• KSTLE International Journal
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• 제5권1호
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• pp.1-6
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• 2004

Nano-scale studies on adhesion and friction were conducted in Si-wafer (100) using Atomic Force Microscopy (AFM). Glass (Borosilicate) balls of radii 0.32$\mu\textrm{m}$, 1.25$\mu\textrm{m}$, and 2.5$\mu\textrm{m}$, mounted on cantilever (Contact Mode type NPS) were used as tips. Adhesion and friction between Si-wafer and glass tips were measured at ambient temperature (24${\pm}$1$^{\circ}C$) and humidity (45${\pm}$5%). Friction was measured as a function of applied normal load in the range of 0-160 nN. Results showed that, both adhesion and friction increased with the tip radii. Also, friction increased linearly as a function of applied normal load. The effect of tip size on adhesion and friction was explained as the influence of the capillary force exerted by meniscus and that of the contact area on these parameters respectively. The coefficient of friction was estimated in two different ways, as the slope from the plot of friction force against the applied normal load and as the ratio between the friction force and the applied normal load. Both these estimates showed that the coefficient of friction increased with the tip size. Further, the influence of the adhesion force on the coefficient of friction was also discussed.

• 접착 및 계면
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• 제6권1호
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• pp.7-10
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• 2005

Condensation control of nano-particles has become important in order to fabricate minute condensed structures. In this study, we focus our attention on condensation mechanism of polymer aggregates in a resist film. The polymer aggregate is structural component of a resist material which is used in lithography process. The condensation nature of polymer aggregates in the resist film surface is observed by using atomic force microscope (AFM). By using the AFM, the condensation of polymer aggregates can be observed clearly. The condensation of polymer aggregate strongly affects to precise fabrication of resist pattern below 100nm size. The interaction force among polymer aggregates can be analyzed based on Derjaguin approximation. We also discuss about condensation nature of polymer aggregates in the resist film surface with the help of micro sphere model.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1293-1294
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• 2008

The Langmuir-Blodgett (LB) method has been one of the most suitable techniques for fabricating organic thin films with well-controlled structures, compositions and thickness at the molecular level. We investigated the surface activity of dendrimer films at air-water interface by ${\pi}$-A isotherm. Also, we attempted to fabricate a 1G(4,3)-chloride dendrimer LB films. And their surface morphologies were observed by atomic force microscopy (AFM).

• 한국염색가공학회지
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• 제16권1호
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• pp.59-64
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• 2004

As a simulation of solvent-assisted dyeing, the solvent effects on the structure of polyethylene terephthalate(PET) film treated by dimethylformamide(DMF) were investigated. The effects were evaluated by the atomic force microscopy(AFM) topographical changes and FT-IR spectrum analysis. PET films treated with DMF at $70^{\circ}C$ for several different treatment time(20, 40, and 60 min). AFM topography showed that, with increasing treatment time by DMF, PET surfaces became smooth due to the swelling phenomenon and the rigid structure changed into flexible state which was contributed to increase the surface area of PET films. FT-IR spectrum analysis showed that DMF and molecular chains of PET interacted each other via their polar carbonyl groups and that DMF also affected the out-of-plane bending vibration mode of phenyl ring of PET.

• 한국응용과학기술학회지
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• 제28권2호
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• pp.213-218
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• 2011

Displacement current measuring technique has been applied on the study of polyamic acid monolayer containing p-nitroazobenzene. The displacement current was generated from monolayer on the water surface by monolayer compression and expansion. Maxwell displacement current(MDC) was generated when the area per molecule was about $200{\AA}^2$ and $70{\AA}^2$. Maxwell displacement currents were investigated in connection with monolayer compression cycles. It was found that the maximum of MDC appeared at the molecular area just before the initial rise of surface pressure in compression cycles. The monolayer surface morphology of the LB film have been measured by Atomic Force Microscope(AFM). As a result, we confirmed that the microscopic properties of LB film by AFM showed the good orientation of monolayer molecules and the thickness of monolayer was 3.5-4.1nm.

• Bulletin of the Korean Chemical Society
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• 제24권9호
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• pp.1303-1307
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• 2003

The low molecular water-soluble chitosan nanoparticles (LMWSC-NPs) were prepared, which was modified with hydrophilic and hydrophobic moieties to evaluate the potential for pharmaceutics application. The synthesis of LMWSC-NPs was identified by FT-IR and $^1H$-NMR spectra. Also, we measured the photon correlation spectroscopy (PCS), transmission electron microscope (TEM) and atomic force microscope (AFM) to investigate the characteristics and morphology of the LMWSC-NPs. At the PCS measurement, the more increase the number of substitutive group, the more decrease the positive charge of LMWSC-NP surface. From the results of TEM and AFM, spherical morphologies were observed, and their sizes were 30-150 nm. Resultantly, LMWSC-NPs prepared in this experiment will be expected as a suitable device for the drug targeting system.

