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Dynamic and Static Characteristics of Sensor Tube for Mass Flow Controller  

김영수 (부경대학교 기계공학부)
이상경 ((주)엠파인)
Publication Information
Journal of Advanced Marine Engineering and Technology / v.28, no.3, 2004 , pp. 531-537 More about this Journal
Abstract
In this paper, the static and dynamic characteristics in the sensor tube of a mass flow controller(MFC) were studied by experiments. In the sensor tube of MFC. the difference of temperature between inlet and outlet was necessary for calculating the mass flow rate. Therefore, the relations among flow rate, heat generated by heating wire. and sensor location were investigated to find optimized condition. Finally, the relation between sensor voltage through analog digital conversion(ADC) and flow rate in the sensor tube can be represented. Based on this study, static and dynamic characteristics of sensor tube can be used for design of mass flow controller.
Keywords
Mass Flow Controller; Heating Wire; Static Characteristics; Dynamic Characteristics; Analog Digital Conversion(ADC);
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