• 한국전기전자재료학회논문지
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• 제16권5호
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• pp.390-396
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• 2003

As the design rule of device continued to shrink, the contact resistance in small contact size became important. Although the conventional TiN/Ti structure as a ohmic layer has been widely used, we propose a new TiN/Co film structure. We characterized a contact resistance by using a chain pattern and a KELVIN pattern, and a leakage current determined by current-voltage measurements. Moreover, the microstructure of TiN/ Ti/ silicide/n$\^$+/ contact was investigated by a cross-sectional transmission electron microscope (TEM). The contact resistance by the Co ohmic layer showed the decrease of 26 % compared to that of a Ti ohmic layer in the chain resistance, and 50 ％ in KELYIN resistance, respectively. A Co ohmic layer shows enough ohmic behaviors comparable to the Ti ohmic layer, while higher leakage currents in wide area pattern than Ti ohmic layer. We confirmed that an uniform silicide thickness and a good interface roughness were able to be achieved in a CoSi$_2$ Process formed on a n$\^$+/ silicon junction from TEM images.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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• pp.308-311
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• 1999

The varistor characteristics of $ZnO-Pr_6O_11-CoO-Er_2O_3$-based ceramics were investigated. $ZnO-Pr_6O_11-CoO-Er_2O_3$-based ceramics were sintered at $1300^{\circ}C$ and $1350^{\circ}C$in the addition range 0.0~2.0mol% $Er_2O_3$, respectively. $ZnO-Pr_6O_11-CoO-Er_2O_3$-based ceramics, which are added with 0.5mol% $Er_2O_3$ at $1300^{\circ}C$ and l.Omol% $Er_2O_3$ at $1350^{\circ}C$ sintering temperature, exhibited the bestexcellent varistor characteristics, namely, the nonlinear exponent was better 52.78 at $1300^{\circ}C$ thanat 13$1350^{\circ}C$ and the leakage current was better 6.57$\mu\textrm$A at $1350^{\circ}C$ than at $1300^{\circ}C$. Consequently, it is estimated that $ZnO-Pr_6O_11-CoO-Er_2O_3$-based ceramics, which $Er_2O_3$ is added in the range 0.5~l.Omol% will begin to be used as a predominant basic composition of $PR_6O_11$-based ZnO varistors.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.166-166
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• 2003

Si (100) 기판위에서 에피텍셜하게 자란 CoSi$_2$층은 우수한 열적안정성, 낮은 junction leakage, ultra-Shallow junction형성 등의 장점으로 인하여 많은 주목을 받아왔다. 그래서 에피텍셜 CoSi$_2$층을 형성하기 위한 많은 방법들이 보고되어 왔다. 그 방법으로는 Ti나 TiN층을 이용한 interlayer mediated epitaxy, Co의 제한적 공급을 통한 molecular beam epitaxy와 molecular beam allotaxy, 그리고 금속유기소스를 이용한 반응성화학기상증착법등이 있다. 하지만 이 방법들은 복잡한 증착공정과 열처리 후 잔류층 제거의 어려움등을 가지고 있다. 본 연구는 일반적으로 사용되는 Ti나 oxide의 중간층없이 에피층을 형성시키는 새로운 방법으로 CO-O-N 박막으로부터 열처리에 의해 확산된 Co로부터 CoSi$_2$에피층을 형성시켰다.

• 터널과지하공간
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• 제18권3호
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• pp.175-184
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• 2008

본 고에서는 온실가스 감축방안으로 배출 $CO_2$를 지하심부에 격리 저장시키는 지중 저장기술의 국내외 기술동향을 살펴보고 지반 및 암반공학적 관련기술로서 $CO_2$ 주입에 따른 대상지층의 역학적 안정성 및 누출경로 평가를 위한 열-수리-역학적 연계해석기술 및 적용사례, 기술개발요소를 소개하였다.

• 한국전기전자재료학회논문지
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• 제33권2호
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• pp.135-140
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• 2020

An experimental study was conducted using the tracking wheel test (IEC 62217) method for evaluating the performance of insulator materials, in particular ethylene propylene diene monomer (EPDM) and silicone rubber. In addition, we studied the tracking characteristics resulting from applying the same method for the shape of the insulator housing, that is, the performance of regular and alternating sheds. The evaluation parameters were leakage current, surface characteristics, SEM, EDX, hydrophobicity, and temperature distribution; likewise, we applied the commercial frequency dry (and wet) flashover voltage test. We found that the regular shed had a greater leakage current than the alternating shed and that the recovery of the hydrophobicity in terms of rest time was greater than that of the EPDM in terms of leakage current. All of the regular-shed insulators of silicone rubber had tracking traces and choking on the sheath parting line, while the alternating shed showed only choking at the interface but no tracking traces. Therefore, it can be concluded that the commercial frequency wet flashover voltage of the silicone rubber with regular shed before and after the tracking wheel test is higher than that of the alternating shed.

