• Membrane Journal
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• v.25 no.1
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• pp.27-31
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• 2015

PEBAX[poly(ether-block-amide)]-NaY zeolite composite membrane was studied on the permeability of penetrant $H_2$, $N_2$, $CO_2$ and $CH_4$ and the selectivity. When the NaY zeolite contents of PEBAX-NaY zeolite membranes were increased, the permeability of $H_2$ was increased, but the permeability of $N_2$, $CH_4$ and $CO_2$ was decreased. By the addition of NaY zeolite into PEBAX, the gas selectivity for $H_2$, $N_2$ and $CO_2$ was decreased except the increase of selectivity of $H_2/N_2$. $CO_2/N_2$, $H_2/CO_2$ and Gas/$CH_4$. The highest selectivity among these gases was from $CO_2$. In particular, the gas selectivity for $CO_2$ was the greatest with a value of 12~156.

• Membrane Journal
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• v.28 no.2
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• pp.105-112
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• 2018

In this study, PTMSP-GO composite membranes were prepared by the addition of GO (graphene oxide) into PTMSP [poly (1-trimethylsilyl-1-propyne)] having high gas permeability, to study of gaseous membrane using GO. Gas permeation properties for $N_2$, $CH_4$, $CO_2$ were investigated by increasing the amount of GO in the PTMSP. PTMSP-GO composite membranes had higher gas permeability in the order of $N_2$ < $CH_4$ < $CO_2$. The gas permeation tendency of $N_2$, $CH_4$, and $CO_2$ increased as the content of GO increased from 0 to 10 wt%, but the gas permeability decreased as increased from 10 to 30 wt%. In the range of low GO contents, the gas permeability decreased due to the decrease of diffusivity because GO acts as a barrier in the composite membrane, and the gas permeability increased due to the void at the interface above the content range. And $CO_2$ has an affinity with -COOH of GO, the selectivity ($CO_2/N_2$) and the selectivity ($CO_2/CH_4$) gradually increase with increasing GO content. And the selectivity($CO_2/N_2$) showed the highest selectivity at 10.6 for PTMSP-GO 10 wt% and the selectivity ($CO_2/CH_4$) showed the highest selectivity at 3.4 for PTMSP-GO 20 wt%. However, above a certain amount of GO, selectivity ($CO_2/N_2$) and selectivity ($CO_2/CH_4$) decreased because the coagulation phenomenon between GO was increased and the solubility effect of $CO_2$ decreased. The PTMSP-GO 20 wt% composite membrane exhibited enhanced gas permeation characteristics with increased $CO_2$ permeability and selectivity ($CO_2/CH_4$) over PTMSP membrane.

• Membrane Journal
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• v.28 no.4
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• pp.233-242
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• 2018

To study gas membrane using GO (graphene oxide), the PEBAX [poly(ether-block-amide)]-GO polymer composite membrane was prepared by adding GO to PEBAX. Through this composite membrane, gas permeation characteristics for $H_2$, $N_2$, $CH_4$, and $CO_2$ were studied. As a result of the gas permeation test, the permeability of $N_2$, $CH_4$, and $CO_2$ to PEBAX-GO composite membranes gradually decreased as the GO content increased. On the other hand, the gas permeability of $H_2$ increased with the increase of GO content, and it was 21.43 barrer at the GO content of 30 wt%, which was about 5 times higher than that of PEBAX membrane. This is because the GO was easier to operate with a fast and selective gas transport channel for $H_2$ than other gases. The increased selectivity ($H_2/N_2$) and selectivity ($H_2/CH_4$) were influenced by the diffusion selectivity by the permeate gas size. The increased selectivity ($CO_2/N_2$) and selectivity ($CO_2/CH_4$) were more influenced by the solubility selectivity due to the affinity of $CO_2$ and GO for -COOH.

• Journal of the Korean Society of Combustion
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• v.13 no.4
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• pp.47-53
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• 2008

The reaction mechanism of methane dry reforming has been investigated using an arc-jet reactor. The effects of input power, $CO_2/CH_4$ and added $O_2$ were investigated by product analysis, including CO, $H_2$, $C_{2}H_{Y}$ and $C_{3}H_{Y}$ as well as $CH_4$ and $CO_2$. In the process, input electrical power activated the reactions between $CH_4$ and $CO_2$ significantly. The increased feed ratio of the $CO_2$ to $CH_4$ in the dry reforming does not affect to the $CH_4$ conversion. but we could observe increase in CO selectivity together with decreasing $H_2$ generation. Added oxygen can also increase not only CO selectivity but also $CH_4$ conversion. However, hydrogen selectivity was decreased significantly due to a increased $H_{2}O$ formation.

