Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.05a
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- Pages.257-258
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- 2006
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- 2005-8446(pISSN)
Micro Displacement Sensor Using an Astigmatic Method
비점수차법을 이용한 변위센서 개발
Abstract
This paper presents the displacement sensor based on astigmatic method that has a small measurement range. The sensor has the characteristic that the measuring range is changed easily by exchanging a objective lens or distance between a objective lens and a collimator lens. The measuring range and resolution is evaluated by a laser interferometer.
Keywords