• 한국세라믹학회지
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• 제42권7호
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• pp.490-496
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• 2005

The electrical properties and stability of the varistors composed of ZnO-Pr$_{6}$O$_{11}$-CoO-Cr$_{2}$O$_{3}$-Dy$_{2}$O$_{3}$ system were investigated with sintering time in the range of 1$\~$3 h at 1350$^{\circ}C$ . As the sintering time was increased, the varistor voltage and leakage current increased, but the nonlinear exponent decreased. The varistors sintered for 1 h exhibited excellent nonlinearity, with a nonlinear exponent of 55.3 and a leakage current of 0.1 $\mu$A, whereas presented relatively low stability. The varistors sintered for 2 h exhibited not only high nonlinear exponent of 46.3, low leakage current of 0.3 $\mu$A, low dielectric dissipation factor of 0.0431, but also the highest stability, in which the variation rates of varistor voltage, nonlinear exponent, leakage current, dielectric constant, and dielectric dissipation factor were -3.0$\%$, -4.1$\%$, +3056.2$\%$, +5.1$\%$, and -12.5$\%$, respectively, after DC accelerated aging stress state of 0.95 V$_{1ma}$/150$^{\circ}C$/24 h. On the whole, the nonlinearity and stability of these varistors are greatly affected by the sintering time.

• 한국가스학회지
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• 제12권2호
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• pp.53-56
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• 2008

용접 부위의 결함을 비파괴적으로 탐지하기 위하여 홀센서에 의해 누설자속을 측정할 수 있는 시스템과 4 종류의 용접결함을 갖는 기준시편을 제작하였다. 제작한 시스템으로 시편에 생성시킨 4 종류의 결함에서 누설된 자속을 측정하였고, 신호의 피크-피크 크기와 피크-피크 간의 간격에서 결함의 종류를 구분할 수 있는 가능성을 확인하였다.

• 설비공학논문집
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• 제19권12호
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• pp.842-849
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• 2007

For a $CO_2$ two-stage twin rotary compressor used for heat pump water heater system, changes of $CO_2$ solubility in PAG oil were investigated along the gas passages from the first stage suction to final discharge. Only slight changes in solubility took place in suction chambers for both of the first and second stages, but for compression chambers, solubility variation ranged from 0.115 to 0.136, and from 0.133 to 0.182, respectively for the first and second stages. Calculation of gas flashing in parts of leakage oil flows and of oil contained in control volumes due to solubility changes was conducted and included in gas pressure calculation. For the second stage, gas flashing amounts to around $5%\sim6%$ for most leakage flows. Cooling capacity, compressor input, and COP obtained by calculation were well compared to the experimental results. Effects of operation speed on the compressor performance was also studied: as the shaft speed increased, adiabatic efficiency decreased rapidly due to increased over-compression loss.

• 마이크로전자및패키징학회지
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• 제14권1호
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• pp.27-31
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• 2007

휨성 유기박막트랜지스터(organic thin film transistor, OTFT)를 제작하기 위하여 게이트 절연막으로 PVP(poly-4-vinylphenol) 유기막을 이용하여 MIM (metal-insulator-metal) 구조의 캐패시터 소자를 제작하였다. 유기 절연층의 형성은 Al/PES (polyethersulfone) 기판과 ITO/Glass 기판 위에 PVP를 용질로, PGMEA(propylene glycol monomethyl ether acetate)를 용매로 사용하였다 또한 열경화성 수지인 poly(melamine-co-(ormaldehyde)를 사용하여 cross-linked PVP 절연막을 합성하여 스핀코팅법으로 소자를 형성하였다. 제작된 소자에 대해 절연막 두께와 기판 종류에 따른 전기적 특성을 조사한 결과 Al/PES 기판을 사용하였을때 누설전류는 1.3 nA로 ITO/glass 기판을 사용했을때의 27.5 nA보다 크게 개선되었다. 또한 제작된 모든 캐패시터 소자의 정전용량은 $1.0{\sim}1.2nF/cm^2$ 범위로 나타났으며 계산값과 매우 유사한 결과를 얻을 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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• pp.82-85
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• 2000

We introduce pulsed $CO_2$ laser power supply excited by half-wave rectified 60Hz AC discharge some advantage of cost and size compared to a typical pulsed power supply. AC frequency is adjusted from 10Hz to 60Hz to control laser output. In this laser, a low voltage open loop control for high voltage AC discharge circuits is employed to avoid the HV sampling or switching. The control is achieved by using a ZCS circuit and a PIC one-chip microprocessor that control the gate signal of SCR precisely. The pulse repetition rate is limited by 60Hz due to a high leakage inductance. The maximum laser output was obtained about 20W at the condition of total pressure, 18Torr and pulse repetition rate,60Hz.