대한기계학회논문집A (Transactions of the Korean Society of Mechanical Engineers A)

  • 제27권6호
  • /
  • Pages.997-1006
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  • 2003
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  • 1226-4873(pISSN)
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  • 2288-5226(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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LIGA공정을 이용한 정밀 고분자 광도파로 제작

Fabrication of Polymeric Optical Waveguide by LIGA

  • 김진태 (한국전자통신연구원 광접속모듈팀) ;
  • 김병철 (한국전자통신연구원 광접속모듈팀) ;
  • 최춘기 (한국전자통신연구원 광접속모듈팀) ;
  • 윤근병 (한국전자통신연구원 광접속모듈팀) ;
  • 정명영 (한국전자통신연구원 광접속모듈팀)
  • 발행 : 2003.06.01
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초록

LICA technique evolved as a basic fabrication process fur micro-structure. The present report deals with the basic technological features in the sequence of the LIGA technique such as deep x-ray lithography(DXRL), electroplating, and moulding processes at Pohang Light Source (PLS). We designed 3-D structured master for fabrication of polymeric optical wavegude and manufactured polymeric optical wavegude with the same using hot embossing process. Polymeric optical waveguide could be produced with ${\pm}$ 1 $\mu\textrm{m}$ accuracy and good surface roughness.

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참고문헌

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