• 한국재료학회지
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• 제9권11호
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• pp.1117-1122
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• 1999

5~10nm 두께의 얇은 산화막 위에 $\alpha$-실리콘과 Co/Ti 이중막을 순차적으로 증착하고 급속열처리하여 코발트 폴리사이드 전극을 만든 후, SADS법으로 다결정 Si을 도핑하여 MOS 커패시터를 제작하였다. 이때 drive-in 열처리조건에 따른 커패시터의 C-V 특성과 누설전류를 측정하여, $\textrm{CoSi}_{2}$의 열적안정성과 도판트 (B 및 As)의 재분포가 Co-폴리사이드 게이트의 전기적 특성에 미치는 영향을 연구하였다.$ 700^{\circ}C$에서 60~80초간 열처리시, 다결정 Si층의 도핑으로 우수한 C-V 특성과 낮은 누설전류를 나타냈으나, 그 이상 장시간 또는 $900^{\circ}C$의 고온에서는 $\textrm{CoSi}_{2}$의 분해에 따른 Co의 확산으로 전기적 특성이 저하되었다. SADS법으로 Co-폴리사이드 게이트 전극을 형성할 때, 도판트가 다결정 Si층으로 충분히 확산되는 것뿐만 아니라, $\textrm{CoSi}_{2}$의 분해를 억제하는 것이 매우 중요하다.

• 한국재료학회지
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• 제13권1호
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• pp.43-47
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• 2003

As and BF$_2$dopants are implanted for the formation of source/drain with dose of 1${\times}$10$^{15}$ ions/$\textrm{cm}^2$∼5${\times}$10$^{15}$ ions/$\textrm{cm}^2$ then formed cobalt disilicide with Co/Ti deposition and doubly rapid thermal annealing. Appropriate ion implantation and cobalt salicide process are employed to meet the sub-0.13 $\mu\textrm{m}$ CMOS devices. We investigated the process results of sheet resistance, dopant redistribution, and surface-interface microstructure with a four-point probe, a secondary ion mass spectroscope(SIMS), a scanning probe microscope (SPM), and a cross sectional transmission electron microscope(TEM), respectively. Sheet resistance increased to 8%∼12% as dose increased in $CoSi_2$$n^{＋}$ and $CoSi_2$$p^{V}$ , while sheet resistance uniformity showed very little variation. SIMS depth profiling revealed that the diffusion of As and B was enhanced as dose increased in $CoSi_2$$n^{＋}$ and $CoSi_2$$p^{＋}$ . The surface roughness of root mean square(RMS) values measured by a SPM decreased as dose increased in $CoSi_2$$n^{＋}$ , while little variation was observed in $CoSi_2$$p^{＋}$ . Cross sectional TEM images showed that the spikes of 30 nm∼50 nm-depth were formed at the interfaces of $CoSi_2$$n^{＋}$ / and $CoSi_2$/$p^{＋}$, which indicate the possible leakage current source. Our result implied that Co/Ti cobalt salicide was compatible with high dose sub-0.13$\mu\textrm{m}$ process.

• 한국표면공학회지
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• 제29권6호
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• pp.615-620
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• 1996

Chromium-Molybdenum steel was plasma-nitrided at 823 K for 10.8 ks in an atmosphere of 30% $N_2$-70% $H_2$ gas under 665 Pa without and with a subsidiary cathode of $MoS_2$ to compare ion-nitriding and plasma-sulfnitriding using subsidiary cathode. When the steel was ion-nitrided without $MoS_2$, iron nitride layer of 4$\mu\textrm{m}$ and nitrogen diffusion layer of 400mm were formed on the steel. A compound layer of 15$\mu\textrm{m}$ and nitrogen diffusion layer of 400$\mu\textrm{m}$ were formed on the surface of the steel plasma-sulfnitrided with subsidiary cathode of $MoS_2$. The compound layer consisted of FeS containing Mo and iron nitrides. The nitrides of $\varepsilon$-$Fe_2$, $_3N$ and $\gamma$-$Fe_4N$ formed under the FeS. The thicker compound layer was formed by plasma-sulfnitriding than ion-nitriding. In plasma-sulfnitriding, the surface hardness was about 730 Hv. The surface hardness of the steel plasma-sulfnitrided with $MoS_2$ was lower than that of ion-nitrided without $MoS_2$. This may be due to the soft FeS layer formed on the surface of the plasma-sulfnitrided steel.

