Fabrication and Characterization of an Antistiction Layer by PECVD (plasma enhanced chemical vapor deposition) for Metal Stamps
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Cha, Nam-Goo
(Division of Materials and Chemical Engineering, Micro Biochip Center, Hanyang University)
Park, Chang-Hwa (Division of Materials and Chemical Engineering, Micro Biochip Center, Hanyang University) Cho, Min-Soo (Division of Materials and Chemical Engineering, Micro Biochip Center, Hanyang University) Kim, Kyu-Chae (Division of Materials and Chemical Engineering, Micro Biochip Center, Hanyang University) Park, Jin-Goo (Division of Materials and Chemical Engineering, Micro Biochip Center, Hanyang University) Jeong, Jun-Ho (Precision Machining Group, Korea Institute of Machinery & Materials) Lee, Eung-Sug (Precision Machining Group, Korea Institute of Machinery & Materials) |
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