• Title/Summary/Keyword: w/c

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연속압입 분석을 이용한 W-C-N 확산방지막 물성 연구

  • Lee, Gyu-Yeong;Kim, Su-In;Park, Sang-Jae;Lee, Dong-Gwan;Jeong, Yong-Rok;Jeong, Jun;Lee, Jong-Rim;Lee, Chang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.181-181
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    • 2010
  • 현대 반도체 금속배선 연구에서는 기존에 쓰이던 Al (Aluminium) 금속배선 대신에 Cu (Copper) 금속배선 연구가 진행되고 있다. Cu는 Al 보다 비저항이 낮고, 녹는점도 Al보다 높다는 장점이 있지만 저온에서 기판인 Si (Silicon) 과 반응하고 접착력이 우수하지 못 하다는 단점이 있다. 이런 문제를 해결하기 위하여 확산방지막을 기판과 금속배선 사이에 삽입하는 방법이 제시 되었다. 확산방지막으로는 기존에 쓰이던 Ti (Titanium) 계열의 확산방지막과 W (Tungsten) 계열의 확산방지막이 있다. 이번 연구에서는 W 계열의 확산방지막에 불순물 C (Carbon) 과 N (Nitrogen) 을 첨가한 W-C-N 확산방지막 시편을 제조하였고, N2의 비율을 변화시키며 $600^{\circ}C$, $800^{\circ}C$열처리를 하였다. 본 실험의 결과로, 확산방지막의 $N_2$ 농도가 0, 0.5, 2 sccm으로 증가할수록 고온에서도 Elastic modulus 와 Hardness 값이 시편의 여러 영역에서 비교적 안정적으로 유지된다는 결과를 얻었다. 이 결과로부터 W-C-N 박막의 질소 농도에 따라 고온에서도 비교적 안정적으로 유지된다는 결과를 얻었다. 본 연구에서 시편은 RF magnetron sputtering 방법으로 제작하였고 Elastic modulus와 Hardness의 측정은 Hysitron사의 Triboindenter를 이용하였다. Indenting에 사용된 압입팁은 Berkovich tip을 사용하였다.

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A Study on the Manufacture of Composite W Powder for Low Sintering Temperature by Liquid Reduction Precipitation Method (액상환원침전법에 의한 저온활성화소결용 복합W분말의 제조방법 및 소결특성에 관한 연구)

  • 김창욱;이철;정인;윤성렬
    • Journal of the Korean institute of surface engineering
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    • v.28 no.4
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    • pp.207-218
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    • 1995
  • Tungsten(W) metal has excellent properties in heat-resistance, corrison-resistance and impact-resistance but W-Metal is hard to sinter because higher than $2,000^{\circ}C$ is required to sinter W-powder. Con-sequently, a deposit technique of Nikel Phosphorus(NiP) on W-powber by the liquid reduction precipitation method was performed. Sintering temperature of the resulting W-NiP composite was lowered around to $1,000^{\circ}C$, and the mechanical properties of the sintered body was studied. The most suitable conditions for NiP thin film deposit on W-Powder by the liquid reduction precipitation method, which are composition, concentration, pH and temperature of the liquid reduction solution, were considered. The activated sintering was carried out in a reducing condition furnace. Components and properties of the sintered body were investigated by the density and the hardness measurements, X- ray diffraction analysis, and microscopic photographs of the surface. Quantity of NiP thin film on W-powder could be varied by the change of the liquid reduction solution composition. The sintering temperature of W-NiP composite powder is lowered to $950^{\circ}C$ from $2,000^{\circ}C$ and the hardness is increased (ca. 720 Hv). Large shrinkage could be observed since density was increased from 5.5 to 11.0 g/$cm^2$ which 86.2% of theoretical density. W metal and $Ni_3P$ crystal were detected through X-ray diffraction on the sintered body. Perfectly activated sintering was observed by microscopic photographs.

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Study on Thermal Stability of the Interface between Electroless Ni-W-P Deposits and BGA Lead-Free Solder (Sn-3.0Ag-0.5Cu) (BGA 무연솔더(Sn-3.0Ag-0.5Cu)와 무전해 Ni-W-P 도금층 계면의 열 안정성에 대한 연구)

  • Shin, Dong-Hee;Cho, Jin-Ki;Kang, Seung-Goon
    • Journal of the Microelectronics and Packaging Society
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    • v.17 no.1
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    • pp.25-31
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    • 2010
  • In this study, we investigated the morphology and thermal stability of interfacial phases in joint between lead free solder(Sn-3.0Ag-0.5Cu) and electroless Ni-W-P under bump metallizations(UBM) with different tungsten contents as a function of thermal aging. Content of phosphorus of each deposits was fixed at 8 wt.%, and content of tungsten was variated each 0, 3, 6 and 9 wt.%. Specimens were prepared by reflowing at $255^{\circ}C$, aging range was $200^{\circ}C$ and up to 2 weeks. After reflow process, in the electroless Ni(W)-P/solder joint, the interfacial intermetallic compound(IMC) was showed both $(Cu,Ni)_6Sn_5$ and $(Ni,Cu)_3Sn_4$. UBM and generated IMC at the interface of lead free solder was proportionally increased with aging time. The thickness of IMC was increased because the generation rate of $Ni(W)_3P$ decreased with increasing contents of W.

