• 제목/요약/키워드: Electron beam system

검색결과 407건 처리시간 0.031초

전자빔건 헤드유니트의 설계와 제작 (Establishment of Gun Head Unit for Electron Beam Machining System)

  • 강재훈;이찬홍;최종호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1875-1878
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    • 2005
  • It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, column unit build up with electron beam gun head unit is necessarily required more than anything else to modify scanning electron microscope. In this study, various components included ceramic isolation plate and main body which are essentially constructed for electron beam gun head unit are designed and manufactured. And this electron beam gun head unit will be used for next connected study in the development step of scanning electron microscope based electron beam machining system.

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초소형 전자빔을 이용한 멀티 전자빔 운영 시스템 설계 (Operating System Design of Multi Beam Control System with Miniaturized Electron Beam Columns)

  • 임선종;김호섭
    • 한국레이저가공학회지
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    • 제18권4호
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    • pp.12-16
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    • 2015
  • The research on multi electron beam systems is being carried out by various methods. We are studying multi electron beam system using miniaturized electron beam columns. The column consists of electrostatic lenses, electrostatic deflector and tip emitter. Our operating system controls 4 column array, captures images of each column and maintains the instrument. We present the usefulness of our operating system for multi columns by capturing images of each column.

전자빔 가공기의 지능형 원격 빔 조절 기능의 개발 (Development of Intelligent Remote Beam Control Function in E-Beam Manufacturing System)

  • 임선종;유준
    • 한국공작기계학회논문집
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    • 제15권2호
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    • pp.24-29
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    • 2006
  • The use electron-beam(E-beam) manufacturing system provides a means to alleviate optic exposure equipment's problems. We are developing an E-beam manufacturing system with scanning electron microscope(SEM) function. The E-beam manufacturing system consist of high voltage generator, beam blanker, condenser lenses, object lenses, stigmator and stage. The development of E-beam manufacturing system is used on the method of remaking SEM's structure. The functions of SEM are developed. It is important for the test of E-beam performance. In E-beam manufacturing system and SEM, beam focus is important function. In this paper, we propose intelligent remote control function for beam focus in E-beam manufacturing system. The function extends the user's function and gives convenience.

전자빔 가공시스템용 경통의 구축 (Establishment of Column Unit for Electron Beam Machining System)

  • 강재훈;이찬홍;최종호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.1017-1020
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    • 2004
  • It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, column unit build up with several electo-magnetic lens is necessarily required more than anything else to modify scanning electron microscope. In this study, various components included several electro-magnetic lens and main body which are essentially constructed for column unit are designed and manufactured. And this established column unit will be used for next connected study in the development step of scanning electron microscope based electron beam machining system.

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마이크로 칼럼의 전자 방출원 위치 오차의 영향 (Effect of the Off-axis distance of the Electron Emitting Source in Micro-column)

  • 이응기
    • 반도체디스플레이기술학회지
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    • 제9권1호
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    • pp.17-21
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    • 2010
  • Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

전자빔 가공기를 위한 고전압 발생 장치 설계 (Design for High Voltage Generator of Electron Beam Manufacturing System)

  • 임선종;강재훈;이찬홍
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.564-567
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    • 2004
  • In the manufacture of integrated circuits, photolithography is the lowest yield step in present production lines. Electron beams form a powerful set of tools with which to attack this problem. Electron beams can be used to make patterns that are smaller than can a photolithography. We design a high voltage generator of electron beam manufacturing system. For this purpose, first, the configuration of electron beam manufacturing system was analyzed. Second, the basic configuration of a high voltage generator and test results were presented.

