• Title/Summary/Keyword: wet-plasma

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Surface treatment of Si wafer for solar cell using reactive plasma method (반응성 플라즈마를 이용한 태양전지용 Si기판의 표면 처리)

  • Park, Byung-Wook;Kwak, Dong-Joo;Sung, Youl-Moon
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1305-1306
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    • 2007
  • To lower the fabrication cost of silicon solar cells, a surface treatment using a dielectric barrier discharge instead of a wet cleaning technique was examined on electrode surfaces on silicon solar cells. The fill factor obtained through measuring current-voltage characteristics was evaluated, and the treated surface state was characterized by energy-dispersive X-ray. It was found that the dielectric barrier discharge effectively activated the electrode surface and the surface treatment on finger electrodes contributed greatly to improve the fill factor.

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Design, Fabrication of Electromagnetic Microvalve for Drug Delivery Systems (약물 전달용 전자력 마이크로 밸브의 설계 및 제작)

  • Lim, In-Ho;Lee, Ki-Jung;Yoon, Hyeun-Joong;Sim, Woo-Young;Yang, Sang-Sik
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1526-1527
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    • 2007
  • This paper presents the design, fabrication and experimental results of an electromagnetic microvalve for drug delivery systems. The microvalve consists of two silicon substrates with a silicone rubber diaphragm and a flow channel, a PDMS layer, and an electromagnetic actuator. Each substrate is fabricated by using the silicon wet etch, SU-8 mold process and $O_2$ plasma bonding.

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Carbon Fiber Surface treatment for high density of CNT (높은 밀도의 CNT on CF 합성을 위한 CF 표면처리공정)

  • Choi, Kang-Ho;Sim, Won-Hyeon;Lee, Hui-Su;Im, Dong-Chan;Jeong, Yong-Su;Lee, Gyu-Hwan
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.10a
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    • pp.181-181
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    • 2009
  • 탄소섬유의 우수한 기계적, 화학적, 전기적 특성을 이용한 산업전반에 대한 연구가 활발히 수행되어 지고 있다. 본 연구에서는 탄소섬유를 supercapacitor의 전극과 복합체에 활용하기 위해서 탄소섬유상에 탄소나노튜브를 증착시키는 실험을 수행하였다. 균일하고 높은 증착 밀도의 탄소나노튜브를 증착시키기 위해서 본 연구에서는 기존의 CF 표면처리 방법- anodizing, plasma treatment, heat treatment등과 달리 간단한 wet-process방법을 이용해 CF 표면처리 및 catalyst증착공정을 동시에 수행하여 고밀도의 CNT를 증착하였다.

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Biological applications of the NanoSuit for electron imaging and X-microanalysis of insulating specimens

  • Ki Woo Kim
    • Applied Microscopy
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    • v.52
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    • pp.4.1-4.11
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    • 2022
  • Field emission scanning electron microscopy (FESEM) is an essential tool for observing surface details of specimens in a high vacuum. A series of specimen procedures precludes the observations of living organisms, resulting in artifacts. To overcome these problems, Takahiko Hariyama and his colleagues proposed the concept of the "nanosuit" later referred to as "NanoSuit", describing a thin polymer layer placed on organisms to protect them in a high vacuum in 2013. The NanoSuit is formed rapidly by (i) electron beam irradiation, (ii) plasma irradiation, (iii) Tween 20 solution immersion, and (iv) surface shield enhancer (SSE) solution immersion. Without chemical fixation and metal coating, the NanoSuit-formed specimens allowed structural preservation and accurate element detection of insulating, wet specimens at high spatial resolution. NanoSuit-formed larvae were able to resume normal growth following FESEM observation. The method has been employed to observe unfixed and uncoated bacteria, multicellular organisms, and paraffin sections. These results suggest that the NanoSuit can be applied to prolong life in vacuo and overcome the limit of dead imaging of electron microscopy.

