

Optimization of SnO2 Based H2 Gas Sensor Along with Thermal Treatment Effect (열처리 효과에 따른 SnO2 기반 수소가스 센서의 특성 최적화)

  • Jung, Dong Geon;Lee, Junyeop;Kwon, Jinbeom;Maeng, Bohee;Kim, Young Sam;Yang, Yi Jun;Jung, Daewoong
    • Journal of Sensor Science and Technology
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    • v.31 no.5
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    • pp.348-352
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    • 2022
  • Hydrogen gas (H2) which is odorless, colorless is attracting attention as a renewable energy source in varions applications but its leakage can lead to disastrous disasters, such as inflammable, explosive, and narcotic disasters at high concentrations. Therefore, it is necessary to develop H2 gas sensor with high performance. In this paper, we confirmed that H2 gas detection ability of SnO2 based H2 gas sensor along with thermal treatment effect of SnO2. Proposed SnO2 based H2 gas sensor is fabricated by MEMS technologies such as photolithgraphy, sputtering and lift-off process, etc. Deposited SnO2 thin films are thermally treated in various thermal treatement temperature in range of 500-900 ℃ and their H2 gas detection ability is estimatied by measuring output current of H2 gas sensor. Based on experimental results, fabricated H2 gas sensor with SnO2 thin film which is thermally treated at 700 ℃ has a superior H2 gas detection ability, and it can be expected to utilize at the practical applications.

Development of single walled-carbon nanotubes based pH sensor using ultra-precision spray method (초정밀 스프레이 방법을 이용한 단일벽 탄소나노튜브 pH센서 개발)

  • Kwon, Jae-Hong;Lee, Kyong-Soo;Lee, Yun-Hi;Ju, Byeong-Kwon
    • Journal of Sensor Science and Technology
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    • v.15 no.2
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    • pp.127-133
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    • 2006
  • Recent studies demonstrated the ability of carbon nanotube (CNT) to promote electron transfer reactions of important compounds and to impart higher stability onto electrochemical sensors. CNT-based sensors measured by hydroxyl radical concentration or pH value suggest great promise for biosensors. This paper describes a new method for fabricating a very simple and inexpensive pH sensor compose of single walled-carbon nanotubes (SW-CNTs) using an ultra-precision spray. CNT-based sensor shows pH sensitivity in buffer solution at different pH range. Our experimental results show the sensor responses to pH buffer solution and the conductance of depends on the pH values. These results support application possibility of SW-CNTs based pH sensor for mass production.

Detection of Food-Grade Hydrogen Peroxide by HRP-Biocomposite Modified Biosensors

  • Chang, Seung-Cheol
    • Journal of Food Hygiene and Safety
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    • v.32 no.6
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    • pp.447-454
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    • 2017
  • A new amperometric biosensor has been developed for the detection of hydrogen peroxide ($H_2O_2$). The sensor was fabricated through the one-step deposition of a biocomposite layer onto a glassy carbon electrode at neutral pH. The biocomposite, as a $H_2O_2$ sensing element, was prepared by the electrochemical deposition of a homogeneous mixture of graphene oxide, aniline, and horseradish peroxidase. The experimental results clearly demonstrated of that the sensor possessed high electrocatalytic activity and responded to $H_2O_2$ with a stable and rapid manners. Scanning electron microscopy, cyclic voltammetry, and amperometry were performed to optimize the characteristics of the sensor and to evaluate its sensing chemistry. The sensor exhibited a linear response to $H_2O_2$ in the range of 10 to $500{\mu}M$ concentrations, and its detection limit was calculated to be $1.3{\mu}M$. The proposed sensing-chemistry strategy and the sensor format were simple, cost-effective, and feasible for analysis of "food-grade $H_2O_2$" in food samples.

The H2 and H2S sensing characteristics of Pd and Pd-Rh gate MOS sensor (Pd 및 Pd-Rh 게이트 MOS센서의 수소 및 황화수소가스에 대한 검지특성)

  • Lee, Chang-Hee;Park, Chong-Ook
    • Journal of Hydrogen and New Energy
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    • v.8 no.4
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    • pp.145-154
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    • 1997
  • The $H_2$ and $H_2S$ sensing characteristics of Pd and Pd-Rh gate MOS sensor and the effect of Pd deposition condition on the hydrogen sensing performance of Pd gate MOS sensor was investigated. The increase of rf power and deposition temperature led to the decrease in the sensitivity and the initial response rate. The deposition temperature gave more effects on the decrease of the sensitivity and the initial response rate than the rf power. The sensitivity of Pd-Rh sensor gave better performance than pure Pd sensor. As the concentration of Rh in the gate increased, the sensitivity decreased. For Pd-Rh sensor, the sensitivity to $H_2$ was higher than that to $H_2S$. It was demonstrated that rf power, deposition temperature had an important role in the sensor performance.

