Organic-inorganic Hybrid Dielectric with UV Patterning and UV Curing for Global Interconnect Applications |
Song, Changmin
(Graduate School of Nano-IT Design Convergence, Seoul National University of Science and Technology)
Park, Haesung (Department of Mechanical Engineering, Seoul National University of Science and Technology) Seo, Hankyeol (Media IT Engineering Program, Seoul National University of Science and Technology) Kim, Sarah Eunkyung (Graduate School of Nano-IT Design Convergence, Seoul National University of Science and Technology) |
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