• Journal of Institute of Control, Robotics and Systems
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• v.9 no.7
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• pp.507-514
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• 2003

Inspection and shape measurement of three-dimensional objects are widely needed in industries for quality monitoring and control. Recently the shape measurement using interferometric principle is found to be a successful methodology among other visual or optical technologies. Especially, the measuring method using wavelength scanning interferometer(WSI) has a great advantage in comparison with other conventional jnterferometric methods in that the absolute distance from the reference surface can be directly obtained from the amount of jnterferometric phase change. However, the measurement methods using WSI proposed by other researchers have low measurement resolution so far because they can't measure fractional phase change. To avoid this shortcoming we propose a new algorithm in this paper, which can obtain a small amount of even fractional phase change by sinusoidal function fitting. To evaluate the effectiveness of the proposed sinusoidal function fitting algorithm, a series of measuring experiments are conducted for discontinuously shaped specimens which have various height. The proposed algorithm shows much more enhanced measurement resolution than other existing conventional algorithms such as zero crossing algorithm and Fourier transform algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.199-205
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• 2014

We propose a new variant of lateral shearing interferometer with a tunable laser source that enables 3D surface profile measurements of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view. We have verified the proposed technique by comparing our measurement result with that of an existing technique and measuring a representative sample of freeform optics. Moreover, we propose a new algorithm that is able to compensate the rotational inaccuracy.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.33A no.10
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• pp.160-167
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• 1996

A new pathlength deviation detection technique which is composed of michelson interferometer is described and verified experimentally. The technique uses a sub-threshold biased visible laser diode of 20$\mu$m coherence length as a low-coherent light source. And for zeroth-order fringe(which is the largest among fringes) identification we used a piezoelectric transducer with a large modulation smplitude, which enables without the need of constant velocity scanning, to distinguish reflection surfaces separated by more than 10$\mu$m with a resolution of less than half-wavelength.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.127.4-127
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• 2001

Inspection and shape measurement of three-dimensional objects are widely needed in industries for quality monitoring and control. A number of visual or optical technologies have been successfully applied to measure three dimensional surfaces. Especially, the shape measurement using an interferometric principle becomes a successful methodology. However, those conventional interferometric methods to measure surface profile have an inherent shortcoming, namely 2∏ ambiguity problem. The problem inevitably happens when the object to be measured has discontinuous shape due to the repetition of interferometric signal with phase period of 2∏. Therefore, in this paper, we choose as a shape measuring method, ...

• Current Optics and Photonics
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• v.3 no.1
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• pp.16-21
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• 2019

We present a broad-bandwidth comb-spacing-swept source (CSWS) based on a differential polarization delay line (DPDL) for interferometric three-dimensional (3D) imaging. The comb spacing of the CSWS is repeatedly swept by the tunable DPDL in the multiwavelength source to provide depth-scanning optical coherence tomography (OCT). As the polarization differential delay of the DPDL is tuned from 5 to 15 ps, the comb spacing along the wavelength continuously varies from 1.6 to 0.53 nm, respectively. The wavelength range of various semiconductor optical amplifiers and the cavity feedback ratio of the tunable fiber coupler are experimentally selected to obtain optimal conditions for a broader 3-dB bandwidth of the multiwavelength spectrum and thus provide a higher axial resolution of $35{\mu}m$ in interferometric OCT imaging. The proposed CSWS-OCT has a simple imaging interferometer configuration without reference-path scanning and a simple imaging process without the complex Fourier transform. 3D surface images of a via-hole structure on a printed circuit board and the top surface of a coin were acquired.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.11 s.353
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• pp.14-18
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• 2006

Optical interferometer is used for various optical measurement fields in optical metrology and biomedical measurements. In an optical interferometer, optical delay line has to change the optical path length of a reference arm to match with that of a sample in and it's speed was limited by reference arm movement speed. In this paper, we proposed an all-fibered RSODRapid Scanning-speed Optical Delay) without any mechanical movement, and we applied this system to optical interferometer. Experimental setup is consist of pulse laser source (center wavelength 1304nm, pulse width 30ps, repetition rate 10GHz), two phase modulators and dispersive shifted fiber. As experimental results, we obtain the maximum time delay of 11ps at 10MHz repetition rate, and it is easily tuneable the time delay by modulation frequency and modulation voltage.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.5
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• pp.89-95
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• 2008

