Fig. 1. Schematic diagrams of device structures.
Fig. 2. RC Delay Trends for transistor and interconnect.
Fig. 3. Schematic diagram of organic-inorganic material structure.
Fig. 4. Example of patterning characteristic of polysiloxane (SEM images).
Table 1. List of dielectrics.7-11)
Table 2. Material properties of selected organic-based dielectrics.16)
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