• 제목/요약/키워드: ${Sb_2}{O_3}$

검색결과 456건 처리시간 0.022초

안티몬 이온주입시 Sb2O3 빔튜닝 방법 및 모니터링 연구 (A Study on Sb2O3 Beam Tuning and Monitoring in Antimony Implantation -)

  • 김상용;최민호;김남훈;정헌상;장의구
    • 한국전기전자재료학회논문지
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    • 제17권5호
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    • pp.476-480
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    • 2004
  • The characteristics of antimony implants are relatively well-known. Antimony has lower diffusion coefficient, shorter implantation range, and smaller scattering as compared with conventional dopants such as phosphorous and arsenic. It has been commonly used in the doping of buried layer in Bi-CMOS process. In this paper, characteristics and appropriate condition of monitoring in antimony implant beam tuning using Sb$_2$O$_3$were investigated to get a reliable process. TW(Thema Wave) and R$_{s}$(Sheet Resistance) test were carried out to set up condition of monitoring for stable operation through the periodic inspection of instruction condition. The monitoring was progressed at the point that the slant of R$_{s}$ varied significantly to Investigate the variation of instruction accurately.

산화물 환원공정에 의한 Bi-Sb-Te계 열전분말 합성 (Synthesis of Bi-Sb-Te-based Thermoelectric Powder by an Oxide-reduction Process)

  • 이길근;김성현;하국현;김경태
    • 한국분말재료학회지
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    • 제17권4호
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    • pp.336-341
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    • 2010
  • The present study focused on the synthesis of Bi-Sb-Te-based thermoelectric powder by an oxidereduction process. The phase structure, particle size of the synthesized powders were analyzed using XRD and SEM. The synthesized powder was sintered by the spark plasma sintering method. The thermoelectric property of the sintered body was evaluated by measuring the Seebeck coefficient and specific electric resistivity. The $Bi_{0.5}Sb_{1.5}Te_3$ powder had been synthesized by a combination of mechanical milling, calcination and reduction processes using mixture of $Bi_2O_3$, $Sb_2O_3$ and $TeO_2$ powders. The sintered body of the $Bi_{0.5}Sb_{1.5}Te_3$ powder synthesized by an oxide-reduction process showed p-type thermoelectric characteristics, even though it had lower thermoelectric properties than the sintered body of the $Bi_{0.5}Sb_{1.5}Te_3$ thermoelectric powder synthesized by the conventional melting-crushing method.

Pb(Sn1/2Sb1/2)O3-PbTiO3계 소결체의 직경변화가 공진 및 필터특성에 미치는 영향 (Effect of Size of Sintered Body on Resonant and Filter Characteristics in Pb(Sn1/2Sb1/2)O3-PbTiO3 Piezoelectric Ceramics)

  • 임진호;조상희
    • 한국세라믹학회지
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    • 제25권4호
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    • pp.309-314
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    • 1988
  • In this study, the effect of the size of sintered body on resonant and filter characteristics in Pb(Sn1/2Sb1/2)O3-PbTiO3 piezo-electric system were investigated. The attenuation characteristics of ring-dot type and ladder type filter were also investigated. As the size of sintered body was decreased, the resonant characteristic(Fr, Fa) and the center frequency(Fo) were increased. As the poling field was increased, the Kp and bandwidth were increased. The big difference between rign-dot type and ladder type was the sharpness of bandwidth, selectivity and the movement of center frequency.

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단성분 $Sb_2O_3$유리의 선형 및 비선현 광학특성에 관한 연구 (Linear and nonlinear optical properties of single component $Sb_2O_3$ system)

  • Kim, Sae-Hoon;Chung, Yong-Sun
    • 한국결정성장학회지
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    • 제7권3호
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    • pp.514-520
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    • 1997
  • 진공급냉법을 이용하여 단성분계 $Sb_2O_3$ 유리를 제조하였다. 선형굴절율은 500-1000 nm 범위내에서 측정하였으며, 굴절율은 633 nm에서 2.0이었다. 에너지갭은 3.38 eV 이었으며, 3차 비선형 광학 감수율을 THG법을 이용하여 측정하였으며 단성분계 Silica 유리보다도 20배 큰 $5.68{\times}10^{-13}$ esu의 측정값을 얻었다.

