• Proceedings of the Korea Crystallographic Association Conference
• /
• 2002.11a
• /
• pp.44-44
• /
• 2002

방사광 X-선 반사도를 이용하여 나노 스케일의 두께를 가진 oxynitride 박막의 계면 구조 및 두께를 측정하였다. Oxynitride 박막에서 nitrogen 분포의 분석은 두께가 극도로 얇아지는 요즘의 반도체 제작에서 매우 중요한 과제로 대두되고 있다. (1) X-선 반사도 측정을 분석하여 박막 깊이에 따른 전자밀도분포와 계면에서의 거칠기 및 각 층의 두께가 결정되었다. X-선 반사도 측정 분석으로부터 Nitrogen은 SiO₂와 Si substrate 계면에 위치하며, 화학조성분포와 층 구조의 상관성을 SIMS를 이용한 조성분포 측정과 비교하였다.

• Journal of radiological science and technology
• /
• v.33 no.3
• /
• pp.179-184
• /
• 2010

A hard X-ray microscope system for obtaining images of nano-spatial resolution has been widely studied and requires monochromatic X-ray. A multilayer mirror of 84% reflectivity was designed to acquire tungsten characteristic X-ray of 8.4 keV from the white beam generated from an X-ray tube, and the C/W multilayer mirror of $50{\times}50\;mm$ size and 5.65 nm d-spacing was fabricated by the ion-beam sputtering system. The C/W multilayer had a uniformity of 99.5%, and the structure of the multilayer mirror was verified by a TEM image. The obtainable x-ray reflectivity for the C/W multilayer mirror at 8.4 keV was estimated from measuring the X-ray reflectivity using the copper characteristic X-ray of 8.05 keV. Monochromatic X-ray of 8.4 keV was generated by combining a X-ray tube, and the reflectivity and monochromaticity were 77.1% and 0.21 keV, respectively. Monochromatic X-ray generated from the combination of an X-ray tube and an C/W multilayer mirror has enough potential to use X-ray source for hard X-ray microscope system of laboratory size. If the C/W multilayer mirror of d-spacing of a few nanometers can be fabricated, monochromatic X-ray corresponded to 17.5 keV, molybdenum characteristic X-ray, can be obtained and applied to mammography in the medical application.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.24 no.12
• /
• pp.1704-1710
• /
• 2020

The high-energy X-ray imaging detector used for container inspection uses a thick scintillator to effectively acquire X-rays. X-ray incident on the scintillator is generally up to 9MeV. Therefore, to effectively collect X-ray, it is necessary to use a thick scintillator. To collect the light generated by the reaction between X-ray and scintillator, an optical-sensor must be combined with the scintillator. In this study, a study on the design conditions of the detector using a CdWO4 and a small sensor is described. To calculate the collected light according to the change of the scintillator thickness and the reflectance of surface, MCNP6 and DETECT2000 were used. As a result of calculating, it was confirmed that when the reflectance of the surface was low, it was appropriate to select a scintillator with a thickness of 15 to 20-mm, but as the reflectance increased, it was confirmed that it was appropriate to select a CdWO4 with a thickness of 25 to 30-mm.

• Journal of the Korean Society of Radiology
• /
• v.3 no.4
• /
• pp.23-28
• /
• 2009

Monochromatic X-ray can make a medical image of high contrast under a low radiation dose and can be easily generated by combining an X-ray tube and a multilayer mirror. A W/C multilayer mirror was optimally designed for a characteristic X-ray generated from a X-ray tube with Mo target. The d-spacing and the thickness ratio in design parameters were determined under the maximum-reflectivity condition. Tolerances for deposition and alignment of the W/C multilayer mirror were calculated. Within a deposition tolerance of 0.2nm and a alignment tolerance of ${\pm}0.01^{\circ}$, 85% of the theoretical peak reflectivity could be achieved. A multilayer mirror can be widely used for making medical images because of generating high fluence monochromatic X-ray.

• Proceedings of the Optical Society of Korea Conference
• /
• 1999.08a
• /
• pp.134-135
• /
• 1999

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.118-118
• /
• 2013

DMM은 방사광가속기의 백색광으로부터 단색광을 추출하기 위해 두 개의 다층 박막 (multilayer) 거울을 사용하는데, 첫 번째 거울은 Bragg 반사를 통해 분광을 하여 단색광을 생산하는 용도이고, 두 번째 거울은 이 단색광을 반사시켜 지면과 평행하게 출사되게 하기 위함이다. 일반적으로 사용되는 DCM (Double Crystal Monochromator)과의 차이점은, Bragg 반사를 위해 DCM에서는 결정을 사용하는 반면 DMM은 밀도차이가 많이나는 두 종류의 물질을 교대로 쌓아 올린 다층 박막을 사용한다는 것이다. 다층 박막의 주기가 곧 Bragg 반사에서의 d-spacing이 되며, X-선 분광의 목적으로 사용되는 d-spacing은 10-50 $\AA$ 사이이다. DCM이 0.01% 대의 우수한 에너지 분해능을 보이는데 비해, DMM은 1% 정도이다. 이 때문에 출사광의 밝기가 DCM에 비해 100배 밝은 특징이 있어서 에너지 분해능보다 광량이 더 중요한 응용에서 DMM이 사용된다. X-선 영상이나 방사선치료가 바로 이러한 응용에 해당한다. DMM은 포항가속기연구소와 (주) 벡트론에서 공동 설계하였으며, (주)벡트론에서 제작하였다. 그림 1에 DMM의 외형과 내부 구조를 나타내었다. Bragg 각의 조절 범위는 0.24-0.9도 이다. 입사광과 출사광의 수직 방향 offset을 10 mm로 유지하기 위해 두 번째 다층 박막이 수평방향으로 1,000 mm 가량 이동할 수 있어야 한다. 이를 위해 두 대의 고니오미터 stage를 사용하여 각각 첫 번째 및 두 번째 다층 박막의 위치와 방향을 제어한다. 첫 번째 다층 박막을 제어하는 고니오미터 stage는 하부가 전체 프레임에 고정되어 있고, 이 고니오미터의 회전축에서 Bragg 각을 조절한다. 두 번째 다층 박막을 제어하는 고니오미터 stage는 높이방향과 수평방향으로 이동이 가능하다. 다층 박막의 pitch는 고니오미터의 회전축에서 조절한다. 그리고 tilt stage를 사용하여 다층 박막의 roll을 조절한다.

