Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.06a
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- Pages.356-356
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- 2007
Solid Lubrication Characteristics of DLC Coated Alumina Seals in High Temperature
- Ok, Chul-Ho (Department of Electrical and Electronic Engineering, Yonsei Univ.)
- 옥철호 (연세대학교 전기전자공학부)
- Published : 2007.06.21
Abstract
Plasma immersion ion beam deposition (PIIBD) technique is a cost-effective process for the deposition of diamond like carbon thin film, the possible solid lubricant on large surface and a complex shape. We used PIIB process for the preparation of DLC thin film on