Preliminary Study on Desizing and Dyeing Using Low Temperature Plasma (저온 플라즈마를 이용한 호발 및 염색 선행연구)

  • Bae, Paek-Hyun;Jo, Hun-Je;Kim, Hyo-Jin;Lee, Yeon-Hee;Park, Sung-Min;Kim, Jeong-Gyu;Jung, Jin-Ho
    • Journal of Korean Society of Environmental Engineers
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    • v.27 no.9
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    • pp.946-951
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    • 2005
  • In this wort plasma treatment was evaluated as an alternative clean desizing technology. Size materials such as PVA(polyvinyl alcohol), PACL(polyacrylic acid esters) and their mixture on PET(polyethylene terephthalate) fabrics were treated by $N_2$ and $O_2$ plasma. $O_2$ plasma was more efficient in size removal than $N_2$ plasma, and the removal of PVA was higher than that of PACL. SEM(scanning emission microscopy) pictures of the plasma treated samples directly proved the disappearance of sizing agents. After $O_2$ plasma treatment, the PET fabrics were subjected to conventional desizing process. Compared with untreated fabrics, the desizing effluent from the treated fabrics gave lower TOC, COD and $BOD_5$ values. This indicates plasma treatment not only serves to directly remove sizing agents but also offered several advantages by changing the chemical properties of sizing agents. Lastly, the effect of plasma desizing process on dyeing was examined using color difference and dyeing fastness tests. The CCM(computer color matching) results showed rotor difference between PET fabric desized by $O_2$ plasma treatment for 20 min and reference PET fabric desized by the conventional wet desizing process was around 1. This suggests the treated PET fabric can be directly subjected to dyeing process without any additional process. The plasma treated fabric also gave a good result of dyeing fastness so that grades of laundering, crocking, heat and light fastness were same or even better than the reference PET fabric did.

A Study on the Ohmic Contacts and Etching Processes for the Fabrication of GaSb-based p-channel HEMT on Si Substrate (Si 기판 GaSb 기반 p-채널 HEMT 제작을 위한 오믹 접촉 및 식각 공정에 관한 연구)

  • Yoon, Dae-Keun;Yun, Jong-Won;Ko, Kwang-Man;Oh, Jae-Eung;Rieh, Jae-Sung
    • Journal of IKEEE
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    • v.13 no.4
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    • pp.23-27
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    • 2009
  • Ohmic contact formation and etching processes for the fabrication of MBE (molecular beam epitaxy) grown GaSb-based p-channel HEMT devices on Si substrate have been studied. Firstly, mesa etching process was established for device isolation, based on both HF-based wet etching and ICP-based dry etching. Ohmic contact process for the source and drain formation was also studied based on Ge/Au/Ni/Au metal stack, which resulted in a contact resistance as low as $0.683\;{\Omega}mm$ with RTA at $320^{\circ}C$ for 60s. Finally, for gate formation of HEMT device, gate recess process was studied based on AZ300 developer and citric acid-based wet etching, in which the latter turned out to have high etching selectivity between GaSb and AlGaSb layers that were used as the cap and the barrier of the device, respectively.

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Analytic study on arsenic content in plastic materials (플라스틱 소재의 비소 함유량 분석에 관한 연구)

  • Lee, Jae-In;Choi, Zel-Ho;Choi, Ki-In;Ko, Byung-Rae;Choi, In-Suk;Cho, Hun-Sik
    • Analytical Science and Technology
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    • v.25 no.6
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    • pp.402-409
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    • 2012
  • Quantitative analytical condition for arsenic in plastic materials by the flow injection-hydride generation-inductively coupled plasma-atomic emission spectrometry was studied. The plastic samples were dissolved by wet-acid digestion method and microwave-acid digestion method. The reproducibility and accuracy in this method was verified using of certified reference materials(CRMs) CRM-EC680k and CRM-EC681k. The analyical results agrees with certified value within the range of uncertainty. The results of CRM-EC680k wer 4.1~4.3 mg/kg (certified value $4.1{\pm}0.5$ mg/kg), and the results of CRM-EC681k were 28.9~30.6 mg/kg (certified value $29.1{\pm}1.8$ mg/kg).

