• Title/Summary/Keyword: wet coating

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Development of Microlens Array for Maskless Lithography Application (Maskless lithography 응용을 위한 마이크로렌즈 어레이 개발)

  • Nam, Min-Woo;Oh, Hae-Kwan;Kim, Geun-Young;Seo, Hyun-Woo;Wei, Chang-Hyun;Song, Yo-Tak;Yang, Sang-Sik;Lee, Kee-Keun
    • Journal of the Microelectronics and Packaging Society
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    • v.16 no.4
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    • pp.33-39
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    • 2009
  • A microlens array (MLA) was developed based on the wet-etched quartz substrate and coating of UV adhesive on the substrate for maskless lithography application. The developed MLA has the focal length of ${\sim}45\;{\mu}m$ and the spot size of ${\sim}1\;{\mu}m$. The spot size of the focused beam passing through the MLA was detected by CCD camera, and its intensity was monitored by beam profiler. Uniform spots with nearly identical intensities were observed on the focal plane when a beam passes through the fabricated MLA. The focal length was varied depending on thickness of the coated UV adhesive. The thicker the thickness of the UV adhesive was, the shorter the focal length of the MLA was. With a general mask aligner, UV beam focusing was tested onto photoresist (PR). The beams were well focused onto PR when UV passes through the MLA. Depending on the variable distances from the MLA, beam sizes onto PR were controlled. Even at high temperature for a long time, the performances of the MLA were not changed.

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Analysis of Electrode Polarization in MCFC by a Reference Electrode (기준 전극을 이용한 용융탄산염 연료전지의 분극 특성 해석)

  • Han Jonghee;Lee Kab Soo;Chung Chang-Yeol;Yoon Sung-Pil;Nam Suk-Woo;Lim Tae-Hoon;Hong Seong-Ahn
    • Journal of the Korean Electrochemical Society
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    • v.4 no.3
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    • pp.125-131
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    • 2001
  • A long-term variation of electrode polarization in the MCFC has been analyzed successfully using a single cell with a Au, $CO_2/O_2$ reference electrode Four different cells with different components were operated and their electrode polarizations were analyzed. As published in the literatures, the cathode polarization was larger than that of the anode. The more stable operation of a single cell with the Al-coated cell frame up to 6,000hrs indicates that the corrosion at the cell frame, particularly wet seal area, plays an important role to determine the lifetime of a MCFC. At the initial stage of the cell operation, the voltage of the cell using a cathode stabilized by the $LiCoO_2$ coating was relatively low due to the high cathode polarization. As the cell was operated and the stabilized cathode was lithiated sufficiently, the cathode polarization decreased and the cell voltage was recovered. It was observed that the voltage of the cell using the $Li_2CO_3/Na_2CO_3$ electrolyte fluctuated with operation time and the cathode polarization fluctuated along with the cell voltage quite similarly. Although the mechanisms of the voltage fluctuation were not clear yet, the results imply that the voltage fluctuation was related with a reaction in the cathode side. After testing every single cell, the cathode polarization increased with the steep decrease in the cell voltage. Thus, the cathode should be improved in order to develop more durable MCFC.

Comparing Laboratory Responses of Engineered Emulsified Asphalt and Foamed Asphalt Mixtures for Cold In-place Recycling Pavement (현장 상온 재생 아스팔트 포장을 위한 고점착 유화 아스팔트 혼합물과 폼드 아스팔트 혼합물의 반응특성 비교)

  • Kim, Yong-Joo Thomas;Lee, Ho-Sin David
    • International Journal of Highway Engineering
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    • v.12 no.1
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    • pp.79-86
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    • 2010
  • Cold in-place recycling (CIR) using emulsified asphalt or foamed asphalt has become a more common practice in rehabilitating the existing asphalt pavement due to its cost effectiveness and the conservation of paving materials. As CIR continues to evolve, the engineered emulsified asphalt was developed to improve the field performances such as coating, raveling, retained stability value and curing time. The main objective of this research is to compare the laboratory responses of the engineered emulsified asphalt (CIR-EE) mixtures against the foamed asphalt (CIR-foam) mixtures using the reclaimed asphalt pavement (RAP)materials collected from the CIR project on U.S. 20 Highway in Iowa. Based on the visual observation of laboratory specimens, the engineered emulsified asphalt coated the RAP materials better than the foamed asphalt because the foamed asphalt is to create a mastic mixture structure rather than coating RAP materials. Given the same compaction effort, CIR-EE specimens exhibited lesser density than CIR-foam specimens. Both Marshall stability and indirect tensile strength of CIR-EE specimens were about same as those of CIR-foam specimens. However, Marshall stability and indirect tensile strength of the vacuum-saturated wet specimens of CIR-EE mixtures were higher than those of CIR-foam mixtures. After four hours of curing in the room temperature, the CIR-EE specimens showed less raveling than the CIR-foam specimens. On the basis of test results, it can be concluded that the CIR-EE mixtures is less susceptible to moisture and more raveling resistant than CIR-foam mixtures.

