Laser Solutions (한국레이저가공학회지)

Korean Society of Laser Processing (한국레이저가공학회)
권호 표지

Operating System Design of Multi Beam Control System with Miniaturized Electron Beam Columns

초소형 전자빔을 이용한 멀티 전자빔 운영 시스템 설계

  • Lim, Sun Jong (Department of Laser & Electron Beam Application, KIMM) ;
  • Kim, Ho Seob (Department of Nanoscience, Sunmoon University)
  • 임선종 (한국기계연구원 광응용기계실) ;
  • 김호섭 (선문대학교 나노과학과)
  • Received : 2015.12.14
  • Accepted : 2015.12.24
  • Published : 2015.12.31
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Abstract

The research on multi electron beam systems is being carried out by various methods. We are studying multi electron beam system using miniaturized electron beam columns. The column consists of electrostatic lenses, electrostatic deflector and tip emitter. Our operating system controls 4 column array, captures images of each column and maintains the instrument. We present the usefulness of our operating system for multi columns by capturing images of each column.

Keywords

References

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