Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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A Study on the Secondary Electron Detector for use in Scanning Electron Microscope

SEM용 전자 검출기의 설계 및 제작

  • 이상욱 (울산대학교 대학원 기계자동차공학과) ;
  • 전종업 (울산대 기계자동차공학부) ;
  • 박기태 (울산대 대학원 기계자동차공학과) ;
  • 박규열 (울산대 기계자동차공학부)
  • Published : 2005.05.01
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Abstract

The nature of the signals collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired image is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important in pulling up the resolution of SEM This study presents the secondary electron detector for use in scanning electron microscope, electric circuit and I/V conversion circuit for driving that detector.

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