Fabrication and Characterization of an Antistiction Layer by PECVD (plasma enhanced chemical vapor deposition) for Metal Stamps (PECVD를 이용한 금속 스탬프용 점착방지막 형성과 특성 평가)

  • Cha, Nam-Goo;Park, Chang-Hwa;Cho, Min-Soo;Kim, Kyu-Chae;Park, Jin-Goo;Jeong, Jun-Ho;Lee, Eung-Sug
    • Korean Journal of Materials Research
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    • v.16 no.4
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    • pp.225-230
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    • 2006
  • Nanoimprint lithography (NIL) is a novel method of fabricating nanometer scale patterns. It is a simple process with low cost, high throughput and resolution. NIL creates patterns by mechanical deformation of an imprint resist and physical contact process. The imprint resist is typically a monomer or polymer formulation that is cured by heat or UV light during the imprinting process. Stiction between the resist and the stamp is resulted from this physical contact process. Stiction issue is more important in the stamps including narrow pattern size and wide area. Therefore, the antistiction layer coating is very effective to prevent this problem and ensure successful NIL. In this paper, an antistiction layer was deposited and characterized by PECVD (plasma enhanced chemical vapor deposition) method for metal stamps. Deposition rates of an antistiction layer on Si and Ni substrates were in proportion to deposited time and 3.4 nm/min and 2.5 nm/min, respectively. A 50 nm thick antistiction layer showed 90% relative transmittance at 365 nm wavelength. Contact angle result showed good hydrophobicity over 105 degree. $CF_2$ and $CF_3$ peaks were founded in ATR-FTIR analysis. The thicknesses and the contact angle of a 50 nm thick antistiction film were slightly changed during chemical resistance test using acetone and sulfuric acid. To evaluate the deposited antistiction layer, a 50 nm thick film was coated on a stainless steel stamp made by wet etching process. A PMMA substrate was successfully imprinting without pattern degradations by the stainless steel stamp with an antistiction layer. The test result shows that antistiction layer coating is very effective for NIL.

The Permeation Behaviors of $H_2S/CH_4$ using Polyimide Hollow Fiber Membranes (폴리이미드 중공사막을 이용한 $H_2S/CH_4$ 투과거동에 관한 연구)

  • Lee, Hyung-Keun;An, Young-Mo;Kim, Dae-Hoon;Jo, Hang-Dae;Seo, Yong-Seog;Park, Yeong-Seong
    • Membrane Journal
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    • v.19 no.4
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    • pp.261-267
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    • 2009
  • Polyimide which is the glassy polymer has high chemical resistance, thermal stability and high mechanical property. In this study, the polyimide hollow fiber membranes were prepared by the dry-jet wet phase inversion in order to investigate the permeation porperties of the $H_2S$ and $CH_4$. The morphology of prepared hollow fiber membranes and their permeation behaviors of $H_2S$ and $CH_4$ before and after silicon coating were evaluated. The permeance of $H_2S$ and $H_2S/CH_4$ selectivity increased due to plasticization with increasing the feed pressure. The permeance of KSM03b and selectivity of KSM03d were highest among the three type membranes used this experiments. The permeance decreased but the $H_2S/CH_4$ selectivity increased with increasing the air gap. The permeance reduced after silicon coating. However, the selectivity increased and the selectivity of KSM03d was 275 at 7 atm.

Study on The Effect of Electrode Drying Temperature on The Silicon Electrode Characteristics of Lithium Secondary Batteries (전극 건조 온도가 리튬이차전지의 실리콘 전극 특성에 미치는 영향 연구)

  • Dong-Wan Ham;Myeong-Hui Jeong;Jeong-Tae Kim;Beom-Hui Lee;Hyeon-Mo Moon;Sun-Yul Ryou
    • Journal of the Korean Electrochemical Society
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    • v.27 no.3
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    • pp.97-104
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    • 2024
  • The electrodes of commercialized lithium secondary batteries are manufactured through a wet coating process, and the drying process (DC) is a very important factor as to electrode production speed and process cost. In this study, silicon anodes were manufactured under high-temperature (180 ℃) and low-temperature (50 ℃) DC to investigate the quality and the electrochemical performance of Si-electrodes according to DC. High-temperature DC can quickly evaporate the solvent in the Si-electrode slurry, improving the electrode production rate. However, this also causes the electrode composite to peel off from the current collector. As a result, the Si-electrode's adhesion weakened, and the electrode coating's quality deteriorated. In addition, the Si-electrode manufactured under high-temperature was found to have a thicker composite material than the Si-electrode manufactured under low-temperature. Si-electrodes manufactured under high-temperature had higher sheet resistance and lower electrical conductivity than those manufactured under low-temperature. Consequently, the Si-electrode manufactured under low-temperature showed 152.5% superior cycle performance compared to the Si-electrode manufactured under high-temperature. (Discharge capacities of Si-electrodes manufactured under high-temperature and low-temperature DC were 844 and 1287 mAh g-1, respectively, after 300 cycles). Establishing the DC of Si-electrodes can easily provide new perspectives to improve the quality and stability of Si-electrodes.