• Membrane Journal
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• v.24 no.6
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• pp.423-430
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• 2014

PTMSP/LDH composite membranes were prepared by adding 0, 1, 3, and 5 wt% LDH contents to PTMSP. The gas permeability and selectivity for $H_2$, $N_2$, $CH_4$, $C_3H_8$, $n-C_4H_{10}$ were investigated as a function of LDH content. As LDH content of PTMSP/LDH composite membranes increased to 5 wt%, the gas permeability for $H_2$ and $N_2$ gradually decreased, while $n-C_4H_{10}$ permeability rapidly increased. The gas permeability for $CH_4$ and $C_3H_8$ was found to decrease for the membranes with LDH content range of 0~3 wt%, however increase in the range of 3~5 wt%. As LDH content of PTMSP/LDH composite membranes increased to 5 wt%, the selectivity of membranes gradually increased for $H_2$, $N_2$, $CH_4$, $C_3H_8$, $n-C_4H_{10}$ over $H_2$, $N_2$. However the selectivity for $C_3H_8$ and $n-C_4H_{10}$ over $CH_4$ increased in the range of LDH content 0~3 wt% but decreased in the range of 3~5 wt%. The $CH_4$ and $n-C_4H_{10}$ selectivity over $H_2$ and $N_2$ increased as $CH_4$ and $n-C_4H_{10}$ permeability increased. The $n-C_4H_{10}$ selectivity over $CH_4$ increased with increasing $n-C_4H_{10}$ permeability up to 182,000 barrer and decreased above 182,000 barrer of $n-C_4H_{10}$ permeability. The $C_3H_8$ selectivity over $H_2$ and $N_2$ was found to decrease as the $C_3H_8$ permeability increased from 46,000 to 50,000 barrer, but to increase with increasing permeability from 50,000 to 52,300 barrer and decrease again with increasing permeability from 52,300 to 60,000 barrer. The $C_3H_8$ selectivity over $CH_4$ was found to decrease with increasing $C_3H_8$ permeability up to 52,300 barrer but increase above 52,300 barrer.

• Journal of the Korean institute of surface engineering
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• v.39 no.3
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• pp.137-141
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• 2006

Process window for infinite etch selectivity of silicon nitride $(Si_3N_4)$ layers to ArF photoresist (PR) was investigated in dual frequency superimposed capacitive coupled plasma (DFS-CCP) by varying the process parameters such as low frequency power $(P_{LF})$, $CH_2F_2$ and $H_2$ flow rate in $CH_2F_2/H_2/Ar$ plasma. It was found that infinite etch selectivities of $Si_3N_4$ layers to the ArF PR on both blanket and patterned wafers can be obtained for certain gas flow conditions. The etch selectivity was increased to the infinite values as the $CH_2F_2$ flow rate increases, while it was decreased from the infinite etch selectivity as the $H_2$ flow rate increased. The preferential chemical reaction of the hydrogen with the carbon in the polymer film and the nitrogen on the $Si_3N_4$ surface leading to the formation of HCN etch by-products results in a thinner steady-state polymer and, in turn, to continuous $Si_3N_4$ etching, due to enhanced $SiF_4$ formation, while the polymer was deposited on the ArF photoresist surface.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.5
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• pp.655-662
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• 2004

An adsorption process to recover the pure $CH_4\;and\;CO_2$ from its mixture was examined. In this study, activated carbon fibers were used as a selective adsorbent. The activated carbon fibers has 78~94% micropore volume and 10.5~20.3${\AA}$ narrow pore size, and showed high adsorption rate and the good selectivity for $CO_2$ under the ambient pressure. The ACF with high surface area showed short mass transfer zone and long breakthrough time and, its adsorption capacity depended on the microporosity. Compared with single component adsorption, the amount adsorbed $CO_2$ on ACF increased by the roll-up of $CH_4$ in mixed gases. The adsorption selectivity increased as now rate and $CO_2$ concentration of mixed gases increased, showing 5.2 selectivity for 75% $CO_2$ concentration.

• Membrane Journal
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• v.19 no.4
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• pp.261-267
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• 2009

Polyimide which is the glassy polymer has high chemical resistance, thermal stability and high mechanical property. In this study, the polyimide hollow fiber membranes were prepared by the dry-jet wet phase inversion in order to investigate the permeation porperties of the $H_2S$ and $CH_4$. The morphology of prepared hollow fiber membranes and their permeation behaviors of $H_2S$ and $CH_4$ before and after silicon coating were evaluated. The permeance of $H_2S$ and $H_2S/CH_4$ selectivity increased due to plasticization with increasing the feed pressure. The permeance of KSM03b and selectivity of KSM03d were highest among the three type membranes used this experiments. The permeance decreased but the $H_2S/CH_4$ selectivity increased with increasing the air gap. The permeance reduced after silicon coating. However, the selectivity increased and the selectivity of KSM03d was 275 at 7 atm.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.284-284
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• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• Membrane Journal
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• v.24 no.2
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• pp.100-106
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• 2014

In this work, soluble polyimides were synthesized and characterized from 5-(2,5-dioxotetrahydrofuryl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride (DOCDA) and two diamines such as 4,4'-diaminodiphenylether (ODA), 1,4-phenylenediamine (p-PDA). Their thermal properties were analyzed with differential scanning calorimeter (DSC). The gas permeability coefficients (P) and ideal selectivity for $CH_4$ and $CO_2$ of the prepared polyimide membranes were measured with a time-lag apparatus. DOCDA-ODA, DOCDA-p-PDA showed good permeability and selectivity; the permeabilities of $CO_2$ was 6.10, 0.74 barrers and the selectivity of $CO_2/CH_4$ were 67.03, 46.25, respectively. Therefore, DOCDA-ODA showed good possibility as gas separation membrane.