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The Effect of Cerium Reduction on Light Emission in Cerium-containing 20Y2O3-25Al2O3-55SiO2 Glass

  • Maeng, Jee-Hun;Choi, Sung-Churl
    • Journal of the Optical Society of Korea
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    • 제16권4호
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    • pp.414-417
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    • 2012
  • The effect of cerium concentration and the addition of $Sb_2O_3$ on the light emission of cerium-contained glass were investigated. The glass matrix composition was $20Y_2O_3-25Al_2O_3-55SiO_2$, the $CeO_2$ concentration ranged from 0.05 to 0.5 mol%, and $Sb_2O_3$ was added at concentrations of 0.02 to 0.1 mol%. The $Ce^{3+}$ and $Ce^{4+}$ absorption bands were observed at approximately 330 nm and 240 nm, respectively. A broad emission band at 400 nm, due to the 4f-5d transition of the $Ce^{3+}$ ion, was observed under illumination by a UV light at 330 nm. The photoluminescence intensity of $Ce^{3+}$ had a maximum value at a $CeO_2$ concentration of 0.1 mol%. Adding $Sb_2O_3$ decreased the $Ce^{4+}$ absorption intensity and enhanced the light emission intensity of $Ce^{3+}$ by about 45%.

압전변압기용 $Pb(Mn_{1/3}Sb_{2/3})O_3-PZT$ 세라믹스에서 승온속도 및 $V_2O_5$ 첨가가 치밀화 및 전기적 특성에 미치는 영향 (Effect of Heating Rate and $V_2O_5$ Addition on Densification and Electrical Properties of $Pb(Mn_{1/3}Sb_{2/3})O_3-PZT$ Ceramics for Piezoelectirc Transformer)

  • 허수정;손준호;손정호;이준형;김정주;정우환;박명식;조상희
    • 한국세라믹학회지
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    • 제37권4호
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    • pp.295-301
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    • 2000
  • The effect of V2O5 addition on the low temperature sintering of Pb(Mn1/3Sb2/3)O3-PZT ceramics, which is known as a prominent material for piezoelectric transformer application was studied, and the densification behavior and piezoelectric characteristics of the samples as a function of heating rate were also examined. V2O5 led the system to liquid phase sintering by forming liquid phase during sintering, which accelerated densification through the particle rearrangement in the early stage of sintering. The liquid phase mostly existed at grain boundaries retarded the evaporation of PbO, while the densification temperature and the weight loss of V2O5-free samples were higher than those of samples with V2O5. Faster heating improved the densification of the samples regardless of V2O5 addition. The low temperature sintering at 100$0^{\circ}C$ was achieved in PMS-PZT ceramics with high density and reasonable dielectric and piezoelectric characteristics. This result revealed optimistic way to the development of multi-layered piezoelectric transformers.

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ZnO 바리스터에서 첨가물이 쌍정에 미치는 영향 (The Effect of Additives on Twins in ZnO Varistors)

  • 한세원;조한구;강형부
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.1057-1060
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    • 2001
  • By comparison of the experimental results in two systems of ZnO varistors, its appear that Sb$_2$O$_3$is the indispensable element for twinning in ZnO varistors, and the Zn$_{7}$Sb$_2$O$_{12}$ spinel acts as the nucleus to form twins. A1$_2$O$_3$is not the origin of twinning in ZnO varistor, but it was found that A1$_2$O$_3$could strengthen the twinning and form a deformation twinning by ZnA$_{12}$O$_4$-dragging and pinning effect. The inhibition ratios of grain growth and nonuniformity of two systems ZnO varistors increase with the increase of A1$_2$O$_3$content. The twins affect the inhibition of grain growth, the mechanism could be explained follow as : twins increase the mobility viscosity of ZnO grain and grain boundary, and drag ZnO grain and liquid grain boundary during the sintering, then the grain growth is inhibited, and the microstructure becomes more uniform.orm.m.