FPGA Design of Turbo Code based on MAP (MAP 기반 터보코드의 FPGA 설계)

  • Seo, Young-Ho
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.32 no.3C
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    • pp.306-313
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    • 2007
  • In this paper, we efficiently implemented turbo code algorithm in FPGA H/W(hardware) resource. The used turbo code algorithm has the characteristics; the size of constraint is 3, encoder type is 1/3, the size of random interleaver is 2048. The proposed H/W consists of MAP block for calculating alpha and delta using delta value, storing buffer for each value, multiplier for calculating lamda, and lamda buffer. The proposed algorithm and H/W architecture was verified by C++ language and was designed by VHDL. Finally the designed H/W was programmed into FPGA and tested in wireless communication environment for field availability. The target FPGA of the implemented H/W is VERTEX4 XC4VFX12-12-SF363 and it is stably operated in 131.533MHz clock frequency (7.603ns).

A Non-Pt Catalyst for Improved Oxygen Reduction Reaction in Microbial Fuel Cells

  • Kim, Jy-Yeon;Han, Sang-Beom;Oh, Sang-Eun;Park, Kyung-Won
    • Journal of the Korean Electrochemical Society
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    • v.14 no.2
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    • pp.71-76
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    • 2011
  • Fe-tetramethoxyphenylporphyrin on carbon black (Fe-TMPP/C) is examined and compared with carbon (C) and Pt-coated carbon (Pt/C) for oxygen reduction reaction in a two chambered microbial fuel cell (MFC). The Fe-TMPP/C is prepared by heat treatment and characterized using SEM, TEM, and XPS. The electrochemical properties of catalysts are characterized by voltammerty and single cell measurements. It is found that the power generation in the MFC with Fe-TMPP/C as the cathode is higher than that with Pt/C. The maximum power of the Fe-TMPP/C is 0.12 mW compared with 0.10 mW (Pt/C) and 0.02 mW (C). This high output with the Fe-TMPP/C indicates that MFCs are promising in further practical applications with low cost macrocycles catalysts.

A Study on the Reduction of HC and Heat Characteristics of the Dual Pipe Exhaust Manifold (이중관 배기메니폴드의 HC저감효과 및 열특성에 관한 연구)

  • 박경석;허형석
    • Transactions of the Korean Society of Automotive Engineers
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    • v.9 no.6
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    • pp.103-111
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    • 2001
  • During cold-start period, the reduction of exhaust emissions is a challenging task. To decrease harmful gaseous substances such as HC, it is necessary to realize a fast catalyst warm-up. In this study, the performance of dual pipe exhaust system have been carried out through different test mode. From measurement of gas temperature and HC concentration, the following conclusions were derived ; 1) Compared with single pipe, dual pipe exhaust system remarkably increase temperature of exhaust gas going through M.C.C(Main Catalytic Converter). 2) W.C.C.(Warm-up Catalytic Converter) also decreases HC emission. To reduce HC emission, it is helpful to use W.C.C. as well as dual pipe exhaust system. 3) Using finite element method, it is shown that inner parts have much higher distribution of temperature than outer parts.

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WIENER-HOPF C*-ALGEBRAS OF STRONGL PERFORATED SEMIGROUPS

  • Jang, Sun-Young
    • Bulletin of the Korean Mathematical Society
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    • v.47 no.6
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    • pp.1275-1283
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    • 2010
  • If the Wiener-Hopf $C^*$-algebra W(G,M) for a discrete group G with a semigroup M has the uniqueness property, then the structure of it is to some extent independent of the choice of isometries on a Hilbert space. In this paper we show that if the Wiener-Hopf $C^*$-algebra W(G,M) of a partially ordered group G with the positive cone M has the uniqueness property, then (G,M) is weakly unperforated. We also prove that the Wiener-Hopf $C^*$-algebra W($\mathbb{Z}$, M) of subsemigroup generating the integer group $\mathbb{Z}$ is isomorphic to the Toeplitz algebra, but W($\mathbb{Z}$, M) does not have the uniqueness property except the case M = $\mathbb{N}$.

