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Design and Fabrication of PZT Disc Actuated Micro Pump for Bio-Applications (II): Optimal Design & Fabrication of Embedding-type PZT Module

바이오용 압전디스크방식 마이크로 펌프 설계 및 제작 (II) -임베드방식의 압전모듈의 최적설계 및 제작-

  • 김형진 (강원대학교 기계메카트로닉스공학과 대학원) ;
  • 장인배 (강원대학교 기계메카트로닉스공학과) ;
  • 서영호 (강원대학교 기계메카트로닉스공학과) ;
  • 김병희 (강원대학교 기계메카트로닉스공학과)
  • Received : 2011.07.13
  • Accepted : 2011.12.27
  • Published : 2012.06.15

Abstract

Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, most of the conventional micro pumps still have some limitations to miniaturize their controller system and to obtain the sufficient back pressure which can rise over the inner pressure of human body or experimental animals. In this paper, to overcome these limitation, a new PZT disc and its controller were designed and fabricated to get the sufficient flowrate and the back pressure with guaranteeing embeddability of the controller into pumping body. The amplitudes of the disc deflections were as large as 40 ${\mu}m$ at 200 V - 100 Hz condition. As results of experiments, the flow rate and the back pressure increase when the frequency increases. The obtainable maximum flow rate and back pressure are 5.2 ml/min at 95 Hz and 13.14 kPa at 90 Hz respectively.

Keywords

References

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