The Acousto-Optic Tunable Filter (AOTF) is a high-speed full-field monochromator which generates two spectrally filtered light beams with ordinary and extraordinary polarization state. Thus, AOTF is widely used to build full-field spectral imaging system or spectral domain interferometer. However, AOTF has a big problem that the angle of diffracted light changes according to the scanning of wavelength, which makes image shift on CCD plane In this paper, we propose an analytic design of prism system to compensate the image shift. The detailed analysis of light paths in a prism and basic experimental results are presented to verify our proposed compensation method. The experimental results agree with simulation results based on suggested prism model and image shift is minimized at optimal condition. Also, it can be extended to compensate the image shift for ordinary and extraordinary polarized light simultaneously.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.4
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• pp.34-40
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• 2004

In this paper, we have studied the OCT(Optical Coherence Tomography) system which has been advantages of high resolution, 2-D cross-sectional images, low cost and small size configuration. The characteristics of light source determine the resolution and coherence length. The light source has a commercial SLD with a central wavelength of 1,285 ill11, 35.3 nm(FWHM). The optical delay line is necessary to make equal with the optical path length to scattered light or reflected light from a sample. In order to make equal the optical path length, the stage that is attached to a reference mirror is controled by a step motor. And the interferometer is configured with the Michelson interferometer by using a single mode fiber, and the scanner can be focused on the sample by using a reference ann Also, the 2-dimension cross-sectional images were measured with scanning the transverse direction of the sample by using a step motor. After detecting the internal signal of lateral direction, a scanner is moved to obtain the cross-sectional image of 2-dimension by using step motor. A photodiode, which has high detection sensitivity and excellent noise characteristics has been used. The detected small signal has a noise and interference. After filtering and amplifying the signal, the output signal is demodulated the waveform And then, a cross-sectional image is seen through converting this signal into a digitalized signal by using an AID converter. The resolution of the sample is about 30${\mu}{\textrm}{m}$, which corresponds to the theoretical resolution. Also, the cross-sectional images of onion cells were measured in real time scheme.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2004.04a
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• pp.5-9
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• 2004

In this paper, we studied the OCT(Optical Coherence Tomography) system which it has been extensively studied because of having some advantages such as high resolution cross-sectional images, low cost, and small size configuration. A basic principle of OCT system is Michelson interferometer. The characteristics of light source determine the resolution and the transmission depth. As a results, the light source have a commercial SLD with a central wavelength of 1,285 nm and FWHM(Full Width at Half Maximum) of 35.3 nm. The optical delay line part is necessary to equal of the optical path length with scattered light or reflected light from sample. In order to equal the optical path length, the stage which is attached to reference mirror is moved linearly by step motor And the interferometer is configured with the Michelson interferometer using single mod fiber, the scanner can be focused of the sample by using the reference arm. Also, the 2-dimensional cross-sectional images were measured with scanning the transverse direction of the sample by using step motor. After detecting the internal signal of lateral direction at a paint of sample, scanner is moved to obtain the cross-sectional image of 2-demensional by using step motor. Photodiode has been used which has high detection sensitivity, excellent noise characteristic, and dynamic range from 800 nm to 1,700 nm. It is detected mixed small signal between noise and interference signal with high frequency After filtering and amplifying this signal, only envelope curve of interference signal is detected. And then, cross-sectional image is shown through converting this signal into digitalized signal using A／D converter. The resolution of the OCT system is about 30$\mu\textrm{m}$ which corresponds to the theoretical resolution. Also, the cross-sectional image of ping-pong ball is measured. The OCT system is configured with Michelson interferometer which has a low contrast because of reducing the power of feedback interference light. Such a problem is overcomed by using the improved inteferometer. Also, in order to obtain the cross-sectional image within a short time, it is necessary to reduce the measurement time for improving the optical delay line.