• Korean Journal of Optics and Photonics
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• v.18 no.1
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• pp.74-78
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• 2007

We report theoretical and experimental results for application of transmittance-controlled photomask technology to ArF lithography. The transmittance-controlled photomask technology is thought to be a promising technique fo critical dimension (CD) uniformity correction on a wafer by use of phase patterns on the backside of a photomask. We could theoretically reproduce experimental results for illumination intensity drop with respect to the variation of backside phase patterns by considering light propagation from the backside to the front side of a photomask at the ArF lithography wavelength. We applied the transmittance-controlled photomask technology to ArF lithography for a critical layer of DRAM (Dynamic Random Access Memory) having a 110-nm design rule and found that the in-field CD uniformity value was improved from 13.8 nm to 9.7 nm in $3{\sigma}$.

• Korean Journal of Materials Research
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• v.8 no.6
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• pp.526-531
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• 1998

A hydride vapor phase epitaxy (HVPE) method was performed to grow the $10~240\mu{m}$ thick GaN films on (111) spinel $MgAl_2O_4$ substrate. The GaN films on $MgAl_2O_4$ substrate revealed a photoluminescence (PL) characteristics of the impurity doped GaN by the out-diffusion and auto-doping of Mg from $MgAl_2O_4$ substrate during GaN growth. The PL spectrum measured at 10K consists of free and bound excitons related recombination transitions and impurity-related donor-acceptor pair recombination and its phonon replicas. However, the deep-level related yellow band emission was not observed. The peak energy of neutral donor bound excitonic emission and the frequency of Raman $E_2$ mode were exponentially decreased with increasing the GaN thicknesses. and the frequency of E, Raman mode was shifted with the relation of $\Delta$$\omega$=3.93$\sigma$($cm^{-1}$/GPa), where l1 (GPa) is the residual strain in the GaN epilayers.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2005.11a
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• pp.437-444
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• 2005

Experiments were carried out in an atmospheric pressure, lab-scale gas turbine combustor to see the effect of partial premixing on unstable flame structure and Nox emission characteristics. The swirl angle is 45 deg., fuel-air mixing degrees were varied 0, 50 and 100% respectively at equivalence ratio ranging from 0.53 to 0.79. The evolution of phased-locked OH chemiluminescence images were acquired with an ICCD. NOx emission characteristics were also investigated at each experimental condition. The effect of the fuel-air mixing degree on the flame structure was obtained from phase-locked $OH^*$ images. And it was obtained from local heat release characteristics that the information about the region which the combustion instability was amplified or damped. It also could be confirmed that $\sigma$ has greatly influence on NOx emission characteristics at lean regimes. It would be expected that it could provide invaluable data for understanding the mechanism of combustion instability.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2000.05a
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• pp.1-1
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• 2000

The results of the modification of metal materials treated by high temperature pulst:d plasma fluxes (HTlPPF) with a specific power of incident flux changing in the $(3...100)10^5{]\;}W/cm^2$ range and a pulse duration lying from 15 to $50{\;}\mu\textrm{s}$ have been presented. The results of HTPPF action were studied on the stainless steels of 18Cr-l0Ni, 16Cr- 15Ni, 13Cr-2Mo types; on the structural carbon steels of (13...35)Cr, St. 3, St. 20, St. 45 types; on the tool steels of U8, 65G, ShHI5 types, and others; on nickel and high nickel alloy of 20Cr-45Ni type; on zirconium- and vanadium-base alloys and other materials. The microstructure and properties (mechanical, tribological, erosion, and other properties) of modified materials and surface alloying of metals exposed to HTPPF action have been investigated. It was found that the modification of materials by HTPPF resulted in a simultaneous increase of several properties of the treated articles: microhardness of the surface and layers of 40...60 $\mu\textrm{m}$ in depth, tribological characteristics (friction coefficient, wear resistance), mechanical properties ({\sigma_y}, {\;}{\sigma_{0.2}}.{\;}{\sigma_r}) on retention of the initial plasticity ($\delta$), corrosion resistance, radistanation erosion under ion irradiation, and others. The determining factor of the changes observed is the structural-phase modification of the near-surface layers, in particular, the formation of the fine cellular structure in the near-surface layers at a depth of $20{\;}{\mu\textrm{m}}$ with dimension of cells changing in the range from 0.1 to $1., 5{\;}\mu\textrm{m}$, depending on the kind of material, its preliminary treatment, and the parameters of plasma fluxes. The remits obtained have shown the possibility of purposeful surface alloying of metals exposed to HTPPF action over a depth up to 20...45 $\mu\textrm{m}$ and the concentration of alloying element (Ni, Cr, V) up to 20 wt.%. Possible industrial brunches for using the treatment have been also considered, as well as some results on modifying the serial industrial articles by HTPPF.

• Journal of the Korean institute of surface engineering
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• v.54 no.3
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• pp.102-111
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• 2021

The corrosion behaviors of laser-welded super duplex stainless steel tubes with post-weld heat treatment(PWHT) conditions(950, 1000, 1050, 1100 ℃ for 5 and 30 min) were evaluated by electrochemical potentiodynamic polarization and critical pitting temperature measurements. This study showed that the critical metallurgical factors affecting the degradation of corrosion resistance of a steel tube in as-welded condition were the unbalanced phase fraction(ferrite:austenite = 94:4), Cr₂N precipitation, and phase transformation from the austenite phase to ɛ-martensite(via stress-induced phase transformation). The improvement in the corrosion resistance of the welded specimen depends greatly on the PWHT conditions. The specimens after PWHT conducted below 1000 ℃ showed inferior corrosion resistance, caused by precipitation of the sigma phase enriched with Cr and Mo. At 1100 ℃ for a longer duration in PWHT, the ferrite phase grows, and its fraction increases, leading to an unbalanced phase fraction in the microstructure. As a result, pitting can be initiated primarily at the interface between the ferrite/austenite phase, particularly in base metal.

