한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 2005년도 춘계학술대회 논문집
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- Pages.9-14
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- 2005
SEM용 전자 검출기의 설계 및 제작
A Study on the Secondary Electron Detector for use in Scanning Electron Microscope
- 발행 : 2005.05.01
초록
The nature of the signals collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired image is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important in pulling up the resolution of SEM This study presents the secondary electron detector for use in scanning electron microscope, electric circuit and I/V conversion circuit for driving that detector.
키워드