• 한국전기전자재료학회논문지
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• 제22권8호
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• pp.632-636
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• 2009

The local oxidation using an atomic force microscopy (AFM) is useful for Si-based fabrication of nanoscale structures and devices. SiC is a wide band-gap material that has advantages such as high-power, high-temperature and high-frequency in applications, and among several SiC polytypes, 4H-SiC is the most attractive polytype due to the high electron mobility. However, the AFM local oxidation of 4H-SiC for fabrication is still difficult, mainly due to the physical hardness and chemical inactivity of SiC. In this paper, we investigated the local oxidation of 4H-SiC surface using an AFM. We fabricated oxide patterns using a contact mode AFM with a Pt/Ir-coated Si tip (N-type, 0.01-0.025 ${\Omega}cm$) at room temperature, and the relative humidity ranged from 40 to 50 %. The height of the fabricated oxide pattern (1-3 nm) on SiC is similar to that of typically obtained on Si ($10^{15}^{\sim}10^{17}$ $cm^{-3}$). We perform the 2-D simulation to further analyze the electric field between the tip and the surface. We demonstrated that a specific electric field (4 ${\times}$ $10^7\;V/m$) and a doping concentration ($^{\sim}10^{17}$ $cm^{-3}$) is sufficient to switch on/off the growth of the local oxide on SiC.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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• pp.79-80
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• 2009

The local oxidation using an atomic force microscopy (AFM) is useful for Si-base fabrication of nanoscale structures and devices. SiC is a wide band-gap material that has advantages such as high-power, high-temperature and high-frequency in applications, and among several SiC poly types, 4H-SiC is the most attractive poly type due to the high electron mobility. However, the AFM local oxidation of 4H-SiC for fabrication is still difficult, mainly due to the physical hardness and chemical inactivity of SiC. In this paper, we investigated the local oxidation of 4H-SiC surface using an AFM. We fabricated oxide patterns using a contact mode AFM with a Pt/Ir-coated Si tip (N-type, $0.01{\sim}0.025\;{\Omega}cm$) at room temperature, and the relative humidity ranged from 40 to 50%. The height of the fabricated oxide pattern ($1{\sim}3\;nm$) on SiC is similar to that of typically obtained on Si ($10^{15}{\sim}10^{17}\;cm^{-3}$). We perform the 2-D simulation to further analyze the electric field between the tip and the surface. Whereas the simulated electric field on Si surface is constant ($5\;{\times}\;10^7\;V/m$), the electric field on SiC surface increases with increasing the doping concentration from ${\sim}10^{15}$ to ${\sim}10^{17}\;cm^{-3}$. We demonstrated that a specific electric field ($4\;{\times}\;10^7\;V/m$) and a doping concentration (${\sim}10^{17}\;cm^{-3}$) is sufficient to switch on/off the growth of the local oxide on SiC.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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• pp.1649-1650
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• 2006

반도체 소자의 선폭이 나노미터 스케일로 진입함에 따라 소자의 물리적 특성을 나노미터 스케일에서 정밀하게 측정하고자 하는 요구가 증대되고 있다. Atomic Force Microscopy (AFM)은 나노미터 이하의 해상도를 가지고 물질 표면의 기하하적, 전기적 특성 등을 측정할 수 있으므로 나노소자 연구에 필수적인 도구가 되었다. 그러나 AFM은 낮은 측정속도와 탐침의 기하학적 형상에 의한 AFM 영상의 왜곡 등과 같은 치명적인 단점도 가지고 있다. AFM의 낮은 측정 속도를 개선하기 위해서 진보된 마이크로머시닝기술을 이용하여 캔틸레버의 크기를 줄이거나 캔틸레버 위에 박막 구동기를 집적시키는 등의 노력이 진행되고 있으나, 이 경우 전통적인 식각 공정을 이용하여 캔틸레버 위에 tip을 형성하는 것이 매우 어렵다. 본 연구에서는 이미 제작된 캔틸레버 위에 전자빔 조사법을 이용하여 탄소상 tip을 직접 성장시킴으로써 전통적인 식각 공정에 비해 매우 간단하고 값싸며, 활용도가 높은 공정을 개발하였다. 탄소상 tip 성장에 필요한 탄소 소스는 dipping 방법을 이용하여 공급하였고, 시분할법을 사용하여 캔틸레버의 원하는 위치에 tip을 성장시킬 수 있었다. 이렇게 제작된 tip은 최대 $5{\mu}m$ 높이까지 가능했으며, 종횡비는 10:1 이상이어서 tip의 형상에 의한 AFM 영상 왜곡 현상을 최소화할 수 있을 것으로 기대된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.111.1-111.1
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• 2015

As an alternative way to get sophisticated nanostructures, atomic force microscopy (AFM) has been used to directly manipulate building primitives. In particular, assembly of metallic nanoparticles(NPs) can provide various structures for making various metamolecules. As far, conventionally made polygonal shaped metallic NPs showed non-uniform distribution in size and shape which limit its study of fundamental properties and practical applications. In here, we optimized conditions for deterministic manipulation of ultra-smooth and super-spherical gold nanoparticles (AuNPs) by AFM. [1] Lowered adhesion force by using platinum-iridium coated AFM tips enabled us to push super-spherical AuNPs in linear motion to pre-programmed position. As a result, uniform and reliable electric/magnetic behaviors of assembled metamolecules were achieved which showed a good agreement with simulation data. Furthermore, visualization of near field for super-spherical AuNPs was also addressed using photosensitive azo-dye polymers. Since the photosensitive azo-dye polymers can directly record the intensity of electric field, optical near field can be mapped without complicated instrumental setup. [2] By controlling embedding depth of AuNPs, we studied electric field of AuNPs in different configuration.