• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.356-356
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• 2007

Plasma immersion ion beam deposition (PIIBD) technique is a cost-effective process for the deposition of diamond like carbon thin film, the possible solid lubricant on large surface and a complex shape. We used PIIB process for the preparation of DLC thin film on $Al_2O_3$ with deposition conditions of deposition temperature range $200^{\circ}C$, working gas pressure of 1.310-1Pa. DLC thin films were coated by $C_2H_2$ ion beam deposition on $Al_2O_3$ after the ion bombardment of SiH4 as the bonding layer. Energetic bombardment of $C_2H_2$ ions during the DLC deposition to ceramic materials generated mixed layers at the DLC-Si interface which enhanced the interface to be highly bonded. Wear test showed that the low coefficient of friction of around 0.05 with normal load 2.9N and proved the advantage of the low energy ion bombardment in PIIBD process which improved the tribological properties of DLC thin film coated alumina ceramic. Furthermore, PIIBD was recognized as a useful surface modification technique for the deposition of DLC thin film on the irregular shape components, such as molds, and for the improvement of wear and adhesion problems of the DLC thin film, high temperature solid lubricant.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 추계학술대회 논문집
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• pp.33-36
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• 1999

In this paper, $Ba_{0.5}$Sr$_{0.5}$TiO$_3$ thin-films were prepared on Pt/Ti/Si0$_2$/Si substrates by RF magnetron sp-uttering method. We investigated electric and dielectric properties of BST thin-films with various ann-ealing temperature using in-sute RTA. Deposition conditions of BST films were set substrate temperat-ure, 30$0^{\circ}C$ and working gas ratio, Ar:O$_2$=90:10. After BST films deposited, we fabricated a capacitor of MIM structure with Al top electrode for measurement. Post-annealing using RTA performed at 40$0^{\circ}C$, $600^{\circ}C$, 80$0^{\circ}C$ for 60 sec, respectively. Also we exacted crystallization and composition of BST thin-films by XRD analysis. In measurement result, this capacitors showed a dielectric constant of about 200 at 1MHz and leakage current density of 5$\times$10$^{-8}$ A/$\textrm{cm}^2$ at 1.5V Microstructure of BST thin-films exhibited effective quality in low-temperature annealed 71ms than high-temperature annealed 71ms.s.s.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.408-411
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• 2003

Al doped Zinc Oxide(ZnO:Al) films, which is widely used as a transparent conductor in optoelectronic devices such as solar cell, liquid crystal display, plasma display panel, thermal heater, and other sensors, were prepared by using the capacitively coupled DC magnetron sputtering method. The influence of the substrate temperature, working gas pressure, discharge power and doping amounts of Al on the electrical, optical and morphological properties were investigated experimentally. The effect of bias voltage on the electrical properties of ZnO thin film were also studied. Films with lowest resistivity of $5.4{\times}10^{-4}\;{\Omega}-cm$ have been achieved in case of films deposited at 1mtorr, $400^{\circ}C$ with a substrate bias of +10V for 840nm in film thickness.

• Transactions on Electrical and Electronic Materials
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• 제6권2호
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• pp.46-50
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• 2005

BST thin films were etched with inductively coupled CF$_{4}$/(Cl$_{2}$+Ar) plasmas. The etch characteristics of BST thin films as a function of CF$_{4}$/(Cl$_{2}$+Ar) gas mixtures were analyzed using optical emission spectroscopy (OES) and Langmuir probe. The BST films in CF$_{4}$/Cl$_{2}$/Ar plasma is mainly etched by the formation of metal chlorides which depends on the emission intensity of the atomic Cl and the bombarding ion energy. The maximum etch rate of the BST thin films was 53.6 nm/min because small addition of CF$_{4}$ to the Cl$_{2}$/Ar mixture increased chemical and physical effect. A more fast etch rate of BST films can be obtained by increasing the DC bias and the RF power, and lowering the working pressure.

• 대한금속재료학회지
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• 제50권1호
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• pp.13-22
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• 2012

Forged and flat-bar rolled STD11 tool steel shows anisotropic dimensional change during heat treatment. The dimensional change in the rolling direction is larger than that in the transverse direction. The cause of the anisotropic dimensional change is that the steel is anisotropic in composition, microstructure and other properties. The decrease of anisotropic distortion in tool steel is important for making better precision cold working dies. In this study, the effect of ingot weight and hot rolling reduction ratio on the anisotropic dimensional change of STD11 during heat treatment has been studied. Dimensional change was evaluated by simulating a real heat treatment process, including gas quenching and tempering. Experimental results showed that all the rolled flat-bar products had anisotropic distortion to some degree, but the anisotropic distortion was reduced as hot rolling ratio increased. Ingot weight had a little effect on anisotropic distortion. Microstructural observation showed that the anisotropic dimensional change of STD11 tool steel was closely related to the amount, shape and distribution of coarse carbides.