• Journal of the Korean Society of Radiology
• /
• v.12 no.1
• /
• pp.101-106
• /
• 2018

Multilayer mirrors have widely been used for monochromatization of X-ray with high reflection efficiency. The reflected X-ray energy or wavelength is determined by the d-spacing of a multilayer mirror and the incidence angle. The reflectivity critically depends on the number of bilayers and surface roughness on each interface. The multilayer mirror has a structure of alternative deposition of high and low Z-elements on the substrate. Each interface should be considered in the calculation of reflectivity. In this paper, we examine the degradation of reflectivity by the inter-diffusion combined with surface roughness on each interface for a W/Si multilayer mirror. In the depth-graded W/Si multilayer mirror, the FWHMs for angle and energy were larger than them of the uniform multilayer mirror. Inter-diffusion considerable gave rise to the degradation of reflectivity. To obtain measured reflectivity closed to the expected reflectivity, the inter-diffusion on W-Si and Si-W interfaces should be considered.

• Journal of the Korean Society of Radiology
• /
• v.9 no.4
• /
• pp.205-211
• /
• 2015

At a recent medical imaging technology, the major issue of X-ray diagnosis in breast cancer is the early detection of breast cancer and low patient's exposure dose. As one of studies to acquire a monochromatic X-ray, Technologies using multilayer mirror had been preceded. However, a uniform multilayer mirror that consists of uniform thin-film thickness can acquire a monochromatic X-ray only in the partial area corresponds to angle of incidence of white X-ray, so there are limits for X-ray imaging technology applications. In this study, we designed laterally graded multilayer mirror(below GML) that reflects same monochromatic X-ray over the entire area of thin-film mirror, which have the the thickness of the linear gradient that correspond to angle of incidence of white X-ray. By using ion-beam sputtering system added the mask control system we fabricated a GML which has size of $100{\times}100mm^2$. The GML is designed to achieve the monochromatic X-ray of 17.5kev energy and has thin-film thickness change from 4.62nm to 6.57nm(3.87nm at center). It reflects the monochromatic X-ray with reflectivity of more than 60 percent, FWHM of below 2.6keV and X-ray beam width of about 3mm. The monochromatic X-ray corresponded to 17.5keV using GML would have wide application in development of mammography system with high contrast and low dose.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.32 no.2
• /
• pp.192-197
• /
• 2012

In this paper, a non-contact microwave technique was presented to detect the surface crack of the metals. An open-ended coaxial cable line was used as a sensor at 11 GHz, and the reflection coefficients were measured by scanning along the metal surface including artificial surface cracks. A parameter, the K value which was defined as the difference between maximum and minimum reflection coefficients, was measured and used to estimate the crack depth. A linear relationship between the K value and crack depth was found. This study showed that non-contact detection of the surface cracks of metals is possible using the open-ended coaxial line sensor at X-band.

• Journal of the Mineralogical Society of Korea
• /
• v.3 no.2
• /
• pp.98-108
• /
• 1990

전자현미분석외에 금-은 고용체의 금 또는 은 성분을 결정할 수 있는 간편하고도 신뢰성 높은 측정법 개발은 응용 광물학자들에게 오랜 연구과제가 되어 왔다. 이를 달성하기 위한 방법으로 정량적으로 측정할 수 있는 단위포 상수, 반사도, 비중, 미경도 측정연구를 실시하였다. 이 실험을 위해 순수한 원소 금과 은을 5 at.% 간격으로 혼합하여 시료를 제작한 후 석영관을 사용하여 진공하에서 밀봉하였다. 고온에서 가열하여 용융시킨 후 서냉하여 얻어진 반응물을 각종 현미경, X 선 회절분석기, 전자현미분석기, 반사도측정기, 비중저울, 미경도측정기를 사용하여 분석하였다. 직경이 114.6 nm 인 Debye-Scherrer 카메라를 사용해 얻은 X 선분말회절자료로 계산한 단위포 상수의 크기는 은함량이 증가함에 따라 일정하게 증가한다. 반사도 측정에는 480nm와 546nm 두파장을 사용하였는데 두 파장 모두에 대해 은 함량이 증가할수록 반사도가 증가한다. 또한 480nm를 사용했을 때의 반사도 변화가 현저하므로 유용하다. 비중은 은 함량이 증가할수록 오히려 일정하게 감소한다. 한편, 25g과 50g 추를 사용하여 측정한 미경도 값은 금-은고용체내의 성분변화에 관계없이 불규칙하게 변하여 어떤 경향을 나타내지 않는다.