Modern Paper Quality Control

  • Olavi Komppa
    • Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
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    • 2000.06a
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    • pp.16-23
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    • 2000
  • The increasing functional needs of top-quality printing papers and packaging paperboards, and especially the rapid developments in electronic printing processes and various computer printers during past few years, set new targets and requirements for modern paper quality. Most of these paper grades of today have relatively high filler content, are moderately or heavily calendered , and have many coating layers for the best appearance and performance. In practice, this means that many of the traditional quality assurance methods, mostly designed to measure papers made of pure. native pulp only, can not reliably (or at all) be used to analyze or rank the quality of modern papers. Hence, introduction of new measurement techniques is necessary to assure and further develop the paper quality today and in the future. Paper formation , i.e. small scale (millimeter scale) variation of basis weight, is the most important quality parameter of paper-making due to its influence on practically all the other quality properties of paper. The ideal paper would be completely uniform so that the basis weight of each small point (area) measured would be the same. In practice, of course, this is not possible because there always exists relatively large local variations in paper. However, these small scale basis weight variations are the major reason for many other quality problems, including calender blacking uneven coating result, uneven printing result, etc. The traditionally used visual inspection or optical measurement of the paper does not give us a reliable understanding of the material variations in the paper because in modern paper making process the optical behavior of paper is strongly affected by using e.g. fillers, dye or coating colors. Futhermore, the opacity (optical density) of the paper is changed at different process stages like wet pressing and calendering. The greatest advantage of using beta transmission method to measure paper formation is that it can be very reliably calibrated to measure true basis weight variation of all kinds of paper and board, independently on sample basis weight or paper grade. This gives us the possibility to measure, compare and judge papers made of different raw materials, different color, or even to measure heavily calendered, coated or printed papers. Scientific research of paper physics has shown that the orientation of the top layer (paper surface) fibers of the sheet paly the key role in paper curling and cockling , causing the typical practical problems (paper jam) with modern fax and copy machines, electronic printing , etc. On the other hand, the fiber orientation at the surface and middle layer of the sheet controls the bending stiffness of paperboard . Therefore, a reliable measurement of paper surface fiber orientation gives us a magnificent tool to investigate and predict paper curling and coclking tendency, and provides the necessary information to finetune, the manufacturing process for optimum quality. many papers, especially heavily calendered and coated grades, do resist liquid and gas penetration very much, bing beyond the measurement range of the traditional instruments or resulting invonveniently long measuring time per sample . The increased surface hardness and use of filler minerals and mechanical pulp make a reliable, nonleaking sample contact to the measurement head a challenge of its own. Paper surface coating causes, as expected, a layer which has completely different permeability characteristics compared to the other layer of the sheet. The latest developments in sensor technologies have made it possible to reliably measure gas flow in well controlled conditions, allowing us to investigate the gas penetration of open structures, such as cigarette paper, tissue or sack paper, and in the low permeability range analyze even fully greaseproof papers, silicon papers, heavily coated papers and boards or even detect defects in barrier coatings ! Even nitrogen or helium may be used as the gas, giving us completely new possibilities to rank the products or to find correlation to critical process or converting parameters. All the modern paper machines include many on-line measuring instruments which are used to give the necessary information for automatic process control systems. hence, the reliability of this information obtained from different sensors is vital for good optimizing and process stability. If any of these on-line sensors do not operate perfectly ass planned (having even small measurement error or malfunction ), the process control will set the machine to operate away from the optimum , resulting loss of profit or eventual problems in quality or runnability. To assure optimum operation of the paper machines, a novel quality assurance policy for the on-line measurements has been developed, including control procedures utilizing traceable, accredited standards for the best reliability and performance.