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주사 전자 현미경에서 전자빔 프르브 생성 (Creation of Electron Beam Probe in Scanning Electron Microscopy)

  • 임선종;이찬홍
    • 한국공작기계학회논문집
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    • 제17권5호
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    • pp.52-57
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    • 2008
  • Most of the electrons emitted from the filament, are captured by the anode. The portion of the electron current that leaves the gun through the hole in the anode is called the beam current. Electron beam probe is called the focused beam on the specimen. Because of the lenes and aperture, the probe current becomes smaller than the beam current. It generate various signals(backscattered electron, secondary electron) in an interaction with the specimen atoms. Backscattered electron provide an useful signal for composition and local specimen surface inclination. Secondary electron is used far the formation of surface imagination. The steady electron beam probe is very important for the imagination formation and the brightness. In this paper, we show the results of developed elements that create electron beam probe and the measured beam probe in various acceleration voltages by Faraday cup. These data are used to analysis and improve the performance of the system in the development.

OPTIMIZATION OF OPERATION PARAMETERS OF 80-KEV ELECTRON GUN

  • Kim, Jeong Dong;Lee, Yongdeok;Kang, Heung Sik
    • Nuclear Engineering and Technology
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    • 제46권3호
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    • pp.387-394
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    • 2014
  • A Slowing Down Time Spectrometer (SDTS) system is a highly efficient technique for isotopic nuclear material content analysis. SDTS technology has been used to analyze spent nuclear fuel and the pyro-processing of spent fuel. SDTS requires an external neutron source to induce the isotopic fissile fission. A high intensity neutron source is required to ensure a high for a good fissile fission. The electron linear accelerator system was selected to generate proper source neutrons efficiently. As a first step, the electron generator of an 80-keV electron gun was manufactured. In order to produce the high beam power from electron linear accelerator, a proper beam current is required form the electron generator. In this study, the beam current was measured by evaluating the performance of the electron generator. The beam current was determined by five parameters: high voltage at the electron gun, cathode voltage, pulse width, pulse amplitude, and bias voltage at the grid. From the experimental results under optimal conditions, the high voltage was determined to be 80 kV, the pulse width was 500 ns, and the cathode voltage was from 4.2 V to 4.6 V. The beam current was measured as 1.9 A at maximum. These results satisfy the beam current required for the operation of an electron linear accelerator.

전자빔 용접기 진공 작업실의 구조설계 (Structural Design on the Vacuum Chamber of Electron Beam Welding System)

  • 이영신;류충현;서정;한유희
    • 한국레이저가공학회지
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    • 제1권1호
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    • pp.11-17
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    • 1998
  • The electron beam welding system has the advantages of the high power density, narrow welding section, and small thermal distortion of a workpiece. Recently, the electron beam welding system is widely used to the airplane engineering, nuclear power plant, and automobile industry. In the present paper, the structural analyses on the vacuum chamber of the electron beam welding system are performed by the F.E.M. analysis. The stiffening characteristics on the geometric shape, stiffener height and stiffener span are investigated. The deflection of the stiffened vacuum chamber under pressure is minimized by longitudinal and transverse stiffeners which are continuous in both direction.

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전자총 시스템 제작과 이를 이용한 고융점 금속 증발에 관한 연구 (Study on the evaporation of high melting temperature metal by using the manufactured electron hem gun system)

  • 정의창;노시표;김철중
    • 한국진공학회지
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    • 제12권1호
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    • pp.1-6
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    • 2003
  • 50 kW급 출력의 전자빔을 발생시킬 수 있는 축선 방식 전자총 (axial electron beam gun)과 전원장치를 제작하였다. 전자총은 전자빔 발생장치와 전자빔 궤적제어장치로 이루어졌다. 전자빔 발생장치는 필라멘트와 음극(cathode), 양극(anode)으로 구성되었고 전자빔의 최대전류는 2A, 가속전압은 평균 25kV이다. 전자빔 궤적제어장치는 전자빔의 크기를 조절하는 초점 (focusing) 코일과 전자빔의 방향을 조절하는 편향(deflection) 코일 및 주사 (scanning) 코일로 구성되었다. 전자총과 별개로 진공용기 내부에 Helmholtz 코일을 설치하여 시료의 표면에 입사되는 전자빔의 입사각도를 최적화시켰다. 각 부분의 동작 특성을 측정한 결과와 제작된 전자총으로 고융점 원소인 지르코늄 (zirconium, Zr)과 가돌리늄(gadolinium, Gd) 금속을 증발시킨 결과를 정리하였다.