• Journal of The Korean Astronomical Society
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• v.38 no.2
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• pp.241-244
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• 2005

We have analysed near-infrared JHKL observations of the members of the $\approx$9 Myr-old $\eta$ Chamaeleontis cluster. Using (J - H)/(K - L) and (H - K)/(K - L) IR colour-colour diagrams for the brightest 15 members of the cluster, we find the fraction of stellar systems with near-IR excess emission was 0.60 $\pm$ 0.13 (2$\sigma$). For the CTT and WTT star population, we also find a strong correlation between the IR excess and Ha emission which is also known as an accretion indicator. The (K - L) excess of these stars appears to indicate a wide range of star-disk activity; from a CTT star with high levels of accretion, to CTT - WTT transitional objects with evidence for some on-going accretion, and WTT stars with weak or absent IR excesses. Among the brightest 15 members, four stars (RECX 5, 9, 11 and ECHA J0843.3-7905) with IR excesses ${\Delta}$(K - L) > 0.4 mag and strong or variable optical emission were identified as likely experiencing on-going mass accretion from their circumstellar disks which we confirmed their accretion disks from the optical high-resolution echelle spectroscopic study. The result-ing accretion fraction of 0.27 $\pm$ 0.13 (2$\sigma$) suggests that the accretion phase, in addition to the disks themselves, can endure for at least ${\~}$10 Myr.

• Journal of the Korean Applied Science and Technology
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• v.23 no.3
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• pp.185-191
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• 2006

It is desirable to have an accurate expression on the temperature dependence of surface(or interfacial) tension ${\sigma}$, because most of the interfacial thermodynamic functions can be derived from it. There have been proposed several equations on the temperature dependence of the surface tension, ${\sigma}(T)$. Among them $E{\ddot{o}}tv{\ddot{o}}s$ equation and the one modified by Katayama, which is called Katayama equation, for improving accuracies of $E{\ddot{o}}tv{\ddot{o}}s$ equation close to critical points, have been most well-known. In this article Katayama equation is interpreted on the basis of the cell model to understand the nature of the equation. The cell model results in an expression very similar to Katayama equation. This implies that, although $E{\ddot{o}}tv{\ddot{o}}s$ and Katayama equations were obtained on the basis of experimental results, they have a sound theoretical background. The Katayama equation is also modified with the phase volume replaced with a critical scaling expression. The modified Katayama equation becomes a power-law equation with the exponent slightly different from the value obtained by critical-scaling theory. This implies that Katayama equation can be replaced by a critical-scaling equation which is proven to be accurate.

• Journal of Advanced Marine Engineering and Technology
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• v.27 no.6
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• pp.704-713
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• 2003

The effect of partial substitution of tungsten for molybdenum on the microstructure and corrosion resistance in 22Cr-5Ni-3Mo duplex stainless steel(DSS) aging heat treated in a temperature range of 600~$1000^{\circ}C$ has been investigated. Electrochemical tests were carried out for the evaluation of corrosion resistance. Aging treatment had hardly influenced the general corrosion resistance. With the increase of aging time, the pitting corrosion resistance of the DSS had decreased, After aging for 2min at 700~$900^{\circ}C$, the pitting potential of the 3Mo steel decreased remarkably, while that of the W-substituted steel hardly changed. During aging. the intermetallic $\sigma$ and secondary austenite ($\gamma_2$) phases were precipitated. and the pitting corrosion and intergranular corrosion resistance were significantly decreased after aging at 700~$750^{\circ}C$ for 10 h, which could be caused by the $\gamma_2$ formation. The ${\gamma}$$_2$ phase could affect the depletion of molybdenum and chromium in the $\gamma_2/\alpha and \gamma_2/\sigma$ boundaries.

• Journal of the Korean Institute of Gas
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• v.10 no.1 s.30
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• pp.1-6
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• 2006

To use pressurized facilities safely and effectively, a likelihood of failure (LOF) for the brittle fracture was analyzed quantitatively through the risk based inspection using API-581 BRD. We found that for the case of the low temperature/low toughness and the temper embrittlement, the technical module subfactor (TMSF) showed high value for the A impact curve, low temperature, and the no post weld heat treatment. But the risk didn't significantly change at the $855^{\circ}F$ embrittlement, and the LOF far the sigma phase embrittlement showed high value at low temperature of the high sigma.

• Korean Journal of Optics and Photonics
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• v.7 no.2
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• pp.142-149
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• 1996

In non-saturation region, we measured the degenerate four wave mixing spectra of $X^2\;{\Pi}(v=0){\to}A^2{\Sigma}^+(v'=0)$ transition for OH in counterflow burner, which exists transiently in combustion reaction. We used forward box type geometry for phase matching. Calculating the population of each rotational level from the line intensities of R$_1$band and comparing it with Boltzmann distributions, we could obtain the temperatures of the flame at several points. Corrected for the absorption of incident laser fields, the final temperatures coincided with those measured by coherent anti-Stokes Raman Scattering within error $\pm$60 K near 2000 K. We also measured the concentration distribution of OH radical and it was compared to that measured by laser induced fluorescence.