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Characteristics Improvement of a FET-Type Glucose Sensor and Its Application to a Glucose Meter (FET형 포도당센서의 특성개선과 이를 이용한 포도당측정기 개발)

  • Lee, C.H.;Choi, S.B.;Lee, Y.C.;Seo, H.I.;Sohn, B.K.
    • Journal of Sensor Science and Technology
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    • v.7 no.4
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    • pp.271-278
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    • 1998
  • A ISFET-based glucose sensor has inherent problems such as low sensitivity, drift effect and long response time. For that reason, a amperometric actuation technique was introduce to make a highly sensitivity of the ISFET glucose sensor with a Pt actuator, which electrolyzes $H_2O_2$, one of the by a by-products of the oxidation reaction of glucose. Moreover, a potential-step measurement method detecting response by only the electrolysis of $H_2O_2$ was developed for eliminating a drift problem. The operation characteristics of ISFET-based glucose sensor was improved by using the amperometric actuation and a measurement techniques. The fabricated ISFET glucose sensor is shown good operation such as characteristics(30mM PBS, about 26mV/decade) and linearity. A portable glucose meter with a highly resolution by using the fabricated ISFET-based glucose sensor with Pt actuation was developed and its characteristics investigated.

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pH Sensor Application of Printed Indium-Tin-Oxide Nanoparticle Films (Indium-Tin-Oxide 나노입자 인쇄박막의 pH sensor 응용에 대한 연구)

  • Lee, Changhan;Noh, Jaeha;An, Sangsu;Lee, Sangtae;Seo, Dongmin;Lee, Moonjin;Chang, Jiho
    • Journal of Sensor Science and Technology
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    • v.31 no.2
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    • pp.85-89
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    • 2022
  • We investigated a pH sensor using an Indium tin oxide (ITO) nanoparticle (NP) film printed on a flexible substrate. First, the printing precision and mechanical stability of the ITO-printed film were investigated. In particular, the factors that influence the crystallinity of ITO films were studied using X-ray diffraction pattern analysis. The response of the ITO pH sensor was calibrated using a series of standard pH solutions (pH 3-11). The pH values of various specimens were measured using an ITO pH sensor, and the results were compared with those of various pH measurement methods. As a result of the experiment, the maximum error was approximately ± 0.04 pH (0.4 %) at pH 9, which indicated that the ITO pH sensor is highly suitable for pH measurement. Finally, we used the ITO pH sensor to the measure of general specimens such as solvents and beverages and compared the results in comparison with those obtained from several conventional methods.

Development of a Hydrogen Peroxide Sensor Based on Palladium and Copper Electroplated Laser Induced Graphene Electrode (PdCu를 전기 도금한 레이저 유도 그래핀 전극 기반의 과산화수소 측정 센서 개발)

  • Park, Daehan;Han, Ji-Hoon;Kim, Taeheon;Pak, Jungho
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.67 no.12
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    • pp.1626-1632
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    • 2018
  • In this paper, we describe the fabrication and characterization of a hydrogen peroxide ($H_2O_2$) sensor based on palladium and copper (PdCu) electroplated laser induced graphene (LIG) electrodes. $CO_2$ laser was used to form LIG electrodes on a PI film. This fabrication method allows simple control of the LIG electrode size and shape. The PdCu was electrochemically deposited on the LIG electrodes to improve the electrocatalytic reaction with $H_2O_2$. The electrochemical performance of this sensor was evaluated in terms of selectivity, sensitivity, and linearity. The physical characterization of this sensor was conducted using scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS), which confirmed that PdCu was formed on the laser induced graphene electrode. In order to increase the sensor sensitivity, the Pd:Cu ratio of the electroplated PdCu was varied to five different values and the condition of highest amperometric current at an identical of $H_2O_2$ concentration was chosen among them. The resulting amperometric current was highest when the ratio of Pd:Cu was 7:3 and this Pd;Cu ratio was employed in the sensor fabrication. The fabricated PdCu/LIG electrode based $H_2O_2$ sensor exhibited a sensitivity of $139.4{\mu}A/mM{\cdot}cm^2$, a broad linear range between 0 mM and 16 mM of $H_2O_2$ concentrations at applied potential of -0.15 V, and high reproducibility (RSD = 2.6%). The selectivity of the fabricated sensors was also evaluated by applying ascorbic acid, glucose, and lactose separately onto the sensor in order to see if the sensor ourput is affected by one of them and the sensor output was not affected. In conclusion, the proposed PdCu/LIG electrode based $H_2O_2$ sensor seems to be suitable $H_2O_2$ sensor in various applications.