Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Improvement of Sensitivity to In-plane Strain/Deformation Measurement by Micro-ESPI Technique

마이크로 ESPI 기법에 의한 면내 변형 측정 민감도 향상

  • 김동일 (전남대학교 기계공학과) ;
  • 기창두 (전남대학교 기계시스템공학부) ;
  • 허용학 (한국표준과학연구원 환경안전계측연구센터)
  • Published : 2006.08.01
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Abstract

Enhancement methods of sensitivity to in-plane strain measurement by micro-ESPI(Electronic Speckle Pattern Interferometry) technique were proposed using TiN and Au thin films. Micro-tensile strain over the micro-tensile specimens, prepared in micro-scale by those films, was measured by micro-tensile loading system and micro-ESPI system developed in this study. The subsequent measurement of in-plane tensile strain in the micro-sized specimens was introduced using the micro-ESPI technique, and the micro-tensile stress-strain curves for these films were determined. To enhance the sensitivity to measurement of in-plane tensile strain, algorithms of the phase estimation by using curve fitting of inter-fringe and the discrete Fourier Transform with object-induced dynamic phase shifting were developed. Using these two algorithms, the micro-tensile strain-stress curves were generated. It is shown that the algorithms for enhancement of the sensitivity suggested in this study make the sensitivity to measurement of the in-plane tensile strain increase.

Keywords

References

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