Fermented soybeans by Rhizopus oligosporus reduce femoral bone loss in ovariectomized rats

  • Yoo, Hyun-Wook;Chang, Moon-Jeong;Kim, Sun-Hee
    • Nutrition Research and Practice
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    • v.8 no.5
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    • pp.539-543
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    • 2014
  • BACKGROUND/OBJECTIVES: Soy isoflavones are structurally similar to estrogen and bind to estrogen receptors, suggesting that they exhibit estrogenic activities; therefore, they are referred to as phytoestrogens. Fermentation may affect the bioavailability of isoflavones altering soy isoflavone glycosides in the form of aglycones. Thus, this study investigated the effects of fermented soybeans by Rhizopus oligosporus on bone metabolism in both young rats as a pilot test and in ovariectomized (ovx) old rats as a model of menopause. MATERIALS/METHODS: In the pilot test, a total of 24 seven-week-old female Sprague-Dawley (SD) rats were fed one of three diets for a period of four weeks: casein, unfermented soybean product, or fermented soybean product by R. oligosporus. In the ovx rat model, 20-week-old SD rats weighing 260-290 g underwent either sham-operation (n = 10) or bilateral ovariectomy (n = 30) and were then fed the AIN-93M diet for one week. Thereafter, rats were fed sham-casein, ovx-casein, ovx-soybean, or ovx-fermented soybean diet for five weeks. After decapitation, femoral bones were isolated and preserved in 9% formalin for assessment of bone mineral density (BMD), bone mineral content (BMC), and bone-breaking strength (BBS). RESULTS: Ovx rats showed significantly increased weight gain and decreased uterine wet weight. Of particular interest, ovx rats fed fermented soybeans showed increased uterine wet weights compared to control rats. Fermented soybean diet caused a significant increase in plasma 17-${\beta}$ estradiol concentrations in young rats, and 17-${\beta}$ estradiol levels were enhanced in ovx rats to match those of sham-operated ones. Significantly lower femoral BMD and BMC were observed in ovx rats compared to sham-operated controls, whereas bone areas did not differ statistically among the groups. In addition, BBS tended to be increased in ovx rats fed soybeans and fermented soybeans. CONCLUSIONS: Supplementation of fermented soybeans could have preventive and therapeutic effects against osteoporosis in postmenopausal women.

A Study on the Polysilicon Etch Residue by XPS and SEM (XPS와 SEM을 이용한 폴리실리콘 표면에 형성된 잔류막에 대한 연구)

  • 김태형;이종완;최상준;이창원
    • Journal of the Korean Vacuum Society
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    • v.7 no.3
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    • pp.169-175
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    • 1998
  • The plasma etching of polysilicon was performed with the HBr/$Cl_2/He-O_2$ gas mixture. The residual layers after photoresist strip were investigated using x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). The etch residue was identified as silicon oxide deposited on the top of the patterned polysilicon. In order to clarify the formation mechanism of the etch residue, the effects of various gas mixtures such as $Cl_2/He-O_2$and HBr/$Cl_2$were investigated. We found that the etch residue is well formed in the presence of oxygen, suggesting that the etch residue is caused by the reaction of oxvgen and non-volatile silicon halide compounds. Wet cleaning and dry etch cleaning processes were applied to remove the polysilicon etch residue, which can affect the electrical characteristics and further device processes. XPS results show that the wet cleaning is suitable for the removal of the etch residue.

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Control of Particle Size and Luminescence Property in Zn$_2$SiO$_4$:Mn Green Phosphor (Zn$_2$SiO$_4$:Mn 녹색형광체의 입도제어 및 발광특성)

  • Seong, Bu-Yong;Jeong, Ha-Gyun;Park, Hui-Dong
    • Korean Journal of Materials Research
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    • v.11 no.8
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    • pp.636-640
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    • 2001
  • In order to improve the optical Performance of green emitting phosphor for plasma display panel (PDP) application, the wet chemical method for preparing $Zn_{2-x}$ $SiO_4$:xMn (xi=0.02. 0.08) phosphor was designed. The spherical phosphor particles were obtained and the size can be between 0.5$\mu\textrm{m}$ and 2$\mu\textrm{m}$. The formation of phosphor, which had the willemite structure, was completed at relatively low temperature of 108$0^{\circ}C$. Also, photoluminescence Properties of the phosphors prepared were investigated under vacuum ultraviolet excitation. In particular, the emission intensity of Zn$_2$SiO$_4$:0.08Mn phosphor having the 1$\mu\textrm{m}$ of particle size was higher than that of commercial phosphor by 40%. The decay time of zinc silicate powder prepared as containing 8 mole% of manganese has been measured as 7.8ms.

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