Journal of Advanced Marine Engineering and Technology

The Korean Society of Marine Engineering (한국마린엔지니어링학회)
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Dynamic and Static Characteristics of Sensor Tube for Mass Flow Controller

질량유량제어기용 센서튜브의 정특성과 동특성에 관한 연구

  • Published : 2004.03.01
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Abstract

In this paper, the static and dynamic characteristics in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC. the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations among flow rate, heat generated by heating wire. and sensor location were investigated to find optimized condition. Finally, the relation between sensor voltage through analog digital conversion(ADC) and flow rate in the sensor tube can be represented. Based on this study, static and dynamic characteristics of sensor tube can be used for design of mass flow controller.

Keywords

References

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