• 생물환경조절학회지
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• 제5권2호
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• pp.152-159
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• 1996

Experiment was performed in a newly developed wind tunnel with light system to determine the aerodynamic resistance and eddy diffusivity above the plug stand under artificial light. Maximum air temperature appeared near the top of the plug stand under artificial light. Since Richardson number was ranged from -0.07 to +0.01, the atmosphere above the plug stand in wind tunnel was in an unstable or near- neutral stability state. The average aerodynamic resistance at rear region of plug stand was 25 % higher than that at middle region. Eddy diffusivity($K_{M}$) linearly increased with the increasing air current speed. $K_{M}$ at air current speed of 0.9 m.$s^{-1}$ was about two times as many as that at air current speed of 0.3 m.$s^{-1}$. And average $K_{M}$ at the rear region was 15% lower than that at the middle region. These results indicated that the diffusion of heat and mass along the direction of air current inside the plug stand was different. It might cause the lack of uniformity in the growth and quality of plug seedlings. The wind tunnel developed in this study would be useful to investigate the effects of air current speed on microclimates and the growth of plug seedlings under artificial light in a semi- closed ecosystem.

• KSBB Journal
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• 제6권3호
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• pp.241-247
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• 1991

본 연구에서는 고정전달자를 갖는 poly(4-vinylpyridine-co-styrene) 고분자막을 합성하여 이를 특성화하고, $Cl^-$ 및 $CCl_3COO$ 의 $H^+$ 및 $OH^-$ 농도차에 따른 능동전달 기구에 대하여 고찰하였다. 시험 범위 내에서 $Cl^-$의 능동전달은 주로 $H^+$ 농도차를 구동력으로 한 병류수송(symprot)이 주가 되었으며 반면에 $CCl_3COO^{-}$의 능동전달은 $OH^-$의 농도차에 의한 향류 수성(antiport)의 영향이 큼을 알 수 있었다. $H^+$ 농도와 $OH^-$ 농도에 의한 음이온의 초기플럭스를 관찰함으로서, 고정전달자와 이온간의 엄형성계수, K와 이온의 막내 확산계수, D는 $Cl^-$의 경우 각각 $4.60{\times}10^2\;mol^{-1}{\cdot}\textrm{cm}^3$ 및 $1.57{\times}10^3{\textrm{cm}^2}/h$, $CCl_3COO^{-}$의 경우 각각 $1.10{\times}10^4\;mol^{-1}{\cdot}\textrm{cm}^3$ 및 $1.44{\times}10^4{\textrm{cm}^2}/h$ 이었다.

• Archives of Pharmacal Research
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• 제27권7호
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• pp.763-768
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• 2004

To investigate the feasibility of developing a new quercetin transdermal system, a preformulation study was carried out. Therefore, the effects of vehicles and pressure-sensitive adhesives (PSA) on the in vitro permeation of quercetin across dorsal hairless mouse skin were studied. Among vehicles used, propylene glycol monocaprylate (PGMC) and propylene glycol mono-laurate were found to have relatively high permeation flux from solution formulation (i.e., the permeation fluxes were 17.25$\pm$1.96 and 9.60$\pm$3.87 $\mu\textrm{g}$/$\textrm{cm}^2$/h, respectively). The release rate from PSA formulations followed a matrix-controlled diffusion model and was mainly affected by the amount of PSA and drug loaded. The overall permeation fluxes from PSA formulations were less than 0.30 $\mu\textrm{g}$/$\textrm{cm}^2$/h, which were significantly lower compared to those obtained from solution formulations. The lower permeation fluxes may be due to the decrease of solubility and diffusivity of quercetin in the PSA layer, considering the fact that the highest flux of 0.26 $\mu\textrm{g}$/$\textrm{cm}^2$/h was obtained with the addition of 0.2％ butylated hydroxyanisole in PGMC-diethyl-ene glycol monoethyl ether co-solvents (80-85 ： 15-20, v/v). Taken together, these observations indicate that improvement in the solubility and diffusivity of quercetin is necessary to realize fully the clinically applicable transdermal delivery system for the drug.

• 한국자기학회지
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• 제7권3호
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• pp.129-133
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• 1997