Water Repellency on a Nanostructured Superhydrophobic Carbon Fibers Network

  • Ko, Tae-Jun;Her, Eun-Kyu;Shin, Bong-Su;Kim, Ho-Young;Lee, Kwang-Ryeol;Hong, Bo-Ki;Kim, Sae-Hoon;Oh, Kyu-Hwan;Moon, Myoung-Woon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.224-224
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    • 2012
  • For decades, carbon fiber has expanded their application fields from reinforced composites to energy storage and transfer technologies such as electrodes for super-capacitors and lithium ion batteries and gas diffusion layers for proton exchange membrane fuel cell. Especially in fuel cell, water repellency of gas diffusion layer has become very important property for preventing flooding which is induced by condensed water could damage the fuel cell performance. In this work, we fabricated superhydrophobic network of carbon fiber with high aspect ratio hair-like nanostructure by preferential oxygen plasma etching. Superhydrophobic carbon fiber surfaces were achieved by hydrophobic material coating with a siloxane-based hydrocarbon film, which increased the water contact angle from $147^{\circ}$ to $163^{\circ}$ and decreased the contact angle hysteresis from $71^{\circ}$ to below $5^{\circ}$, sufficient to cause droplet roll-off from the surface in millimeter scale water droplet deposition test. Also, we have explored that the condensation behavior (nucleation and growth) of water droplet on the superhydrophobic carbon fiber were significantly retarded due to the high-aspect-ratio nanostructures under super-saturated vapor conditions. It is implied that superhydrophobic carbon fiber can provide a passage for vapor or gas flow in wet environments such as a gas diffusion layer requiring the effective water removal in the operation of proton exchange membrane fuel cell. Moreover, such nanostructuring of carbon-based materials can be extended to carbon fiber, carbon black or carbon films for applications as a cathode in lithium batteries or carbon fiber composites.

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Cathode side protection coating for Planar-type SOFC interconnect (평판형 SOFC 분리판 보호코팅 개발)

  • Lee, Jaemyung;Jun, Jaeho;Sung, ByungGeun;Kim, Dohyung;Jun, Junghwan
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.11a
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    • pp.83.2-83.2
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    • 2010
  • 평판형 고체산화물 연료전지(planar SOFC : Solid oxide Fuelcell)는 높은 전류 효율 및 출력밀도를 가지는 중,대형 발전용 전기소자이다. SOFC 스택을 600~800도에서 작동할 경우, 금속 분리판에서 휘발된 크롬에 의한 열화현상과 금속의 산화에 의한 표면 저항의 증가가 큰 문제점으로 알려져 있으며, 이를 개선하기 위한 많은 연구가 진행되고 있다. 본 연구에서는 금속 분리판의 열화를 억제하기 위한 여러 보호코팅의 특성을 밝히고, 특성차이의 원인을 분석하고자 하였다. 모재는 상용 STS444합금 (Nisshin steel 생산) 2.0mmt 박판을 사용하였으며, 표면 상태를 균일하게 하기 위하여 표면은 동일한 #1200 번 사포로 연마후 코팅하였다. 적용한 코팅은 전기도금 Ni 코팅, (MnCo)3O4 wet powder spray 코팅, (MnCo)3O4 ADM코팅 3종이었으며, 코팅층의 두께는 최적 공정조건에 따라 달리 하였다. 산화후 형성되는 표면 산화물의 전기적 특성을 평가하기 위하여 시험편의 비면적 저항 (ASR : area specific resistance)을 장시간 측정하였다. 측정편의 크기는 가로 4cm ${\times}$ 세로 4cm였으며, 100시간 공기중 산화후 측정하였다. 표면 접촉을 높이기 위하여 Pt paste를 40~50um도포하였으며, 1~0.1A인가된 전류에 대한 저항을 4전극법 (4-probe)으로 측정하였다. 표면 코팅층이 크롬 휘발을 억제하는 정도를 평가하기 위하여 크롬 휘발량을 측정하였다. 시편은 가로 1.5cm ${\times}$ 세로 1cm 였으며, 공급된 공기와 수분의 혼합가스와 응축기 표면에 흡착된 크롬의 양을 ICP-MASS법으로 측정하였다.

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Statistical approach to obtain the process optimization of texturing for mono crystalline silicon solar cell: using robust design (단결정 실리콘 태양전지의 통계적 접근 방법을 이용한 texturing 공정 최적화)

  • Kim, Bumho;Kim, Hoechang;Nam, Donghun;Cho, Younghyun
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.11a
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    • pp.47.2-47.2
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    • 2010
  • For reducing outer reflection in mono-crystalline silicon solar cell, wet texturing process has been adapted for long period of time. Nowadays mixed solution with potassium hydroxide and isopropyl alcohol is used in silicon surface texturing by most manufacturers. In the process of silicon texturing, etch rate is very critical for effective texturing. Several parameters influence the result of texturing. Most of all, temperature, process time and concentration of potassium hydroxide can be classified as important factors. In this paper, temperature, process time and concentration of potassium hydroxide were set as major parameters and 3-level test matrix was created by using robust design for the optimized condition. The process optimization in terms of lowest reflection and stable etch rate can be traced by using robust design method.

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