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MnO2 첨가가 0.985[Li0.04(Na0.545K0.46)0.96(Nb0.81Ta0.15Sb0.04)]O3+0.015KNbO3 세라믹스의 유전 및 압전 특성에 미치는 영향 (Effect of MnO2 Addition on Dielectric and Piezoelectric Properties of 0.985[Li0.04(Na0.545K0.46)0.96(Nb0.81Ta0.15Sb0.04)]O3 Ceramics)

  • 김유석;류주현
    • 한국전기전자재료학회논문지
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    • 제27권6호
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    • pp.361-366
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    • 2014
  • $MnO_2$-doped $0.985[Li_{0.04}(Na_{0.545}K_{0.46})_{0.96}(Nb_{0.81}Ta_{0.15}Sb_{0.04})]O_3+0.015KNbO_3(0.985LNKNTS+0.015KNbO_3)$ lead-free ceramics were fabricated by conventional solid state method to develop excellent dielectric and piezoelectric properties. The result of X-ray diffraction patterns obviously indicated that all of the specimen has pure perovskite structure without secondary phase. In addition, orthorhombic phase and coexistance region of orthorhombic-tetragonal phase (MPB) were observed with amount of $MnO_2$. The optimal values of ${\rho}$=4.70 $g/cm^3$, $d_{33}=238$ pC/N, $k_P=0.46$, $Q_m=121$, ${\varepsilon}_r=849$, and $T_C=225^{\circ}C$ were obtained at 0.01 mol% $MnO_2$ doped $0.985LNKNTS+0.015KNbO_3$ ceramics sintered at $990^{\circ}C$ for 5 h, respectively. Hence, it was indicated that the suitable amount of $MnO_2$ could improve the electrical properties of $0.985[Li_{0.04}(Na_{0.545}K_{0.46})_{0.96}(Nb_{0.81}Ta_{0.15}Sb_{0.04})]O_3+0.015KNbO_3$ ceramics.

$ZrO_2$를 나노개재물로 첨가한 p형 $(Bi,Sb)_2Te_3$ 나노벌크 가압소결체의 열전특성 (Thermoelectric Characteristics of the p-type $(Bi,Sb)_2Te_3$ Nano-Bulk Hot-Pressed with Addition of $ZrO_2$ as Nano Inclusions)

  • 여용희;김민영;오태성
    • 마이크로전자및패키징학회지
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    • 제17권3호
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    • pp.51-57
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    • 2010
  • p형 $(Bi,Sb)_2Te_3$ 분말을 용해/분쇄법으로 제조하여 가압소결 후 가압소결조건에 따른 열전특성을 분석하였으며, 나노개재물로서 $ZrO_2$의 첨가에 따른 열전특성의 변화거동을 분석하였다. 가압소결온도를 $350^{\circ}C$에서 $550^{\circ}C$로 증가시킴에 따라 가압소결체의 Seebeck 계수가 275 ${\mu}V$/K에서 230 ${\mu}V$/K로 감소하였으며, 전기비저항이 6.68 $m{\Omega}m$-cm에서 1.86 $m{\Omega}$-cm로 감소하였다. 1 vol% 이상의 $ZrO_2$ 함량 증가에 따라 power factor가 계속 감소하는 거동으로부터 $(Bi,Sb)_2Te_3$ 가압소결체의 최대 power factor를 얻을 수 있는 $ZrO_2$ 나노개재물의 최적 함량은 1 vol% 미만으로 판단되었다.