Hf 함량과 열처리 효과가 $Co_{1-x}$ H $f_{x}$(X=0.16, 0.24 ㅁㅅ.%)계 박막의 자기적 특성에 미치는 영향을 조사하기 위하여, 제작된 시료를 다양한 조건에서 열처리한 후, 강자성 공명 실험을 통해 관측된 강자성 공명 흡수선의 변화를 고찰했다. 모든 시료에 대해 다수의 volume mode 스핀파와 한 개 또는 두 개의 surface mode 스핀파가 관측되었는데, 대체적으로 이와 같은 현상은 시료 양면의 표면이방성이 0보다 작은 경우에 나타나는 특성이다. $Co_{84}$H $f_{16}$박막의 경우 열처리 온도를 225 .deg. C까지 증가시키는 동안 기판과 접촉하는 시료면의 표면 자기이방성 상수 $K_{s2}$는 -0.07 erg/$cm^{2}$에서 -0.32 erg/$cm^{2}$로 감소했으며, 공기와 접촉하는 시료면의 표면 자기 이방성 상수 $K_{s1}$은 0.18 erg/$cm^{2}$에서 -0.47 erg/$cm^{2}$로 변화하는 모습을 보였다. $Co_{76}$H $f_{24}$ 박막에서는 $K_{s2}$는 열처리 온도가 증가함에 따라 -0.31 erg/$cm^{2}$에서 -0.41 erg/$cm^{2}$로 미소하게 감소했으며, $K_{s1}$은 열처리 온도가 225 .deg. C 까지 증가하는 동안 -0.19 erg/$cm^{2}$에서 -0.60 erg/$cm^{2}$로 급격히 감소했다. 대체적으로 CoHf계 박막의 경우 공기와 접촉하는 면의 표면이방성은 열처리 온도와 Hf 함량에 매우 민감한 특성을 보이는데, 이와 같은 현상은 저온 열처리 과정(150 .deg. C ~ 175 .deg. C)에서 공기쪽 표면층에 존재하는 Hf이 산화하여 공기쪽 표면층의 Co 함량이 증가했고, 고온 열처리 과정(200 .deg. C ~ 225 .deg. C)에서 Co 원자가 확산하므로서 나타나는 현상으로 해석된다.다..다.된다.다..다.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2001년도 춘계학술대회 논문집
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• pp.180-185
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• 2001

In order to regulate the physical characteristics of an ocean dumping material in the south-eastern East Sea, the diffusion characteristics with the observation, hydraulic experiment and numerical experiment data are investigated. The main results are as follows; (1) Spying CTD observation result of the area of Jung in the East Sea, the ocean dumping area had influenced the Tsushima warm current of high temperature and salinity. Horizontal turbulent diffusivity is 1.913${\times}$10$^{7}$ $\textrm{cm}^2$/sec by drogue tracking. (2) From the experiment of settling, the initial settling velocity of each material is 1.0∼2.7 cm/sec according to the specific gravity and initial concentration. In the pycnocline, particles didn't settle under the pycnocline any more and accumulated. It is signified that calculation of the sedimentation rate of the ocean dumping material including of vertical diffustion must be regard the pycnocline in the ocean area have well-developed pycnocline. (3) Vertical turbulent diffusivity were 2.219${\times}$10$^{-8}$∼8,874${\times}$10$^{-4}$ $\textrm{cm}^2$/sec from the experiment of settling. And, the pycnocline influenced the vertical turbulent diffusivity. (4) From the result of diffusion simulation in the East Sea, the co-concentration line of 0.05 ppm and 0.1 ppm are limited at dumping area after 200 days. The constant concentration line of 0.01 ppm is distributed to the vicinity of Ulleungdo and Tokdo, but isn't distributed to the coastal area of East Sea and southern area of Jung in the East Sea.

• 한국세라믹학회지
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• 제36권11호
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• pp.1228-1234
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• 1999

In order to form a uniform oxidation layer and spinel crystalline phase that was supposed to help strong bonding in Kovar(Fe-29Ni-17Co)to-glass sealing the humidified nitrogen (2.3%H2O/N2) was used as an oxidation atmosphere. Kovar oxidation was diffusion-contolled and the activation energy was 2.51 kcal/mol at 600-900$^{\circ}C$ After oxidation at 600$^{\circ}C$ the oxidation layer was under 1$\mu\textrm{m}$ thickness and crystalline phase was spinel which was found to be suitable for the Kovar-to-glass sealing.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.351-354
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• 1998

The formation of the $YBa_2Cu_30_{7_\delta}$(Y123) thick films has been investigated by a surface diffusion Imcess between $3BaCu0_2$+2CuO composite coating powder and a $Y_2BaCuO_5$(Y211). This reaction has been studied in the temperature of $930^{\circ}C$ and $940^{\circ}C$ for 2h to 10h in an oxygen atmosphere. The Y211 substrates becomes covered by co-precipitation of Y123 grains and CuO inclusions. X-ray diflractotnctn. revealed that the lager consisted of an orthorhombic crystal structure. The maximum Jc of $400A/\textrm{cm}^2$ is abtained when the specimen was heat-treated at $930^{\circ}C$ for 6h on the Y211 substrate.