• 대한기계학회논문집A
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• 제27권6호
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• pp.997-1006
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• 2003

LICA technique evolved as a basic fabrication process fur micro-structure. The present report deals with the basic technological features in the sequence of the LIGA technique such as deep x-ray lithography(DXRL), electroplating, and moulding processes at Pohang Light Source (PLS). We designed 3-D structured master for fabrication of polymeric optical wavegude and manufactured polymeric optical wavegude with the same using hot embossing process. Polymeric optical waveguide could be produced with ${\pm}$ 1 $\mu\textrm{m}$ accuracy and good surface roughness.

• 대한기계학회논문집A
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• 제27권9호
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• pp.1517-1523
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• 2003

Deep X-ray lithography (DXRL), a fabrication method for the production of microstructures with a high aspect ratio, plays an important role in the subsequent electroplanting process. However, secondary radiation is generated during X-ray exposure and damages the resist adhesion to the metal layer. To solve adhesion problems, we modified the conventional DXRL process, changing the sequence of polymer adhesion in DXRL process. With optimized X-ray exposure and development conditions based on a calculated and modified X-ray power spectrum, we fabricated various polymer microstructures and achieved a maximum aspect ratio of 40.