한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 춘계학술대회 논문집
- /
- Pages.257-258
- /
- 2006
- /
- 2005-8446(pISSN)
비점수차법을 이용한 변위센서 개발
Micro Displacement Sensor Using an Astigmatic Method
초록
This paper presents the displacement sensor based on astigmatic method that has a small measurement range. The sensor has the characteristic that the measuring range is changed easily by exchanging a objective lens or distance between a objective lens and a collimator lens. The measuring range and resolution is evaluated by a laser interferometer.
키워드