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Improvement of Sensitivity to In-plane Strain/Deformation Measurement by Micro-ESPI Technique  

Kim Dong-Iel (전남대학교 기계공학과)
Kee Chang-Doo (전남대학교 기계시스템공학부)
Huh Yong-Hak (한국표준과학연구원 환경안전계측연구센터)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.8, 2006 , pp. 54-63 More about this Journal
Abstract
Enhancement methods of sensitivity to in-plane strain measurement by micro-ESPI(Electronic Speckle Pattern Interferometry) technique were proposed using TiN and Au thin films. Micro-tensile strain over the micro-tensile specimens, prepared in micro-scale by those films, was measured by micro-tensile loading system and micro-ESPI system developed in this study. The subsequent measurement of in-plane tensile strain in the micro-sized specimens was introduced using the micro-ESPI technique, and the micro-tensile stress-strain curves for these films were determined. To enhance the sensitivity to measurement of in-plane tensile strain, algorithms of the phase estimation by using curve fitting of inter-fringe and the discrete Fourier Transform with object-induced dynamic phase shifting were developed. Using these two algorithms, the micro-tensile strain-stress curves were generated. It is shown that the algorithms for enhancement of the sensitivity suggested in this study make the sensitivity to measurement of the in-plane tensile strain increase.
Keywords
Improvement of Sensitivity; Thin film; Micro-ESPI; Object-Induced Dynamic Phase Shifting;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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