• 농업생명과학연구
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• 제44권3호
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• pp.7-14
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• 2010

Alternative subirrigation way, capillary wick system (CWS) was tested to reduce labor cost, waste water, contamination of ground water, and use of fungicide compared to overhead irrigation system (OIS). CWS helped reduce remarkably the working hours for watering from 4 hours in OSI to just 5 minutes. Labor cost was saved 98% in CWS compared to OIS. By the physical characteristics of various growing media, 1 coconut coir+2 perlite (v/v) mixture was selected because it had an ideal distribution of three phase, e.g. 1 solid: 1 liquid: 2 gas phase. Medium mixture containing scoria had so high bulk and particle density to hurt root. In bark-containing medium, the liquid phase and the percent saturation of liquid phase with time elapsed was lower than that of other mixture. It meant that the mixture contained very low level of water. Application of CWS for cyclamen pot production played an important role in reducing the incident of fusarium wilt symptom from 18% in conventional over watering system to 4%. Cyclamen pot irrigated by capillary wick had shorter petiole and more leaves than those by overhead watering. As a result, this system was highly beneficial to get uniform pot products with high quality. It improved water and nutrient solution efficiency relative to conventional overhead irrigation system (OIS).

• 한국표면공학회지
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• 제54권6호
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• pp.348-356
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• 2021

In this study, optical diagnosis of plasma was performed for nitrogen doping in graphene using a horizontal inductively coupled plasma (ICP) system. Graphene was prepared by mechanical exfoliation and the ICP system using nitrogen gas was ignited for plasma-induced and defect-suppressed nitrogen doping. In order to derive the optimum condition for the doping, plasma power, working pressure, and treatment time were changed. Optical emission spectroscopy (OES) was used as plasma diagnosis method. The Boltzmann plot method was adopted to estimate the electron excitation temperature using obtained OES spectra. Ar ion peaks were interpreted as a reference peak. As a result, the change in the concentration of nitrogen active species and electron excitation temperature depending on process parameters were confirmed. Doping characteristics of graphene were quantitatively evaluated by comparison of intensity ratio of graphite (G)-band to 2-D band, peak position, and shape of G-band in Raman profiles. X-ray photoelectron spectroscopy also revealed the nitrogen doping in graphene.

• 전기전자학회논문지
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• 제23권2호
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• pp.524-528
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• 2019

다양한 종류의 방전 셀이 존재하고 있지만, 공통적으로 모든 방전 셀은 보다 낮은 구동 전압에서 보다 높은 효율 특성을 가지는 것을 우선적인 목표로 한다. 이러한 특성 개선을 위해 방전셀 내부의 방전 경로를 길게 하거나 구동 가스의 성분을 변화시키는 연구가 많이 이루어진다. 본 논문에서는 2차원 유체 시뮬레이션을 이용하여 방전전극 사이의 간격에 따른 방전전압 (개시전압 및 유지전압) 및 휘도와 효율의 변화를 계산하였다. 또한, 다양한 하전입자와 여기입자 및 파장별 진공자외선의 변화를 살펴보고 휘도와 효율의 원인을 연구해 보았다.

• 반도체디스플레이기술학회지
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• 제16권4호
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• pp.5-10
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• 2017

This paper analyzed the heat transfer characteristics on the outer surface of the ambient air vaporizer which received the heat from the air through natural convection by using numerical and experimental methods. The working fluid was a liquid nitrogen. The experimental variables were the length (2,000 mm, 1,800 mm, 1,600 mm) and width of the vaporizer fin and the fluid flow ($6.7m^3/h$, $7.1m^3/h$, $7.5m^3/h$). Based on the temperature data from the experiments, the heat transfer coefficient was calculated. Numerical analyses were also conducted in order to find the heat transfer coefficient for the range of Nusselt number which was difficult to get the data from experiments. The correlation equation between Nusselt number and Rayleigh number were suggested using both the experimental and numerical data.

• 대한건축학회연합논문집
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• 제20권6호
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• pp.1-8
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• 2018

In generally, the estimation work regarding building mechanical service system in comparison with other architectural estimations is time-consuming, and the process is continuously getting more difficult because of the increased usage of the attached piping materials such as fittings and supports in addition to their complicated construction processes. In order to improve this problem, the Korean authority provides a simple method to estimate the attached material rate regarding the main piping material, which is the most time-consuming work in the architectural mechanical estimation. However, to be an applicable method on construction site, a proper conversion rate of the attached piping material is still required for the proposed method regarding building usage and working types. Therefore, the purpose of this research is the suggestion of the material and labor cost rate of the attached piping materials such as the fittings and supports by work types and fitting methods of indoor fire, sprinkler, and extinguishing gas piping work of mechanical fire protection facilities in office buildings that have been designed after 2010.