KRONECKER FUNCTION RINGS AND PRÜFER-LIKE DOMAINS

  • Chang, Gyu Whan
    • Korean Journal of Mathematics
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    • v.20 no.4
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    • pp.371-379
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    • 2012
  • Let D be an integral domain, $\bar{D}$ be the integral closure of D, * be a star operation of finite character on D, $*_w$ be the so-called $*_w$-operation on D induced by *, X be an indeterminate over D, $N_*=\{f{\in}D[X]{\mid}c(f)^*=D\}$, and $Kr(D,*)=\{0\}{\cup}\{\frac{f}{g}{\mid}0{\neq}f,\;g{\in}D[X]$ and there is an $0{\neq}h{\in}D[X]$ such that $(c(f)c(h))^*{\subseteq}(c(g)c(h))^*$}. In this paper, we show that D is a *-quasi-Pr$\ddot{u}$fer domain if and only if $\bar{D}[X]_{N_*}=Kr(D,*_w)$. As a corollary, we recover Fontana-Jara-Santos's result that D is a Pr$\ddot{u}$fer *-multiplication domain if and only if $D[X]_{N_*} = Kr(D,*_w)$.

Boron concentration effect of tungsten - Boron - carbon - nitride thin film for diffusion barrier (Tungsten(W)- Boron(B) - Carbon(C) - Nitride(N) 확산방지막의 Boron 불순물에 의한 열확산 특성 연구)

  • Kim, Soo-In;Lee, Chang-Woo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.87-88
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    • 2007
  • 반도체 소자가 초고집적화 되어감에 따라 반도체 공정에서 선폭은 줄어들고 박막은 다층화 되어가고 있다. 이와 같은 제조 공정 하에서는 Si 기판과 금속 박막간의 확산이 커다란 문제로 부각되어 왔다. 특히 Cu는 높은 확산성에 의하여 Si 기판과 접합에서 많은 확산에 의한 문제가 발생하게 되며, 또한 선폭이 줄어듦에 따라 고열이 발생하여 실리콘으로 spiking이 발생하게 된다. 이러한 확산을 방지하기 위하여 이 논문에서는 Tungsten - Carbon - Nitrogen (W-C-N)에 Boron (B)을 첨가하였고, Boron 타겟 power을 조절하여 다양한 조성을 가지는 W-B-C-N 확산방지막을 제작하여 각 조성에 따른 증착률을 조서하였고 $1000^{\circ}C$까지 열처리하여 그 비저항을 측정하여 각 특성을 확인하였다.

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Change of Fibrinolytic and Antioxidative Activities of Codonopsis lanceolata According to Various Storage Conditions, and Heat or Salt Treatments

  • Oh Hae-Sook;Choi Moo Young;Kim Jun-Ho
    • Biomedical Science Letters
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    • v.11 no.1
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    • pp.63-69
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    • 2005
  • We investigated the changes of fibrinolytic and antioxidative activities of wild or cultivated Codonopsis lanceolata, which were packed in woven polypropylene (WP) film or low density polyethylene (LDPE) film and stored for 0, 15, and 30 days at refrigerated $(2\~4^{\circ}C)$ or room $(l8\~20^{\circ}C)$ temperature (So we have 16 samples, and wrote them as the abbreviated words such as W-WP-RE-15, W-WP-RO-15, W-LDPE-RE-15, W-LDPE-RO-15, W-WP-RE-30, W-WP-RO-30, W-LDPE-RE-30, W-LDPE-RO-30, C-WP-RE-15, C-WP-RO-15, C-LDPE-RE-15, C-LDPE-RO-15, C-WP-RE-30, C-WP-RO-30, C-LDPE-RE-30, C-LDPE-RO-30). Fibrinolytic activity of fresh Codonopsis lanceolata cultivated in the mountain or field were 0.8 unit (plasmin unit/ml) or 7.3 units, respectively. In descending order, the activities of wild Codonopsis lanceolata stored for 15 days were as followed; LDPE-RE (0.70 unit), WP-RO (0.52 unit), WP-RE (0.45 unit), and LDPE-RO (0.30 unit). After 30 days, fibrinolytic activities of them decreased to 0.47 unit (LDPE-RE), 0.28 unit (WP-RO), 0.21 unit (WP-RE), and 0.30 unit (LDPE-RO). Considering from the point of fibrinolytic activity, the optimal storage condition of wild Codonopsis lanceolata was packing with LDPE film and storing at $4^{\circ}C$. The change of fibrinolytic activities of Codonopsis lanceolata cultivated in the field revealed the similar trend as wild samples, but the fibrinolytic activities of 30 days-stored samples were maintained better than the wild Codonopsis lanceolata. Fibinolytic activity of wild Codonopsis lancealata was increased by heating for 5 min at $100^{\circ}C$ and decreased by addition of NaCl. Antioxidative activities of Codonopsis lanceolata were also compared from the electron donating activity. Fresh Codonopsis lanceolata had about $70\%$ of electron donating activity. Independent of cultivation area, electron donating activity dropped to $19\~74\%$ (wild Codonopsis lanceolata) and $27\~59\%$ (cultivated Codonopsis lanceolata) during 15 days storage. But after 30 days storage, we obtained the unexpected results, which meant that the activities were higher activities than 15 days-stored samples or even though the fresh samples. In general, Codonopsis lanceolata could maintain antioxidative activities most strongly with LDPE film and chilled condition.

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