Local Oxidation of 4H-SiC using an Atomic Force Microscopy
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Jo, Yeong-Deuk
(광운대학교 전자재료공학과)
Bahng, Wook (한국전기연구원 재료응용연구단 고집적전원연구그룹) Kim, Sang-Cheol (한국전기연구원 재료응용연구단 고집적전원연구그룹) Kim, Nam-Kyun (한국전기연구원 재료응용연구단 고집적전원연구그룹) Koo, Sang-Mo (광운대학교 전자재료공학과) |
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